公开(公告)号：US20230032538A1

公开(公告)日：2023-02-02

申请号：US17654325

申请日：2022-03-10

Applicant: INVENSENSE, INC.

Inventor： Carlo Pinna ,  Federico Mazzarella ,  Daniele Gardino ,  Cristiano Rocco Marra ,  Francesco Lazzarini

IPC: H04B1/10 ,  H04B1/00

Abstract: The described technology is generally directed towards a sensor signal multiplexer and digitizer with analog notch filter and optimized sample frequency, and corresponding methods of use and manufacture. In some examples, the disclosed technologies can be used to reduce vibration sensitivity of an inertial measurement unit (IMU). The disclosed sensor signal multiplexer can sample sensor inputs on multiple input channels at a first, higher frequency, and integrate samples for each channel in order to generate lower frequency sensor outputs. The lower frequency sensor outputs can be converted to digital form.

公开(公告)号：US11466986B2

公开(公告)日：2022-10-11

申请号：US16221415

申请日：2018-12-14

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Carlo Pinna ,  Ronak Chetan Desai

IPC: G01C19/5776

Abstract: Microelectromechanical systems (MEMS) gyroscopes and related sense frequency tracking techniques are described. Various embodiments facilitate sense frequency tracking and offset and/or sensitivity change compensation. Exemplary embodiments can comprise receiving a sense signal at an output of a MEMS gyroscope and determining a sense resonant frequency of the sense signal. In addition, exemplary methods can comprise generating an input sine wave with a frequency of the sense resonant frequency of the sense signal injecting the input sine wave into the MEMS gyroscope, to facilitate sense frequency tracking.

公开(公告)号：US20190186917A1

公开(公告)日：2019-06-20

申请号：US16221415

申请日：2018-12-14

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Carlo Pinna ,  Ronak Chetan Desai

IPC: G01C19/5776

CPC classification number: G01C19/5776

Abstract: Microelectromechanical systems (MEMS) gyroscopes and related sense frequency tracking techniques are described. Various embodiments facilitate sense frequency tracking and offset and/or sensitivity change compensation. Exemplary embodiments can comprise receiving a sense signal at an output of a MEMS gyroscope and determining a sense resonant frequency of the sense signal. In addition, exemplary methods can comprise generating an input sine wave with a frequency of the sense resonant frequency of the sense signal injecting the input sine wave into the MEMS gyroscope, to facilitate sense frequency tracking.

公开(公告)号：US20250052573A1

公开(公告)日：2025-02-13

申请号：US18535271

申请日：2023-12-11

Applicant: InvenSense, Inc.

Inventor： Federico Mazzarella ,  Giacomo Petracca ,  Luca Collamati ,  Andrea Di Ruzza ,  Carlo Pinna ,  Vadim Tsinker ,  Carlo Mattaliano

IPC: G01C19/5776

Abstract: A MEMS gyroscope includes a mixed analog and digital drive loop. A drive sense signal from a suspended spring-mass system is received by the drive loop, rectified, and compared to a reference signal. The result of the comparison is processed and converted into a digital signal that is processed by a digital filter and a digital pulse-width modulator of the drive loop. The output of the pulse width modulator controls a high-voltage drive of the drive loop that generates a drive signal having an amplitude based on the pulse width modulator output signal and supplies the drive signal to drive the suspended spring-mass system.

公开(公告)号：US20230160696A1

公开(公告)日：2023-05-25

申请号：US17986598

申请日：2022-11-14

Applicant: InvenSense, Inc.

Inventor： Vito Avantaggiati ,  Carlo Pinna ,  Federico Mazzarella

IPC: G01C19/5649 ,  G01C19/5656 ,  G01C25/00

CPC classification number: G01C19/5649 ,  G01C19/5656 ,  G01C25/00

Abstract: An algorithm and architecture for sense transfer function estimation injects one or more test signals from a signal generator into a MEMS gyroscope to detect an output signal (e.g., proof mass output sense signal), including an in-phase (e.g., Coriolis) component and a quadrature component. The in-phase and quadrature components are encoded with reference signals to determine phase and/or gain variation and are processed via a variety of components (e.g., matrix rotation, digital gain, tones demodulator, transfer function errors estimation, etc.) to estimate a sense transfer function of the MEMS (e.g., Hs(fd)) and corresponding phase and/or gain offset of Hs(fd). The in-phase and quadrature components are also compensated for phase and/or gain offset by system components.

