METHOD OF FABRICATING T-GATE
    1.
    发明申请
    METHOD OF FABRICATING T-GATE 失效
    制造T型门的方法

    公开(公告)号:US20090075463A1

    公开(公告)日:2009-03-19

    申请号:US12270016

    申请日:2008-11-13

    IPC分类号: H01L21/44

    CPC分类号: H01L21/0331 H01L21/28587

    摘要: A method of fabricating a T-gate is provided. The method includes the steps of: forming a photoresist layer on a substrate; patterning the photoresist layer formed on the substrate and forming a first opening; forming a first insulating layer on the photoresist layer and the substrate; removing the first insulating layer and forming a second opening to expose the substrate; forming a second insulating layer on the first insulating layer; removing the second insulating layer and forming a third opening to expose the substrate; forming a metal layer on the second insulating layer on which the photoresist layer and the third opening are formed; and removing the metal layer formed on the photoresist layer. Accordingly, a uniform and elaborate opening defining the length of a gate may be formed by deposition of the insulating layer and a blanket dry etching process, and thus a more elaborate micro T-gate electrode may be fabricated.

    摘要翻译: 提供一种制造T型栅极的方法。 该方法包括以下步骤:在衬底上形成光致抗蚀剂层; 图案化形成在基板上的光致抗蚀剂层并形成第一开口; 在所述光致抗蚀剂层和所述基板上形成第一绝缘层; 去除所述第一绝缘层并形成第二开口以暴露所述衬底; 在所述第一绝缘层上形成第二绝缘层; 去除所述第二绝缘层并形成第三开口以暴露所述衬底; 在其上形成有光致抗蚀剂层和第三开口的第二绝缘层上形成金属层; 并除去形成在光致抗蚀剂层上的金属层。 因此,可以通过沉积绝缘层和橡皮干蚀刻工艺来形成限定栅极长度的均匀且精细的开口,因此可以制造更精细的微型T型栅电极。

    HETERODYNE RF TRANSCEIVER FOR RADAR SENSOR
    2.
    发明申请
    HETERODYNE RF TRANSCEIVER FOR RADAR SENSOR 审中-公开
    用于雷达传感器的异步射频收发器

    公开(公告)号:US20080080599A1

    公开(公告)日:2008-04-03

    申请号:US11737828

    申请日:2007-04-20

    IPC分类号: H04B1/38

    CPC分类号: G01S13/34 G01S7/03

    摘要: Provided is an RF transceiver for a 77 GHz forward-looking radar sensor. The RF transceiver whose essential components use a Monolithic Microwave Integrated Circuit (MMIC) includes an IF terminal including a transmitter, a receiver, and an Automatic Gain Control (AGC) circuit, one transmitting antenna, and three receiving antennas.The heterodyne RF transceiver for a radar sensor includes; a transmitter for generating a transmission signal and emitting the generated signal to a transmitting antenna; a local oscillating portion for generating a local oscillation wave; a first mixer for up-mixing the transmission signal with the low frequency; a receiver for receiving a reception signal from a receiving antenna; a second mixer for down-mixing a mixing signal of the first mixer with the reception signal; and an RF portion for outputting a beat signal from a mixing signal of the second mixer and the local oscillation wave.In the RF transceiver, a heterodyne method using an intermediate frequency (IF) signal is applied, and one AGC circuit and three receiving antennas for enhancing receive sensitivity are used, so that the receive sensitivity is improved by 30 dB or more compared with a conventional RF transceiver using a homodyne method.

