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公开(公告)号：US20150266723A1
公开(公告)日：2015-09-24
申请号：US14218561
申请日：2014-03-18
Applicant: InvenSense, Inc.
Inventor： Mei-Lin CHAN , Michael Julian DANEMAN , Erhan Polatkan ATA , Xiang LI , Martin LIM
CPC classification number: H04R19/04 , B81B2201/0257 , B81B2207/012 , B81C1/00238 , B81C2203/0792 , H04R1/08 , H04R19/005 , H04R31/003 , H04R31/006 , H04R2201/003
Abstract: A MEMS device includes a first plate coupled to a second plate and a fixed third plate formed on a first substrate. The first and second plates are displaced in the presence of an acoustic pressure differential across the surfaces of the first plate. The MEMS device also includes a first electrode formed on the third plate and a second electrode formed on the second substrate. The first, second plate, and third plates are contained in an enclosure formed by a first and second substrates. The device includes an acoustic port to expose the first plate to the environment. The MEMS device also includes a first gap formed between the second and third plates and a second gap formed between the second plate and the second electrode. The displacement of the second plate causes the first gap to change inversely to the second gap.
Abstract translation: MEMS器件包括耦合到第二板的第一板和形成在第一衬底上的固定的第三板。 在第一板的表面上存在声压差的情况下，第一和第二板被移位。 MEMS器件还包括形成在第三板上的第一电极和形成在第二衬底上的第二电极。 第一，第二板和第三板被包含在由第一和第二基板形成的外壳中。 该装置包括用于将第一板暴露于环境的声学端口。 MEMS器件还包括形成在第二和第三板之间的第一间隙和形成在第二板和第二电极之间的第二间隙。 第二板的位移导致第一间隙与第二间隙成反比变化。
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公开(公告)号：US20210019488A1
公开(公告)日：2021-01-21
申请号：US16741390
申请日：2020-01-13
Applicant: InvenSense, Inc.
Inventor： Quy CHAU , Mei-Lin CHAN
IPC: G06K9/00
Abstract: An ultrasonic sensor includes a two-dimensional array of ultrasonic transducers, wherein the two-dimensional array of ultrasonic transducers is substantially flat, a contact layer having a non-uniform thickness overlying the two-dimensional array of ultrasonic transducers, and an array controller configured to control activation of ultrasonic transducers during an imaging operation. During the imaging operation, the array controller is configured to control a transmission frequency of activated ultrasonic transducers during the imaging operation, wherein a plurality of transmission frequencies are used during the imaging operation to account for an impact of an interference pattern caused by the non-uniform thickness of the contact layer, and is configured to capture at least one fingerprint image using the plurality of transmission frequencies.
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Patent Agency Ranking
公开(公告)号：US20200367858A1
公开(公告)日：2020-11-26
申请号：US16879519
申请日：2020-05-20
Applicant: InvenSense, Inc.
Inventor： Leonardo BALDASARRE , Mei-Lin CHAN
Abstract: An ultrasonic transducer device including a substrate, an edge support structure connected to the substrate, and a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies. The membrane includes a first piezoelectric layer having a first surface and a second surface, a second piezoelectric layer having a first surface and a second surface, wherein the second surface of the first piezoelectric layer faces the first surface of the second piezoelectric layer, a first electrode coupled to the first surface of the first piezoelectric layer, a second electrode coupled to the second surface of the second piezoelectric layer, and a third electrode between the first piezoelectric layer and the second piezoelectric layer.
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公开(公告)号：US20210019487A1
公开(公告)日：2021-01-21
申请号：US16741030
申请日：2020-01-13
Applicant: InvenSense, Inc.
Inventor： Quy CHAU , Mei-Lin CHAN , Xiaoyue JIANG
Abstract: An ultrasonic sensor includes a two-dimensional array of ultrasonic transducers, wherein the two-dimensional array of ultrasonic transducers is substantially flat, a contact layer having a non-uniform thickness overlying the two-dimensional array of ultrasonic transducers, and an array controller configured to control activation of ultrasonic transducers during an imaging operation for imaging a plurality of pixels at a plurality of positions within the two-dimensional array of ultrasonic transducers. For imaging a pixel of the plurality of pixels, the array controller is configured to activate a first subset of ultrasonic transducers of the two-dimensional array of ultrasonic transducers to generate an ultrasonic beam directed to a contact surface of the contact layer, and activate a second subset of ultrasonic transducers of the two-dimensional array of ultrasonic transducers to receive a reflected ultrasonic beam, wherein the second subset of ultrasonic transducers is at a location within the two-dimensional array of ultrasonic transducers to account for a local angle between the two-dimensional array of ultrasonic transducers and the contact surface where the ultrasonic beam interacts with the contact surface.
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公开(公告)号：US20200061670A1
公开(公告)日：2020-02-27
申请号：US16107894
申请日：2018-08-21
Applicant: InvenSense, Inc.
Inventor： Mei-Lin CHAN , Nikhil APTE , Renata Melamud BERGER
Abstract: An electronic device includes a substrate layer having a front surface and a back surface opposite the front surface, a plurality of ultrasonic transducers formed on the front surface of the substrate layer, wherein the plurality of ultrasonic transducers generate backward waves during operation, the backward waves propagating through the substrate layer, and a plurality of substrate structures formed within the back surface of the substrate layer, the plurality of substrate structures configured to modify the backward waves during the operation.
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公开(公告)号：US20220067324A1
公开(公告)日：2022-03-03
申请号：US17454796
申请日：2021-11-12
Applicant: InvenSense, Inc.
Inventor： Quy CHAU , Mei-Lin CHAN
IPC: G06K9/00
Abstract: An ultrasonic sensor includes a two-dimensional array of ultrasonic transducers, wherein the two-dimensional array of ultrasonic transducers is substantially flat, a contact layer having a non-uniform thickness overlying the two-dimensional array of ultrasonic transducers, and an array controller configured to control activation of ultrasonic transducers during an imaging operation. During the imaging operation, the array controller is configured to control a transmission frequency of activated ultrasonic transducers during the imaging operation, wherein a plurality of transmission frequencies are used during the imaging operation to account for an impact of an interference pattern caused by the non-uniform thickness of the contact layer, and is configured to capture at least one fingerprint image using the plurality of transmission frequencies.
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公开(公告)号：US20210278927A1
公开(公告)日：2021-09-09
申请号：US17195465
申请日：2021-03-08
Applicant: InvenSense, Inc.
Inventor： Mark JENNINGS , Mei-Lin CHAN
IPC: G06F3/043 , G06F3/041 , G06K9/00 , H01L41/083 , H01L41/047
Abstract: An ultrasonic sensor includes a two-dimensional array of ultrasonic transducers, a contact layer, a matching layer between the two-dimensional array and the contact layer, where the matching layer has a non-uniform thickness, and an array controller configured to control activation of ultrasonic transducers during an imaging operation for imaging a plurality of pixels within the two-dimensional array of ultrasonic transducers. During the imaging operation, the array controller is configured to activate different subsets of ultrasonic transducers associated with different regions of the two-dimensional array of ultrasonic transducers at different transmission frequencies, where the different frequencies are determined such that a thickness of the matching layer at a region is substantially equal to a quarter wavelength of the first transmission frequency for the region. The array controller is also configured to combine the plurality of pixels into a compound fingerprint image that compensates for the non-uniform thickness of the matching layer.
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