Scatter Diagram Display Device and Surface Analyzer
    1.
    发明申请
    Scatter Diagram Display Device and Surface Analyzer 有权
    散点图显示设备和表面分析仪

    公开(公告)号:US20160110896A1

    公开(公告)日:2016-04-21

    申请号:US14886345

    申请日:2015-10-19

    Applicant: JEOL Ltd.

    CPC classification number: G01N23/225

    Abstract: A scatter diagram display device includes a principal component analysis section that performs principal component analysis on intensity or concentration map data that represents each element, a priority level setting section that sets a priority level to each element based on the results of the principal component analysis performed by the principal component analysis section, and a display control section that performs a control process that arranges a plurality of scatter diagrams generated by combining each element based on the priority level that has been set to each element by the priority level setting section, and displays the plurality of scatter diagrams on a display section.

    Abstract translation: 散点图显示装置包括:主成分分析部,对表示各要素的强度或浓度图数据进行主成分分析;优先级设定部,根据进行的主成分分析的结果,对各元素设定优先级; 以及显示控制部,其执行控制处理,该控制处理通过基于优先级设定部对每个要素设定的优先级进行组合而构成的多个散点图,并且显示 在显示部分上的多个散点图。

    Phase Analyzer, Phase Analysis Method, and Surface Analyzer
    2.
    发明申请
    Phase Analyzer, Phase Analysis Method, and Surface Analyzer 有权
    相位分析仪,相位分析方法和表面分析仪

    公开(公告)号:US20150362446A1

    公开(公告)日:2015-12-17

    申请号:US14716984

    申请日:2015-05-20

    Applicant: JEOL Ltd.

    Abstract: A phase analyzer includes a principal component analysis section that performs principal component analysis on elemental map data that represents an intensity or concentration distribution corresponding to each element to calculate a principal component score corresponding to each unit area of the elemental map data, a scatter diagram generation section that plots the calculated principal component score to generate a scatter diagram of the principal component score, a peak position detection section that detects a peak position from the scatter diagram, a clustering section that calculates a distance between each point and each peak position within the scatter diagram, and classifies each point within the scatter diagram into a plurality of groups based on the distance, and a phase map generation section that generates a phase map based on classification results of the clustering section.

    Abstract translation: 相位分析器包括:主成分分析部,其对表示与各元素对应的强度或浓度分布的元素图数据进行主成分分析,计算与基本图数据的各单位面积对应的主成分分数;散点图生成 绘制计算出的主成分分数以生成主分量分数的散点图,峰值位置检测部分,其根据散点图检测峰值位置;聚类部分,其计算每个点与每个峰值位置之间的距离; 散点图,并且根据距离将散点图内的每个点分类成多个组;以及相位图生成部,其基于聚类部的分类结果生成相位图。

    Image Processing Apparatus, Image Processing Method, and Analyzer

    公开(公告)号:US20180047138A1

    公开(公告)日:2018-02-15

    申请号:US15673825

    申请日:2017-08-10

    Applicant: JEOL Ltd.

    Abstract: Provided is an image processing apparatus, which is configured to perform smoothing processing on a mapping image obtained by detecting a signal emitted from one of a plurality of analysis areas of a specimen. The image processing apparatus includes: a memory; and a processor configured to execute a program stored in the memory to perform: processing for calculating a difference between a maximum value and a minimum value of signal intensity data being intensity information on the signal of one of pixels within the mapping image, and determining a degree of smoothing to be used for the smoothing processing based on the difference; and processing for performing the smoothing processing based on the determined degree of smoothing.

    Scatter diagram display device and surface analyzer

    公开(公告)号:US09874532B2

    公开(公告)日:2018-01-23

    申请号:US14886345

    申请日:2015-10-19

    Applicant: JEOL Ltd.

    CPC classification number: G01N23/225

    Abstract: A scatter diagram display device includes a principal component analysis section that performs principal component analysis on intensity or concentration map data that represents each element, a priority level setting section that sets a priority level to each element based on the results of the principal component analysis performed by the principal component analysis section, and a display control section that performs a control process that arranges a plurality of scatter diagrams generated by combining each element based on the priority level that has been set to each element by the priority level setting section, and displays the plurality of scatter diagrams on a display section.

    Phase analyzer, phase analysis method, and surface analyzer
    5.
    发明授权
    Phase analyzer, phase analysis method, and surface analyzer 有权
    相位分析仪,相位分析法和表面分析仪

    公开(公告)号:US09518942B2

    公开(公告)日:2016-12-13

    申请号:US14716984

    申请日:2015-05-20

    Applicant: JEOL Ltd.

    Abstract: A phase analyzer includes a principal component analysis section that performs principal component analysis on elemental map data that represents an intensity or concentration distribution corresponding to each element to calculate a principal component score corresponding to each unit area of the elemental map data, a scatter diagram generation section that plots the calculated principal component score to generate a scatter diagram of the principal component score, a peak position detection section that detects a peak position from the scatter diagram, a clustering section that calculates a distance between each point and each peak position within the scatter diagram, and classifies each point within the scatter diagram into a plurality of groups based on the distance, and a phase map generation section that generates a phase map based on classification results of the clustering section.

    Abstract translation: 相位分析器包括:主成分分析部,其对表示与各元素对应的强度或浓度分布的元素图数据进行主成分分析,计算与基本图数据的各单位面积对应的主成分分数;散点图生成 绘制计算出的主成分分数以生成主分量分数的散点图,峰值位置检测部分,其根据散点图检测峰值位置;聚类部分,其计算每个点与每个峰值位置之间的距离; 散点图,并且根据距离将散点图内的每个点分类成多个组;以及相位图生成部,其基于聚类部的分类结果生成相位图。

    Scatter Diagram Display Device, Scatter Diagram Display Method, and Analyzer

    公开(公告)号:US20230083479A1

    公开(公告)日:2023-03-16

    申请号:US17941540

    申请日:2022-09-09

    Applicant: JEOL Ltd.

    Abstract: Provided is a scatter diagram display device that creates a plurality of scatter diagrams based on mapping data acquired by an analyzer and displays a scatter diagram matrix in which the created plurality of scatter diagrams are arranged in a matrix on a display section, the scatter diagram display device including: a display condition acceptance section that accepts a designation of a display range of an item in each of the plurality of scatter diagrams, and a display control section that extracts all scatter diagrams having the item whose display range has been designated from the plurality of scatter diagrams and changes the display range of the item in the extracted scatter diagrams based on the designation of the display range.

    Image processing apparatus, image processing method, and analyzer

    公开(公告)号:US10482579B2

    公开(公告)日:2019-11-19

    申请号:US15673825

    申请日:2017-08-10

    Applicant: JEOL Ltd.

    Abstract: Provided is an image processing apparatus, which is configured to perform smoothing processing on a mapping image obtained by detecting a signal emitted from one of a plurality of analysis areas of a specimen. The image processing apparatus includes: a memory; and a processor configured to execute a program stored in the memory to perform: processing for calculating a difference between a maximum value and a minimum value of signal intensity data being intensity information on the signal of one of pixels within the mapping image, and determining a degree of smoothing to be used for the smoothing processing based on the difference; and processing for performing the smoothing processing based on the determined degree of smoothing.

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