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公开(公告)号:US07105059B2
公开(公告)日:2006-09-12
申请号:US10465582
申请日:2003-06-20
申请人: Jae-cheol Lee , Chang-bin Lim , Kwi-young Han
发明人: Jae-cheol Lee , Chang-bin Lim , Kwi-young Han
IPC分类号: C23C16/455 , C23C16/52 , C23C16/50
CPC分类号: C23C16/45544 , C23C16/4558 , C23C16/52
摘要: A reaction apparatus for atomic layer deposition includes a vacuum chamber having a gas inlet, a gas outlet, and a gas flow path for connecting the gas inlet and the gas outlet; a reactor located in the vacuum chamber, including a reaction chamber where a first gas, which is input through the gas flow path, reacts with a specimen in the reaction chamber, the reactor further including a gas distributor, which is located in the reaction chamber to evenly supply the gas; a specimen location controller for moving the specimen located in the vacuum chamber to the reaction chamber; and an analyzer, which is connected to the reaction chamber, for analyzing a second gas generated in the reaction chamber. The apparatus is able to deposit uniform atomic layers on a specimen by maintaining the pressure and flow of reactant gas and can deposit and analyze an atomic layer simultaneously.
摘要翻译: 用于原子层沉积的反应装置包括具有气体入口,气体出口和用于连接气体入口和气体出口的气体流路的真空室; 位于真空室中的反应器包括反应室,其中通过气体流路输入的第一气体与反应室中的样品反应,反应器还包括位于反应室中的气体分配器 均匀供气; 用于将位于真空室中的试样移动到反应室的试样定位控制器; 以及分析器,其连接到所述反应室,用于分析在所述反应室中产生的第二气体。 该装置能够通过保持反应气体的压力和流量在样品上沉积均匀的原子层,并且可以同时沉积和分析原子层。
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公开(公告)号:US20060169893A1
公开(公告)日:2006-08-03
申请号:US11254862
申请日:2005-10-21
申请人: Jae-cheol Lee , Chang-bin Lim , Jin-hak Choi
发明人: Jae-cheol Lee , Chang-bin Lim , Jin-hak Choi
IPC分类号: H01J49/44
CPC分类号: G01N23/2273
摘要: An X-ray photoelectron spectroscopy includes an X-ray generator generating an X-ray, a collimator collimating the X-ray generated in the X-ray generator, a monochromator for converting the collimated X-ray into a single wavelength X-ray and reflecting the single wavelength X-ray to a test sample, the monochromator being installed to be displaceable and rotatable in response to an irradiating direction of the X-ray, an analysis chamber in which the test sample is disposed, the analysis chamber being installed to be rotatable in response to the displacement of the monochromator so as to allow the single wavelength to be accurately irradiated to the test sample, an energy analyzer for measuring kinetic energy of an electron that is emitted from the test sample by the single wavelength X-ray, and an electron detector for detecting an electron passing to the energy analyzer.
摘要翻译: X射线光电子能谱包括产生X射线的X射线发生器,准直X射线发生器中产生的X射线的准直仪,将准直X射线转换为单波长X射线的单色仪,以及 将单波长X射线反射到测试样品,单色仪被安装成响应于X射线的照射方向而被移动和旋转,分析室中设置测试样品,分析室被安装到 可以响应于单色仪的位移而旋转,以便允许将单个波长精确地照射到测试样品上,该能量分析器用于测量通过单波长X射线从测试样品发射的电子的动能 以及用于检测通过能量分析器的电子的电子检测器。
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公开(公告)号:US06653628B2
公开(公告)日:2003-11-25
申请号:US09960963
申请日:2001-09-25
申请人: Jae-cheol Lee , Yury N. Yuryev , Chang-bin Lim
发明人: Jae-cheol Lee , Yury N. Yuryev , Chang-bin Lim
IPC分类号: H01J4000
CPC分类号: G01N23/227
摘要: An electron spectroscopic analyzer using X-rays is provided. The electron spectroscopic analyzer includes an X-ray generator for generating X-rays, an optical system for detecting charged particles emitted from an object irradiated with the X-rays to analyze the object, a vacuum system whose inside is maintained at a low pressure near to vacuum pressure, the vacuum system being provided between the X-ray generator and the optical system, and a blocking unit provided between the X-ray generator and the optical system for preventing elements other than the X-rays emitted from the X-ray generator from flowing into the optical system.