    摘要翻译: 提供了一个用于77 GHz前视雷达传感器的RF收发器。 其基本组件使用单片微波集成电路(MMIC)的RF收发器包括包括发射机,接收机和自动增益控制(AGC)电路,一个发射天线和三个接收天线的IF终端。 用于雷达传感器的外差RF收发器包括: 发送器,用于产生发送信号并将发生的信号发送到发送天线; 用于产生局部振荡波的局部振荡部分; 用于将传输信号与低频进行混频的第一混频器; 用于从接收天线接收接收信号的接收机; 第二混频器,用于将第一混频器的混频信号与接收信号进行下混频; 以及用于从第二混频器的混合信号和本地振荡波输出拍频信号的RF部分。 在RF收发器中,使用使用中频(IF)信号的外差方法,并且使用一个AGC电路和三个用于增强接收灵敏度的接收天线,使得与常规的接收灵敏度相比,接收灵敏度提高了30dB或更多 RF收发器采用零差法。

    RF TRANSCEIVER FOR RADAR SENSOR
    3.
    发明申请
    RF TRANSCEIVER FOR RADAR SENSOR 审中-公开
    射频收发器用于雷达传感器

    公开(公告)号:US20120146842A1

    公开(公告)日:2012-06-14

    申请号:US13244039

    申请日:2011-09-23

    申请人: Dong Min KANG

    发明人: Dong Min KANG

    IPC分类号: G01S13/00

    摘要: An RF transceiver for radar sensors of microwave and millimeter wave bands, and an RF transceiver for a radar sensor which uses a monolithic microwave integrated circuit of core components and includes SP3T switches, Rotman lenses, and a transmitting five-patch array antenna and a receiving five-patch array antenna of a transmitting unit and a receiving unit. Smoother beam scanning with three beams is performed using the patch array antennas, the Rotman lenses, and the switches. The structure of the transceiver is configured in a homodyne scheme. A double balanced mixer is applied to improve separation characteristics between transmission and reception signals. Positive components such as the patch array antennas, the Rotman lenses, the switches, and an amplifier are configured on a single substrate.

    摘要翻译: 用于微波和毫米波段雷达传感器的RF收发器,以及用于雷达传感器的RF收发器,其使用核心部件的单片微波集成电路,并且包括SP3T开关,Rotman透镜,以及发射五接头阵列天线和接收 发射单元和接收单元的五分布阵列天线。 使用贴片阵列天线,Rotman透镜和开关来执行具有三个光束的平滑光束扫描。 收发器的结构以零差方案配置。 应用双平衡混频器来改善发射和接收信号之间的分离特性。 诸如贴片阵列天线,Rotman透镜,开关和放大器之类的正面部件被配置在单个基板上。

    POWER AMPLIFIER HAVING DEPLETION MODE HIGH ELECTRON MOBILITY TRANSISTOR
    4.
    发明申请
    POWER AMPLIFIER HAVING DEPLETION MODE HIGH ELECTRON MOBILITY TRANSISTOR 有权
    具有分离模式高电子移动晶体管的功率放大器

    公开(公告)号:US20110037521A1

    公开(公告)日:2011-02-17

    申请号:US12855055

    申请日:2010-08-12

    IPC分类号: H03F3/04

    摘要: Provided is a power amplifier including: a depletion mode high electron mobility transistor (D-mode HEMT) configured to amplify a signal inputted to a gate terminal and output the amplified signal through a drain terminal; an input matching circuit configured to serially ground the gate terminal; and a DC bias circuit connected between the drain terminal and a ground. Through the foregoing configuration, the HEMT may be biased only by a single DC bias circuit without any biasing means to provide a negative voltage. Also, superior matching characteristic may be provided in various operation frequency bands through a shunt inductor and a choke inductor.

    摘要翻译: 提供了一种功率放大器,包括:耗尽型高电子迁移率晶体管(D模式HEMT),被配置为放大输入到栅极端子的信号,并通过漏极端子输出放大的信号; 输入匹配电路,被配置为使所述栅极端子串联接地; 以及连接在漏极端子和地之间的DC偏置电路。 通过上述配置,HEMT可以仅由单个DC偏置电路偏压而没有任何偏置装置来提供负电压。 此外,可以通过并联电感器和扼流电感器在各种工作频带中提供优异的匹配特性。