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    AUTOMATED FOCUSING OF A MICROSCOPE OF AN OPTICAL INSPECTION SYSTEM
    5.
    发明申请
    AUTOMATED FOCUSING OF A MICROSCOPE OF AN OPTICAL INSPECTION SYSTEM 审中-公开

    公开(公告)号：US20190325568A1

    公开(公告)日：2019-10-24

    申请号：US15955974

    申请日：2018-04-18

    Applicant: International Business Machines Corporation

    Inventor： Franco Stellari ,  Chung-Ching Lin ,  Peilin Song

    IPC: G06T5/50 ,  G02B21/24 ,  G06T5/00 ,  G02B7/36

    Abstract: Systems, computer-implemented methods, and computer program products to focus a microscope. A system can comprise a memory that stores computer executable components and a processor that executes the computer executable components stored in the memory. The computer executable components can comprise an analyzer component that can analyze sub-images of respective sample images to identify one or more sub-images having a maximized variance of a gradient derivative corresponding to the one or more sub-images. The respective sample images can be acquired at one or more focal positions along an optical axis of a microscope. The computer executable components can further comprise a selection component that can select an image, from the respective sample images, that comprises the one or more sub-images identified. The computer executable components can also comprise a focus component that, based on a focal position corresponding to the image selected, can focus the microscope to the focal position.

    INTEGRATED CIRCUIT DEFECT DETECTION USING PATTERN IMAGES
    6.
    发明申请
    INTEGRATED CIRCUIT DEFECT DETECTION USING PATTERN IMAGES 审中-公开

    公开(公告)号：US20190180430A1

    公开(公告)日：2019-06-13

    申请号：US15834602

    申请日：2017-12-07

    Applicant: International Business Machines Corporation

    Inventor： Chung-Ching Lin ,  Thomas McCarroll Shaw ,  Peilin Song ,  Franco Stellari ,  Thomas Anthony Wassick

    IPC: G06T7/00

    Abstract: Techniques that facilitate integrated circuit defect detection using pattern images are provided. In one example, a system generates an equalized pattern image of a pattern image associated with a module under test based on an adaptive contrast equalization technique. The system also identifies a first set of features of the equalized pattern image based on a feature point detection technique and aligns the equalized pattern image with a reference pattern image based on the first set of features and a second set of features of the reference pattern image. Furthermore, the system compares a first set of light intensities of the equalized pattern image to a second set of light intensities of the reference pattern image to identify one or more regions of the module under test that satisfy a defined criterion associated with a defect for the module under test.

    Automated focusing of a microscope of an optical inspection system
    7.
    发明授权
    Automated focusing of a microscope of an optical inspection system 有权

    公开(公告)号：US10755397B2

    公开(公告)日：2020-08-25

    申请号：US15955974

    申请日：2018-04-18

    Applicant: International Business Machines Corporation

    Inventor： Franco Stellari ,  Chung-Ching Lin ,  Peilin Song

    IPC: G06T5/50 ,  G02B21/24 ,  G06T5/00 ,  G02B7/36

    Abstract: Systems, computer-implemented methods, and computer program products to focus a microscope. A system can comprise a memory that stores computer executable components and a processor that executes the computer executable components stored in the memory. The computer executable components can comprise an analyzer component that can analyze sub-images of respective sample images to identify one or more sub-images having a maximized variance of a gradient derivative corresponding to the one or more sub-images. The respective sample images can be acquired at one or more focal positions along an optical axis of a microscope. The computer executable components can further comprise a selection component that can select an image, from the respective sample images, that comprises the one or more sub-images identified. The computer executable components can also comprise a focus component that, based on a focal position corresponding to the image selected, can focus the microscope to the focal position.

    NON-DESTRUCTIVE DETERMINATION OF COMPONENTS OF INTEGRATED CIRCUITS
    10.
    发明申请
    NON-DESTRUCTIVE DETERMINATION OF COMPONENTS OF INTEGRATED CIRCUITS 审中-公开
    集成电路组件的非破坏性确定

    公开(公告)号：US20170074927A1

    公开(公告)日：2017-03-16

    申请号：US14854471

    申请日：2015-09-15

    Applicant: International Business Machines Corporation

    Inventor： Lynne M. Gignac ,  Chung-Ching Lin ,  Franco Stellari

    IPC: G01R31/307 ,  G01R31/303

    CPC classification number: G01R31/307 ,  G01R31/303 ,  H01L22/12

    Abstract: One or more contacts are detected in an electron microscope image corresponding to a region of interest on an integrated circuit. One or more standard cells are identified based on the detected one or more contacts in the electron microscope image. One or more components of the integrated circuit are determined based on the identified one or more standard cells.

    Abstract translation: 在与集成电路上的感兴趣区域对应的电子显微镜图像中检测一个或多个触点。 基于电子显微镜图像中检测到的一个或多个触点来识别一个或多个标准单元。 基于所识别的一个或多个标准单元来确定集成电路的一个或多个组件。

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