公开(公告)号：US06172349B2

公开(公告)日：2001-01-09

申请号：US08835216

申请日：1997-03-31

申请人： Isaac Katz ,  Michael Faeyrman ,  Yehuda Elisha ,  Shimon Kostianovsky ,  Yoram Uziel ,  Joel L. Seligson ,  Yoram Hanfling

发明人： Isaac Katz ,  Michael Faeyrman ,  Yehuda Elisha ,  Shimon Kostianovsky ,  Yoram Uziel ,  Joel L. Seligson ,  Yoram Hanfling

IPC分类号： G01B900

CPC分类号： G01B9/04 ,  G02B21/244

摘要： A method and apparatus for automatically focusing a high resolution microscope, wherein during setup the operator designates areas within each field of view where a measurement will be taken, and for each area of interest translates the microscope along its optical axis (Z-axis) while measuring the image intensities at discrete subareas within the area of interest. These image intensities are then evaluated, and those having the greatest signal-to-noise ratio and occurring at a common point along the Z-axis will be selected, and the corresponding subareas identified. During subsequent inspections of the area of interest, only light reflected from the identified subareas will be used to focus the microscope. The invention has application in both conventional microscopy and interferometry.

摘要翻译： 一种用于自动对焦高分辨率显微镜的方法和装置，其中在设置期间，操作者指定将在每个视野内进行测量的区域，并且对于每个感兴趣的区域，显微镜沿其光轴（Z轴）转换，同时 测量感兴趣区域内离散子区域的图像强度。 然后评估这些图像强度，并且将选择具有最大信噪比并且沿着Z轴在公共点处发生的图像强度，并且识别相应的子区域。 在随后对感兴趣的区域进行检查时，只有从识别的子区域反射的光线才能用于对显微镜进行对焦。 本发明可应用于常规显微镜和干涉测量。

公开(公告)号：US06566169B1

公开(公告)日：2003-05-20

申请号：US09869058

申请日：2001-10-16

申请人： Yoram Uziel ,  Natalie Levinsohn ,  David Yogev ,  Yehuda Elisha ,  Yitzhak Ofer ,  Lev Fris Man ,  Jonathan Baron

发明人： Yoram Uziel ,  Natalie Levinsohn ,  David Yogev ,  Yehuda Elisha ,  Yitzhak Ofer ,  Lev Fris Man ,  Jonathan Baron

IPC分类号： B44C122

CPC分类号： B23K26/147 ,  B08B7/0042 ,  B23K26/032 ,  B23K26/0823 ,  B23K26/1438 ,  G03F1/82 ,  H01L21/02046 ,  H01L21/02098 ,  H01L21/67028 ,  H01L21/681 ,  Y10S438/906

摘要： Particles are removed from the surface of a substrate. Respective position coordinates of the particles on the surface are determined. A beam of electromagnetic energy is directed at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.

摘要翻译： 从基材的表面除去颗粒。 确定颗粒在表面上的相应位置坐标。 电磁能束依次指向每个颗粒的坐标，使得表面上的电磁能的吸收导致颗粒从表面移开，基本上不损坏表面本身。