公开(公告)号：US20150362446A1

公开(公告)日：2015-12-17

申请号：US14716984

申请日：2015-05-20

Applicant: JEOL Ltd.

Inventor： Naoki Kato ,  Masaru Takakura ,  Norihisa Mori ,  Shinya Fujita ,  Shigeru Honda

IPC: G01N23/225 ,  H01J37/244 ,  H01J37/06

CPC classification number: G01N23/2252 ,  H01J37/244 ,  H01J2237/2445 ,  H01J2237/2448

Abstract: A phase analyzer includes a principal component analysis section that performs principal component analysis on elemental map data that represents an intensity or concentration distribution corresponding to each element to calculate a principal component score corresponding to each unit area of the elemental map data, a scatter diagram generation section that plots the calculated principal component score to generate a scatter diagram of the principal component score, a peak position detection section that detects a peak position from the scatter diagram, a clustering section that calculates a distance between each point and each peak position within the scatter diagram, and classifies each point within the scatter diagram into a plurality of groups based on the distance, and a phase map generation section that generates a phase map based on classification results of the clustering section.

Abstract translation: 相位分析器包括：主成分分析部，其对表示与各元素对应的强度或浓度分布的元素图数据进行主成分分析，计算与基本图数据的各单位面积对应的主成分分数;散点图生成 绘制计算出的主成分分数以生成主分量分数的散点图，峰值位置检测部分，其根据散点图检测峰值位置;聚类部分，其计算每个点与每个峰值位置之间的距离; 散点图，并且根据距离将散点图内的每个点分类成多个组;以及相位图生成部，其基于聚类部的分类结果生成相位图。

公开(公告)号：US09874532B2

公开(公告)日：2018-01-23

申请号：US14886345

申请日：2015-10-19

Applicant: JEOL Ltd.

Inventor： Norihisa Mori ,  Masaru Takakura ,  Shinya Fujita ,  Shigeru Honda ,  Naoki Kato ,  Shuichi Sakamoto

IPC: G06T11/20 ,  G01N23/225

CPC classification number: G01N23/225

Abstract: A scatter diagram display device includes a principal component analysis section that performs principal component analysis on intensity or concentration map data that represents each element, a priority level setting section that sets a priority level to each element based on the results of the principal component analysis performed by the principal component analysis section, and a display control section that performs a control process that arranges a plurality of scatter diagrams generated by combining each element based on the priority level that has been set to each element by the priority level setting section, and displays the plurality of scatter diagrams on a display section.

公开(公告)号：US09518942B2

公开(公告)日：2016-12-13

申请号：US14716984

申请日：2015-05-20

Applicant: JEOL Ltd.

Inventor： Naoki Kato ,  Masaru Takakura ,  Norihisa Mori ,  Shinya Fujita ,  Shigeru Honda

IPC: G01N23/222 ,  G01N23/225 ,  H01J37/244

CPC classification number: G01N23/2252 ,  H01J37/244 ,  H01J2237/2445 ,  H01J2237/2448

Abstract: A phase analyzer includes a principal component analysis section that performs principal component analysis on elemental map data that represents an intensity or concentration distribution corresponding to each element to calculate a principal component score corresponding to each unit area of the elemental map data, a scatter diagram generation section that plots the calculated principal component score to generate a scatter diagram of the principal component score, a peak position detection section that detects a peak position from the scatter diagram, a clustering section that calculates a distance between each point and each peak position within the scatter diagram, and classifies each point within the scatter diagram into a plurality of groups based on the distance, and a phase map generation section that generates a phase map based on classification results of the clustering section.

Abstract translation: 相位分析器包括：主成分分析部，其对表示与各元素对应的强度或浓度分布的元素图数据进行主成分分析，计算与基本图数据的各单位面积对应的主成分分数;散点图生成 绘制计算出的主成分分数以生成主分量分数的散点图，峰值位置检测部分，其根据散点图检测峰值位置;聚类部分，其计算每个点与每个峰值位置之间的距离; 散点图，并且根据距离将散点图内的每个点分类成多个组;以及相位图生成部，其基于聚类部的分类结果生成相位图。

公开(公告)号：US20160110896A1

公开(公告)日：2016-04-21

申请号：US14886345

申请日：2015-10-19

Applicant: JEOL Ltd.