摘要翻译: 提供了使用X射线的电子光谱分析仪。 电子分光分析装置包括:X射线发生器,用于检测从X射线照射的物体发射的带电粒子的光学系统,以分析物体;内部保持在低压附近的真空系统 提供在X射线发生器和光学系统之间的真空系统,以及设置在X射线发生器和光学系统之间的阻挡单元,用于防止除了从X射线发射的X射线以外的元件 发电机流入光学系统。
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公开(公告)号:US06265342B1
公开(公告)日:2001-07-24
申请号:US09519621
申请日:2000-03-06
申请人: Chang-bin Lim , Chan-ho Pak , Ju-hee Cho
发明人: Chang-bin Lim , Chan-ho Pak , Ju-hee Cho
IPC分类号: B01J2340
CPC分类号: B01J37/0248 , B01D53/944 , B01D2255/1021 , B01D2255/1023 , B01D2255/20715 , B01D2255/20738 , B01D2255/20761 , B01J23/8966 , B01J37/0244
摘要: A catalyst for purifying exhaust gases from diesel engines with an improved purification efficiency for both nitrogen oxide and particulates in exhaust emissions is provided. The catalyst includes: (i) a first catalytic layer containing a carrier portion including iron (Fe)-doped modified zirconium dioxide, and a catalyst portion including a material selected from the group consisting of copper (Cu), copper oxide, and mixtures thereof, and (ii) a second catalytic layer containing a carrier portion including Cu-doped modified zirconium dioxide, a main catalyst portion including platinum (Pt) and tin (Sn), and a co-catalyst portion including copper oxide. The catalyst portion of the first catalytic layer may contain palladium (Pd) instead of Cu.
摘要翻译: 提供了一种用于净化来自柴油发动机的废气的催化剂,其具有改善的氮氧化物和排放物中的颗粒物的净化效率。 所述催化剂包括:(i)含有载体部分的第一催化剂层,所述载体部分包含铁(Fe)掺杂的改性二氧化锆,以及包含选自铜(Cu),氧化铜及其混合物的材料的催化剂部分 ,和(ii)含有包含Cu掺杂的改性二氧化锆的载体部分,包含铂(Pt)和锡(Sn)的主催化剂部分和包含氧化铜的助催化剂部分的第二催化剂层。 第一催化剂层的催化剂部分可以含有钯(Pd)代替Cu。
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公开(公告)号:US5898360A
公开(公告)日:1999-04-27
申请号:US871491
申请日:1997-06-10
申请人: Chang-bin Lim
发明人: Chang-bin Lim
IPC分类号: H01C1/034 , H01C17/065 , H01C1/02
CPC分类号: H01C1/034 , H01C17/065 , H01C17/06553
摘要: A ceramic heater for a gas sensor has a heater substrate, a laminating substrate made of the same material as the heater substrate, and an electrode made of platinum and at least one lanthanide oxide disposed between the heater substrate and the laminating substrates. The ceramic heater exhibits improved durability without migration patterns, is free of cracks on the substrate, is free of short circuits in the heat electrode and is low in production cost.
摘要翻译: 用于气体传感器的陶瓷加热器具有加热器基板,由与加热器基板相同的材料制成的层压基板,以及设置在加热器基板和层叠基板之间的由铂制成的电极和至少一个镧系元素氧化物。 陶瓷加热器具有改善的耐久性而没有迁移图案,在基板上没有裂纹,在热电极中没有短路并且生产成本低。
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公开(公告)号:US5709787A
公开(公告)日:1998-01-20
申请号:US535916
申请日:1995-09-28
申请人: Chang-bin Lim
发明人: Chang-bin Lim
IPC分类号: G01N27/407 , G01N27/27
CPC分类号: G01N27/407
摘要: A wide-range air fuel ratio oxygen sensor including a pump cell, a sensor cell, and a porous diffusion layer interposed between the pump cell and the sensor cell and a method for fabricating the oxygen sensor. The oxygen sensor generates output pumping current with a very small dispersion range of about .+-.2% by virtue of the activation effect of the catalyst such as Pt mixed into Al.sub.2 O.sub.3 of the porous diffusion layer.
摘要翻译: 包括泵电池,传感器电池以及置于泵电池和传感器电池之间的多孔扩散层的宽范围空燃比氧传感器以及氧传感器的制造方法。 由于催化剂如掺入多孔扩散层的Al 2 O 3中的Pt的活化效应,氧传感器产生输出泵浦电流,具有非常小的约+/- 2%的分散范围。
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