公开(公告)号：US10048586B2

公开(公告)日：2018-08-14

申请号：US15056264

申请日：2016-02-29

申请人： JSR Corporation

发明人： Yuusuke Asano ,  Mitsuo Sato ,  Hiromitsu Nakashima ,  Kazuki Kasahara ,  Yoshifumi Oizumi ,  Masafumi Hori ,  Takanori Kawakami ,  Yasuhiko Matsuda ,  Kazuo Nakahara

IPC分类号： G03F7/039 ,  G03F7/20 ,  G03F7/32 ,  G03F7/30 ,  C08F20/22 ,  G03F7/004 ,  G03F7/038

摘要： A radiation-sensitive resin composition includes a first polymer including an acid-labile group, an acid generator to generate an acid upon exposure to radiation, and a second polymer including a fluorine atom and a functional group shown by a general formula (x). The second polymer has a fluorine atom content higher than a fluorine atom content of the first polymer. R1 represents an alkali-labile group. A represents an oxygen atom, —NR′—, —CO—O—# or —SO2—O—##, wherein the oxygen atom represented by A is not an oxygen atom bonded directly to an aromatic ring, a carbonyl group, or a sulfoxyl group, R′ represents a hydrogen atom or an alkali-labile group, and “#” and “##” each indicate a bonding hand bonded to R1. -A-R1  (x).

公开(公告)号：US09513548B2

公开(公告)日：2016-12-06

申请号：US14242957

申请日：2014-04-02

申请人： JSR CORPORATION

发明人： Yuusuke Asano ,  Mitsuo Satou ,  Hiromitsu Nakashima ,  Kazuki Kasahara ,  Yoshifumi Oizumi ,  Masafumi Hori ,  Takanori Kawakami ,  Yasuhiko Matsuda ,  Kazuo Nakahara

IPC分类号： G03F7/039 ,  G03F7/30 ,  C08F20/22 ,  G03F7/004 ,  G03F7/038 ,  G03F7/20

CPC分类号： G03F7/0392 ,  C08F20/22 ,  G03F7/0046 ,  G03F7/038 ,  G03F7/0388 ,  G03F7/039 ,  G03F7/20 ,  G03F7/2041 ,  G03F7/30 ,  G03F7/32

摘要： A radiation-sensitive resin composition includes a first polymer including an acid-labile group, an acid generator to generate an acid upon exposure to radiation, and a second polymer including a fluorine atom and a functional group shown by a general formula (x). The second polymer has a fluorine atom content higher than a fluorine atom content of the first polymer. R1 represents an alkali-labile group. A represents an oxygen atom, —NR′—, —CO—O—# or —SO2—O—##, wherein the oxygen atom represented by A is not an oxygen atom bonded directly to an aromatic ring, a carbonyl group, or a sulfoxyl group, R′ represents a hydrogen atom or an alkali-labile group, and “#” and “##” each indicate a bonding hand bonded to R1.