公开(公告)号：US10712218B2

公开(公告)日：2020-07-14

申请号：US16370752

申请日：2019-03-29

Applicant: InvenSense, Inc.

Inventor： Johannes Schumm ,  Andreas Reinhard ,  Thomas Kraehenbuehl ,  Stefan Thiele ,  Rene Hummel ,  Chung-Hsien Lin ,  Wang Shen Su ,  Tsung Lin Tang ,  Chia Ming Lin

IPC: G01L9/00 ,  B81B3/00 ,  B81C1/00 ,  H01L29/84

Abstract: A sensor includes a deformable membrane that deflects in response to a stimuli. The sensor further includes a capacitive element coupled to the deformable membrane. The capacitive element is disposed within an enclosed cavity of the sensor. The capacitive element changes capacitance in response to the deformable membrane deflecting. The capacitive element comprises a getter material for collecting gas molecules within the enclosed cavity.