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公开(公告)号:US20170322291A1
公开(公告)日:2017-11-09
申请号:US15294130
申请日:2016-10-14
申请人: InvenSense, Inc.
发明人: James Christian SALVIA , Michael H. PERROTT , Marian VOROS , Eldwin NG , Julius Ming-Lin TSAI , Nikhil APTE
IPC分类号: G01S7/521 , H01L27/092
CPC分类号: B06B1/0622 , G06F3/03547 , G06F2203/0338 , G06K9/0002 , G06K9/0008 , G06K9/001 , H01L27/0922
摘要: An electronic device includes a plurality of CMOS control elements arranged in a two-dimensional array, where each CMOS control element of the plurality of CMOS control elements includes two semiconductor devices. The plurality of CMOS control elements include a first subset of CMOS control elements, each CMOS control element of the first subset of CMOS control elements including a semiconductor device of a first class and a semiconductor device of a second class, and a second subset of CMOS control elements, each CMOS control element of the second subset of CMOS control elements including a semiconductor device of the first class and a semiconductor device of a third class. The plurality of CMOS control elements are arranged in the two-dimensional array such that CMOS semiconductor devices of the first class are only adjacent to other CMOS semiconductor devices of the first class, CMOS semiconductor devices of the second class are only adjacent to other CMOS semiconductor devices of the second class, and CMOS semiconductor devices of the third class are only adjacent to other CMOS semiconductor devices of the third class.
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公开(公告)号:US20170326594A1
公开(公告)日:2017-11-16
申请号:US15469383
申请日:2017-03-24
申请人: InvenSense, Inc.
发明人: Renata Melamud BERGER , Eldwin NG
IPC分类号: B06B1/06
CPC分类号: B06B1/0662 , B06B1/06 , G10K9/122 , G10K13/00
摘要: A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device includes a substrate, an edge support structure connected to the substrate, and a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane having non-uniform stiffness. The membrane includes a piezoelectric layer, a first electrode and a second electrode coupled to opposing sides of the piezoelectric layer, and a mechanical support layer coupled to one of the first electrode and the second electrode.
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公开(公告)号:US20170322292A1
公开(公告)日:2017-11-09
申请号:US15294186
申请日:2016-10-14
申请人: InvenSense, Inc.
发明人: James Christian SALVIA , Michael H. PERROTT , Marian VOROS , Eldwin NG , Julius Ming-Lin TSAI , Nikhil APTE
IPC分类号: G01S7/521 , H01L27/092
CPC分类号: H01L27/0925 , B06B1/0622 , B81C1/00246 , G06F3/03547 , G06F2203/0338 , G06K9/0002 , H01L21/823885 , H01L27/0922
摘要: An electronic device includes a plurality of CMOS control elements arranged in a two-dimensional array, where each CMOS control element of the plurality of CMOS control elements includes semiconductor devices. The plurality of CMOS control elements each including a PMOS semiconductor device portion comprising a high voltage PMOS device and a low voltage PMOS device and an NMOS semiconductor device portion comprising a high voltage NMOS device and a low voltage NMOS device. The plurality of CMOS control elements are arranged in the two-dimensional array such that the PMOS semiconductor device portion of a CMOS control element of the plurality of CMOS control elements is only adjacent to other PMOS semiconductor device portions of adjacent CMOS control elements of the plurality of CMOS control elements, and such that the NMOS semiconductor device portion of a CMOS control element of the plurality of CMOS control elements is only adjacent to other NMOS semiconductor device portions of adjacent CMOS control elements of the plurality of CMOS control elements.
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公开(公告)号:US20190247887A1
公开(公告)日:2019-08-15
申请号:US16395045
申请日:2019-04-25
申请人: InvenSense, Inc.
发明人: James Christian SALVIA , Michael H. PERROTT , Marian VOROS , Eldwin NG , Julius Ming-Lin TSAI , Nikhil APTE
IPC分类号: B06B1/06 , G06K9/00 , G06F3/0354
CPC分类号: B06B1/0622 , G06F3/03547 , G06F2203/0338 , G06K9/0002 , G06K9/0008 , G06K9/001 , H01L27/0922
摘要: An electronic device includes a plurality of CMOS control elements arranged in a two-dimensional array, where each CMOS control element of the plurality of CMOS control elements includes two semiconductor devices. The plurality of CMOS control elements include a first subset of CMOS control elements, each CMOS control element of the first subset of CMOS control elements including a semiconductor device of a first class and a semiconductor device of a second class, and a second subset of CMOS control elements, each CMOS control element of the second subset of CMOS control elements including a semiconductor device of the first class and a semiconductor device of a third class. The plurality of CMOS control elements are arranged in the two-dimensional array such that CMOS semiconductor devices of the first class are only adjacent to other CMOS semiconductor devices of the first class, CMOS semiconductor devices of the second class are only adjacent to other CMOS semiconductor devices of the second class, and CMOS semiconductor devices of the third class are only adjacent to other CMOS semiconductor devices of the third class.
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公开(公告)号:US20170322290A1
公开(公告)日:2017-11-09
申请号:US15205743
申请日:2016-07-08
申请人: InvenSense, Inc.
发明人: Eldwin NG , Julius Ming-Lin TSAI , Nikhil APTE
IPC分类号: G01S7/521 , A61B5/1172 , A61B8/00 , G01S15/89
CPC分类号: G01S7/521 , A61B5/1172 , A61B8/4483 , B06B1/0622 , B06B1/0688 , G01S15/89 , H01L41/047 , H01L41/0973
摘要: A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane is configured to allow movement at ultrasonic frequencies. The membrane includes a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. An interior support structure is disposed within the cavity and connected to the substrate and the membrane.
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