Inventor： Norihisa Mori ,  Masaru Takakura ,  Shinya Fujita ,  Shigeru Honda ,  Naoki Kato ,  Shuichi Sakamoto

IPC: G06T11/20 ,  G06T11/60

CPC classification number: G01N23/225

Abstract: A scatter diagram display device includes a principal component analysis section that performs principal component analysis on intensity or concentration map data that represents each element, a priority level setting section that sets a priority level to each element based on the results of the principal component analysis performed by the principal component analysis section, and a display control section that performs a control process that arranges a plurality of scatter diagrams generated by combining each element based on the priority level that has been set to each element by the priority level setting section, and displays the plurality of scatter diagrams on a display section.

Abstract translation: 散点图显示装置包括：主成分分析部，对表示各要素的强度或浓度图数据进行主成分分析;优先级设定部，根据进行的主成分分析的结果，对各元素设定优先级; 以及显示控制部，其执行控制处理，该控制处理通过基于优先级设定部对每个要素设定的优先级进行组合而构成的多个散点图，并且显示 在显示部分上的多个散点图。

公开(公告)号：US09234831B2

公开(公告)日：2016-01-12

申请号：US14613596

申请日：2015-02-04

Applicant: JEOL Ltd.

Inventor： Masaru Takakura

IPC: H01J37/28 ,  H01J37/04 ,  G01N15/14 ,  G06K9/00

CPC classification number: G01N15/1434 ,  G01N15/1429 ,  G01N15/1463 ,  G06K9/00 ,  H01J37/28 ,  H01J2237/2448 ,  H01J2237/24578 ,  H01J2237/24585 ,  H01J2237/2813

Abstract: A particle analysis instrument is offered which can make a measurement in a shorter time than heretofore. The particle analysis instrument (100) is used to analyze a sample (S) containing plural particles by measuring the sample over plural fields of view. The instrument (100) includes a measuring section (10) for scanning primary rays (EB) over the sample (S) and detecting a signal emanating from the sample (S), a particle area totalizing portion (222) for finding the area of particles for each field of view from the results of the measurement made by the measuring section (10) and summing up such areas of particles for all of the fields of view to find a total area of particles, and a decision portion (226) for making a decision as to whether the measurement process should be ended, based on the ratio of the total area of particles to an area of the sample (S) measured to obtain the total area of particles.

Abstract translation: 提供了一种可以在比以前更短的时间内进行测量的粒子分析仪器。 粒子分析仪器（100）用于通过在多个视场中测量样品来分析包含多个粒子的样品（S）。 仪器（100）包括用于在样品（S）上扫描初级射线（EB）并检测从样品（S）发出的信号的测量部分（10），用于找到样品（S）的面积的颗粒面积累积部分 根据由测量部分（10）进行的测量结果的每个视场的粒子，并且对于所有视野的这些区域的总和来找出粒子的总面积;以及判定部分（226），用于 基于测量的颗粒总面积与样品的面积（S）的比值来确定测量过程是否应该结束，以获得颗粒的总面积。

公开(公告)号：US20150219547A1

公开(公告)日：2015-08-06

申请号：US14613596

申请日：2015-02-04

Applicant: JEOL Ltd.

Inventor： Masaru Takakura

IPC: G01N15/14 ,  H01J37/28

CPC classification number: G01N15/1434 ,  G01N15/1429 ,  G01N15/1463 ,  G06K9/00 ,  H01J37/28 ,  H01J2237/2448 ,  H01J2237/24578 ,  H01J2237/24585 ,  H01J2237/2813

Abstract: A particle analysis instrument is offered which can make a measurement in a shorter time than heretofore. The particle analysis instrument (100) is used to analyze a sample (S) containing plural particles by measuring the sample over plural fields of view. The instrument (100) includes a measuring section (10) for scanning primary rays (EB) over the sample (S) and detecting a signal emanating from the sample (S), a particle area totalizing portion (222) for finding the area of particles for each field of view from the results of the measurement made by the measuring section (10) and summing up such areas of particles for all of the fields of view to find a total area of particles, and a decision portion (226) for making a decision as to whether the measurement process should be ended, based on the ratio of the total area of particles to an area of the sample (S) measured to obtain the total area of particles.

Abstract translation: 提供了一种可以在比以前更短的时间内进行测量的粒子分析仪器。 粒子分析仪器（100）用于通过在多个视场中测量样品来分析包含多个粒子的样品（S）。 仪器（100）包括用于在样品（S）上扫描初级射线（EB）并检测从样品（S）发出的信号的测量部分（10），用于找到样品（S）的面积的颗粒面积累积部分 根据由测量部分（10）进行的测量结果的每个视场的粒子，并且对于所有视野的这些区域的总和来找出粒子的总面积;以及判定部分（226），用于 基于测量的颗粒总面积与样品的面积（S）的比值来确定测量过程是否应该结束，以获得颗粒的总面积。