公开(公告)号：US06566169B1

公开(公告)日：2003-05-20

申请号：US09869058

申请日：2001-10-16

申请人： Yoram Uziel ,  Natalie Levinsohn ,  David Yogev ,  Yehuda Elisha ,  Yitzhak Ofer ,  Lev Fris Man ,  Jonathan Baron

发明人： Yoram Uziel ,  Natalie Levinsohn ,  David Yogev ,  Yehuda Elisha ,  Yitzhak Ofer ,  Lev Fris Man ,  Jonathan Baron

IPC分类号： B44C122

CPC分类号： B23K26/147 ,  B08B7/0042 ,  B23K26/032 ,  B23K26/0823 ,  B23K26/1438 ,  G03F1/82 ,  H01L21/02046 ,  H01L21/02098 ,  H01L21/67028 ,  H01L21/681 ,  Y10S438/906

摘要： Particles are removed from the surface of a substrate. Respective position coordinates of the particles on the surface are determined. A beam of electromagnetic energy is directed at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.

摘要翻译： 从基材的表面除去颗粒。 确定颗粒在表面上的相应位置坐标。 电磁能束依次指向每个颗粒的坐标，使得表面上的电磁能的吸收导致颗粒从表面移开，基本上不损坏表面本身。

公开(公告)号：US06450180B1

公开(公告)日：2002-09-17

申请号：US09314205

申请日：1999-05-19

申请人： Dov Zahavi ,  Natalie Levinsohn ,  Shay Ghilai

发明人： Dov Zahavi ,  Natalie Levinsohn ,  Shay Ghilai

IPC分类号： B08B700

CPC分类号： B23K26/0608 ,  B23K26/0604 ,  B23K26/067 ,  B23K26/08 ,  B23K26/082 ,  Y10S134/902

摘要： A method of laser treatment of surfaces comprises the steps of: I) projecting onto the substrate surface laser pulses defining a beam; II) causing said beam and said surface to become relatively displaced in such a way that said beam will intersect at each number of pulses, preferably at each pulse, an area of said surface that is different from and non-adjacent to the area the beam intersected before said displacement; and III) continuing to cause that the beam and said surface to be treated so to become relatively displaced, until all of said strips have thus been treated by the laser beam.

摘要翻译： 表面的激光处理方法包括以下步骤：I）将限定光束的激光脉冲投影到衬底表面上; II）使得所述光束和所述表面变得相对位移，使得所述光束将以每个脉冲数，优选地在每个脉冲处相交，所述表面的不同于并且不相邻于所述区域的区域 在所述位移之前相交; 和III）继续导致所述光束和所述表面被处理成相对移位，直到所有所述条已经被激光束处理。

公开(公告)号：US06407809B1

公开(公告)日：2002-06-18

申请号：US09501230

申请日：2000-02-10

申请人： Moshe Finarov ,  Natalie Levinsohn ,  Shay Ghilai

发明人： Moshe Finarov ,  Natalie Levinsohn ,  Shay Ghilai

IPC分类号： G01N2100

CPC分类号： G01N21/956 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8825 ,  G01N2201/0635

摘要： An optical inspection system is presented, aimed at detecting defects on a substantially flat workpiece having an axis of symmetry. The workpiece is supported on a stage so as to be in an inspection plane, the stage being mounted for rotation in a plane parallel to the inspection plane. A scanning apparatus is accommodated above the workpiece, and comprises an illumination assembly, a plurality of optical assemblies, and a plurality of area sensors. The illumination assembly produces a plurality of incident radiation components for illuminating a strip on the workpiece extending parallel to the axis symmetry between two opposite sides thereof. The optical assemblies are aligned along the axis of symmetry in a spaced-apart parallel relationship, and are mounted for reciprocating movement within a plane parallel to an inspection area that covers substantially a half of the workpiece. The area sensors are arranged in a predetermined manner, each area sensor being associated with a corresponding one of the optical assemblies for receiving a component of returned radiation and generating data representative thereof. The half of the workpiece is strip-by-strip inspected, then the stage with the workpiece is rotated by 180° and the other half of the workpiece is strip-by-strip inspected.

摘要翻译： 提出了一种光学检查系统，目的在于检测具有对称轴的基本平坦的工件上的缺陷。 工件被支撑在台面上以便在检查平面中，该台被安装成在与检查平面平行的平面中旋转。 扫描装置容纳在工件上方，并且包括照明组件，多个光学组件和多个区域传感器。 照明组件产生多个入射辐射部件，用于照射平行于其两个相对侧之间的轴对称的工件上的条带。 光学组件沿着对称轴线以间隔开的平行关系对准，并且被安装用于在平行于覆盖工件的大致一半的检查区域的平面内往复运动。 区域传感器以预定的方式布置，每个区域传感器与相应的一个光学组件相关联，用于接收返回的辐射的分量并产生代表其的数据。 工件的一半被逐条检查，然后工件的台面旋转180°，另一半工件被逐条检查。

公开(公告)号：US5661748A

公开(公告)日：1997-08-26

申请号：US593255

申请日：1996-01-29

申请人： Dov Zahavi ,  Natalie Levinsohn ,  Shay Ghilai

发明人： Dov Zahavi ,  Natalie Levinsohn ,  Shay Ghilai

IPC分类号： G02B27/00 ,  G02B27/10 ,  H01S3/08

CPC分类号： G02B27/143 ,  Y10S372/70

摘要： A device for extending the duration of a light pulse by a factor of an integer or by a factor which differs from an integer. The light pulse is passed through a device which divides the initial beam into a number of parts, where the first part passes unhindered while the subsequent parts of the beam are retarded and pass through the system after various delay periods, resulting in the desired extension of the pulse duration. The basic components of the novel device are spherical mirrors facing each other, a special reflector and a translation plate.

摘要翻译： 用于将光脉冲的持续时间延长整数因子或不同于整数的因子的装置。 光脉冲通过将初始光束分成许多部分的装置，其中第一部分不受阻碍地通过，而光束的后续部分被延迟并在各种延迟周期之后通过系统，导致期望的延伸 脉冲持续时间。 新型装置的基本部件是面对面的球面镜，特殊反射器和平板。