公开(公告)号：US20210262796A1

公开(公告)日：2021-08-26

申请号：US17317787

申请日：2021-05-11

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Carlo Pinna ,  Ronak Chetan Desai

IPC: G01C19/5776

Abstract: Microelectromechanical systems (MEMS) gyroscopes and related sense frequency tracking techniques are described. Various embodiments facilitate sense frequency tracking and offset and/or sensitivity change compensation. Exemplary embodiments can comprise receiving a sense signal at an output of a MEMS gyroscope and determining a sense resonant frequency of the sense signal. In addition, exemplary methods can comprise generating an input sine wave with a frequency of the sense resonant frequency of the sense signal injecting the input sine wave into the MEMS gyroscope, to facilitate sense frequency tracking.

公开(公告)号：US11821731B2

公开(公告)日：2023-11-21

申请号：US17400102

申请日：2021-08-11

Applicant: INVENSENSE, INC.

Inventor： Carlo Pinna ,  Sriraman Dakshinamurthy

IPC: H03M3/00 ,  G01C19/5712

CPC classification number: G01C19/5712 ,  H03M3/358 ,  H03M3/402 ,  H03M3/458

Abstract: Facilitating minimization of non-linearity effects of a delay of a capacitance-to-voltage (C2V) converter on an output of a gyroscope is presented herein. A sense output signal of a sense mass of the gyroscope and a drive output signal of a drive mass of the gyroscope are electronically coupled to respective analog-to-digital converter (ADC) inputs of bandpass sigma-delta ADCs of the gyroscope. The bandpass sigma-delta ADCs include respective C2V converters that are electronically coupled, via respective feedback loops, to the respective ADC inputs to facilitate reductions of respective propagation delays of the bandpass sigma-delta ADCs. Respective ADC outputs of the bandpass sigma-delta ADCs are electronically coupled to demodulator inputs of a demodulator of the gyroscope that transforms the sense output into an output of the MEMS gyroscope representing an external stimulus that has been applied to the sense mass.

公开(公告)号：US11754397B2

公开(公告)日：2023-09-12

申请号：US17317787

申请日：2021-05-11

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Carlo Pinna ,  Ronak Chetan Desai

IPC: G01C19/5776

CPC classification number: G01C19/5776

Abstract: Microelectromechanical systems (MEMS) gyroscopes and related sense frequency tracking techniques are described. Various embodiments facilitate sense frequency tracking and offset and/or sensitivity change compensation. Exemplary embodiments can comprise receiving a sense signal at an output of a MEMS gyroscope and determining a sense resonant frequency of the sense signal. In addition, exemplary methods can comprise generating an input sine wave with a frequency of the sense resonant frequency of the sense signal injecting the input sine wave into the MEMS gyroscope, to facilitate sense frequency tracking.

公开(公告)号：US10996075B2

公开(公告)日：2021-05-04

申请号：US16221409

申请日：2018-12-14

Applicant: INVENSENSE, INC.

Inventor： Sriraman Dakshinamurthy ,  Doruk Senkal ,  Ali Shirvani ,  Ronak Chetan Desai ,  Carlo Pinna

IPC: G01C25/00 ,  B81B3/00 ,  B81B7/02 ,  G01C19/56

Abstract: Microelectromechanical systems (MEMS) gyroscopes and related measurement and calibration techniques are described. Various embodiments facilitate phase estimation of an ideal phase for a demodulator mixer associated with an exemplary MEMS gyroscope using quadrature tuning, which can improve offset performance over life time for exemplary MEMS gyroscopes. Exemplary embodiments can comprise adjusting a quadrature component of an exemplary MEMS gyroscope sense signal, measuring a change in offset of the exemplary MEMS gyroscope at an output of a demodulator mixer associated with the exemplary MEMS gyroscope, estimating a phase error between the quadrature component and a demodulation phase angle of the demodulator mixer based on the change in the offset, and periodically adjusting the demodulation phase angle of the demodulator mixer based on the phase error.

公开(公告)号：US12270652B2

公开(公告)日：2025-04-08

申请号：US17986598

申请日：2022-11-14

Applicant: InvenSense, Inc.

Inventor： Vito Avantaggiati ,  Carlo Pinna ,  Federico Mazzarella

IPC: G01C19/5649 ,  G01C19/5656 ,  G01C19/5776 ,  G01C25/00

Abstract: An algorithm and architecture for sense transfer function estimation injects one or more test signals from a signal generator into a MEMS gyroscope to detect an output signal (e.g., proof mass output sense signal), including an in-phase (e.g., Coriolis) component and a quadrature component. The in-phase and quadrature components are encoded with reference signals to determine phase and/or gain variation and are processed via a variety of components (e.g., matrix rotation, digital gain, tones demodulator, transfer function errors estimation, etc.) to estimate a sense transfer function of the MEMS (e.g., Hs(fd)) and corresponding phase and/or gain offset of Hs(fd). The in-phase and quadrature components are also compensated for phase and/or gain offset by system components.