X-ray photoelectron spectroscopy
    6.
    发明申请
    X-ray photoelectron spectroscopy 审中-公开
    X射线光电子能谱

    公开(公告)号:US20060169893A1

    公开(公告)日:2006-08-03

    申请号:US11254862

    申请日:2005-10-21

    IPC分类号: H01J49/44

    CPC分类号: G01N23/2273

    摘要: An X-ray photoelectron spectroscopy includes an X-ray generator generating an X-ray, a collimator collimating the X-ray generated in the X-ray generator, a monochromator for converting the collimated X-ray into a single wavelength X-ray and reflecting the single wavelength X-ray to a test sample, the monochromator being installed to be displaceable and rotatable in response to an irradiating direction of the X-ray, an analysis chamber in which the test sample is disposed, the analysis chamber being installed to be rotatable in response to the displacement of the monochromator so as to allow the single wavelength to be accurately irradiated to the test sample, an energy analyzer for measuring kinetic energy of an electron that is emitted from the test sample by the single wavelength X-ray, and an electron detector for detecting an electron passing to the energy analyzer.

    摘要翻译: X射线光电子能谱包括产生X射线的X射线发生器,准直X射线发生器中产生的X射线的准直仪,将准直X射线转换为单波长X射线的单色仪,以及 将单波长X射线反射到测试样品,单色仪被安装成响应于X射线的照射方向而被移动和旋转,分析室中设置测试样品,分析室被安装到 可以响应于单色仪的位移而旋转,以便允许将单个波长精确地照射到测试样品上,该能量分析器用于测量通过单波长X射线从测试样品发射的电子的动能 以及用于检测通过能量分析器的电子的电子检测器。