公开(公告)号：US10564097B2

公开(公告)日：2020-02-18

申请号：US15225339

申请日：2016-08-01

申请人： International Business Machines Corporation

发明人： Phaedon Avouris ,  Damon B. Farmer ,  Yilei Li ,  Hugen Yan

IPC分类号： G01N21/552 ,  H01L21/04 ,  H01L21/56 ,  H01L21/02 ,  H01L21/31 ,  H01L21/027 ,  H01L21/311

摘要： Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.

公开(公告)号：US09594018B2

公开(公告)日：2017-03-14

申请号：US15225286

申请日：2016-08-01

申请人： International Business Machines Corporation

发明人： Phaedon Avouris ,  Damon B. Farmer ,  Yilei Li ,  Hugen Yan

IPC分类号： G01N21/75 ,  G01N21/552 ,  H01L21/02 ,  H01L21/311 ,  H01L21/027 ,  H01L21/04

CPC分类号： G01N21/554 ,  H01L21/02422 ,  H01L21/02527 ,  H01L21/0277 ,  H01L21/041 ,  H01L21/042 ,  H01L21/31 ,  H01L21/31144 ,  H01L21/56 ,  H01L29/1606

摘要： Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.

摘要翻译： 提供了形成纳米薄片或体积石墨烯的SPR传感器的技术。 一方面，提供一种形成基于石墨烯的SPR传感器的方法，其包括以下步骤：将石墨烯沉积到衬底上，其中所述衬底包括导电层上的电介质层，并且其中所述石墨烯沉积在所述介电层上 ; 以及将所述石墨烯图案化成多个均匀间隔的石墨烯条，其中每个所述石墨烯条的宽度为约50纳米至约5微米，并且在其间的范围，并且其中所述石墨烯条彼此间隔开距离 约5纳米至约50微米，并且其间的范围。 或者，可以使用块状石墨烯，并且使用电介质层形成具有不同介电常数的周期性区域。 还提供了使用本SPR传感器分析样品的测试装置和方法。

公开(公告)号：US20160341661A1

公开(公告)日：2016-11-24

申请号：US15225286

申请日：2016-08-01

申请人： International Business Machines Corporation

发明人： Phaedon Avouris ,  Damon B. Farmer ,  Yilei Li ,  Hugen Yan

IPC分类号： G01N21/552 ,  H01L21/04 ,  H01L21/027 ,  H01L21/02 ,  H01L21/311

CPC分类号： G01N21/554 ,  H01L21/02422 ,  H01L21/02527 ,  H01L21/0277 ,  H01L21/041 ,  H01L21/042 ,  H01L21/31 ,  H01L21/31144 ,  H01L21/56 ,  H01L29/1606

摘要： Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.

公开(公告)号：US20150369735A1

公开(公告)日：2015-12-24

申请号：US14313456

申请日：2014-06-24

申请人： International Business Machines Corporation

发明人： Phaedon Avouris ,  Damon B. Farmer ,  Yilei Li ,  Hugen Yan

IPC分类号： G01N21/552 ,  H01L21/04 ,  H01L21/31 ,  H01L21/02

CPC分类号： G01N21/554 ,  H01L21/02422 ,  H01L21/02527 ,  H01L21/0277 ,  H01L21/041 ,  H01L21/042 ,  H01L21/31 ,  H01L21/31144 ,  H01L21/56 ,  H01L29/1606

摘要： Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.

摘要翻译： 提供了形成纳米薄片或体积石墨烯的SPR传感器的技术。 一方面，提供一种形成基于石墨烯的SPR传感器的方法，其包括以下步骤：将石墨烯沉积到衬底上，其中所述衬底包括导电层上的电介质层，并且其中所述石墨烯沉积在所述介电层上 ; 以及将所述石墨烯图案化成多个均匀间隔的石墨烯条，其中每个所述石墨烯条的宽度为约50纳米至约5微米，并且在其间的范围，并且其中所述石墨烯条彼此间隔开距离 约5纳米至约50微米，并且其间的范围。 或者，可以使用块状石墨烯，并且使用电介质层形成具有不同介电常数的周期性区域。 还提供了使用本SPR传感器分析样品的测试装置和方法。

公开(公告)号：US20160341662A1

公开(公告)日：2016-11-24

申请号：US15225339

申请日：2016-08-01

申请人： International Business Machines Corporation

发明人： Phaedon Avouris ,  Damon B. Farmer ,  Yilei Li ,  Hugen Yan

IPC分类号： G01N21/552 ,  H01L21/04 ,  H01L21/56 ,  H01L21/02

CPC分类号： G01N21/554 ,  H01L21/02422 ,  H01L21/02527 ,  H01L21/0277 ,  H01L21/041 ,  H01L21/042 ,  H01L21/31 ,  H01L21/31144 ,  H01L21/56 ,  H01L29/1606

摘要： Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.

公开(公告)号：US09423345B2

公开(公告)日：2016-08-23

申请号：US14313456

申请日：2014-06-24

申请人： International Business Machines Corporation

发明人： Phaedon Avouris ,  Damon B. Farmer ,  Yilei Li ,  Hugen Yan

IPC分类号： G01N21/75 ,  G01N21/552 ,  H01L21/04 ,  H01L21/31

CPC分类号： G01N21/554 ,  H01L21/02422 ,  H01L21/02527 ,  H01L21/0277 ,  H01L21/041 ,  H01L21/042 ,  H01L21/31 ,  H01L21/31144 ,  H01L21/56 ,  H01L29/1606

摘要： Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.

摘要翻译： 提供了形成纳米薄片或体积石墨烯的SPR传感器的技术。 一方面，提供一种形成基于石墨烯的SPR传感器的方法，其包括以下步骤：将石墨烯沉积到衬底上，其中所述衬底包括导电层上的电介质层，并且其中所述石墨烯沉积在所述介电层上 ; 以及将所述石墨烯图案化成多个均匀间隔的石墨烯条，其中每个所述石墨烯条的宽度为约50纳米至约5微米，并且在其间的范围，并且其中所述石墨烯条彼此间隔开距离 约5纳米至约50微米，并且其间的范围。 或者，可以使用块状石墨烯，并且使用电介质层形成具有不同介电常数的周期性区域。 还提供了使用本SPR传感器分析样品的测试装置和方法。