Continuous fluid jet ejector with anisotropically etched fluid chambers
    1.
    发明申请
    Continuous fluid jet ejector with anisotropically etched fluid chambers 有权
    具有各向异性蚀刻流体室的连续流体喷射喷射器

    公开(公告)号:US20070052766A1

    公开(公告)日:2007-03-08

    申请号:US11220514

    申请日:2005-09-07

    IPC分类号: B41J2/02

    摘要: A fluid ejection device, a method of cleaning the device, and a method of operating the device are provided. The device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate and has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall. The first wall and the second wall are positioned at an angle other than 90° relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber.

    摘要翻译: 提供流体喷射装置,清洁装置的方法以及操作装置的方法。 该装置包括具有第一表面和与该第一表面相对的第二表面的基底。 喷嘴板形成在基板的第一表面上,并且具有喷嘴,流体被喷射通过该喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通并且具有第一壁和第二壁。 第一壁和第二壁相对于彼此以不同于90°的角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。

    FLUID EJECTOR HAVING AN ANISOTROPIC SURFACE CHAMBER ETCH
    2.
    发明申请
    FLUID EJECTOR HAVING AN ANISOTROPIC SURFACE CHAMBER ETCH 有权
    具有各向异性表面腔体的流体喷射器

    公开(公告)号:US20070153060A1

    公开(公告)日:2007-07-05

    申请号:US11685259

    申请日:2007-03-13

    IPC分类号: B41J2/04

    摘要: A fluid ejecting device and method of forming same are provided. The fluid ejecting device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate. The nozzle plate has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall with the first wall and the second wall being positioned at an angle relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber. A source of fluid impedance comprises a physical structure located between the nozzle and the fluid delivery channel.

    摘要翻译: 提供一种流体喷射装置及其形成方法。 流体喷射装置包括具有第一表面和与第一表面相对的第二表面的基底。 在基板的第一表面上形成喷嘴板。 喷嘴板具有喷嘴,流体被喷射通过喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通,并且具有第一壁和第二壁,其中第一壁和第二壁相对于彼此以一定角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。 流体阻抗源包括位于喷嘴和流体输送通道之间的物理结构。

    Fluid ejector having an anisotropic surface chamber etch
    3.
    发明申请
    Fluid ejector having an anisotropic surface chamber etch 有权
    具有各向异性表面腔蚀刻的流体喷射器

    公开(公告)号:US20060028511A1

    公开(公告)日:2006-02-09

    申请号:US10911186

    申请日:2004-08-04

    IPC分类号: B41J2/05 B41J2/01

    摘要: A fluid ejecting device and method of forming same are provided. The fluid ejecting device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate. The nozzle plate has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall with the first wall and the second wall being positioned at an angle relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber. A source of fluid impedance comprises a physical structure located between the nozzle and the fluid delivery channel.

    摘要翻译: 提供一种流体喷射装置及其形成方法。 流体喷射装置包括具有第一表面和与第一表面相对的第二表面的基底。 在基板的第一表面上形成喷嘴板。 喷嘴板具有喷嘴,流体被喷射通过喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通,并且具有第一壁和第二壁,其中第一壁和第二壁相对于彼此以一定角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。 流体阻抗源包括位于喷嘴和流体输送通道之间的物理结构。

    Substrate etching method for forming connected features
    4.
    发明申请
    Substrate etching method for forming connected features 有权
    用于形成连接特征的基板蚀刻方法

    公开(公告)号:US20060027521A1

    公开(公告)日:2006-02-09

    申请号:US10911183

    申请日:2004-08-04

    IPC分类号: H01L21/311 B44C1/22

    摘要: A method of etching a substrate and an article(s) formed using the method are provided. The method includes providing a substrate; coating a region of the substrate with a temporary material having properties that enable the temporary material to remain substantially intact during subsequent processing and enable the temporary material to be removed by a subsequent process that allows the substrate to remain substantially unaltered; removing a portion of the substrate to form a feature, at least some of the removed portion of the substrate overlapping at least a portion of the coated region of the substrate while allowing the temporary material substantially intact; and removing the temporary material while allowing the substrate to remain substantially unaltered.

    摘要翻译: 提供了使用该方法形成的蚀刻基板和制品的方法。 该方法包括提供基板; 用临时材料涂覆基材的区域,所述临时材料具有使得临时材料能够在随后的处理期间保持基本上完整的,并且使临时材料能够通过允许基材保持基本上不变的后续工艺来除去; 去除衬底的一部分以形成特征,衬底的至少部分被去除的部分与衬底的涂覆区域的至少一部分重叠,同时允许临时材料基本上完整; 并且移除临时材料同时允许基底基本上保持不变。

    Tapered multi-layer thermal actuator and method of operating same

    公开(公告)号:US20050052496A1

    公开(公告)日:2005-03-10

    申请号:US10953401

    申请日:2004-09-29

    摘要: An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end and base end width, wb, adjacent the base element, and a free end and free end width, wf, adjacent the free end tip, wherein the base end width is substantially greater than the free end width. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, ΔT1b, that is greater than a first deflector layer free end temperature increase, ΔT1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, ΔT2b that is greater than a second deflector layer free end temperature increase, ΔT2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant τB. The thermal actuator is activated by a heat pulses of duration τP wherein τP

    Tapered multi-layer thermal actuator and method of operating same

    公开(公告)号:US20050052498A1

    公开(公告)日:2005-03-10

    申请号:US10953398

    申请日:2004-09-29

    摘要: An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end and base end width, wb, adjacent the base element, and a free end and free end width, wf, adjacent the free end tip, wherein the base end width is substantially greater than the free end width. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, ΔT1b, that is greater than a first deflector layer free end temperature increase, ΔT1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, ΔT2b that is greater than a second deflector layer free end temperature increase, ΔT2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant τB. The thermal actuator is activated by a heat pulses of duration τP wherein τP

    Snap-through thermal actuator
    7.
    发明申请

    公开(公告)号:US20050099462A1

    公开(公告)日:2005-05-12

    申请号:US11015999

    申请日:2004-12-18

    IPC分类号: B41J2/14 B41J2/04

    CPC分类号: B41J2/14 B41J2002/14346

    摘要: A snap-through thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The snap-through actuator is comprised of a base element formed with a depression having opposing anchor edges which define a central plane. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element is formed to have a residual shape bowing outward from the central plane in a first direction away from the second layer. The snap-through thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element which causes a sudden rise in the temperature of the deformable element. The deformable element initially bows farther outward in the first direction, then, due to thermomechanical torque's acting at the opposing anchor edges, reverses and snaps through the central plane to bow outward in a second direction toward the second layer, and then relaxes to the residual shape as the temperature decreases. The snap-through thermal actuator is configured with a liquid chamber having a nozzle, a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.

    Snap-through thermal actuator
    8.
    发明申请

    公开(公告)号:US20050099463A1

    公开(公告)日:2005-05-12

    申请号:US11016000

    申请日:2004-12-18

    IPC分类号: B41J2/14 B41J2/04

    CPC分类号: B41J2/14 B41J2002/14346

    摘要: A snap-through thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The snap-through actuator is comprised of a base element formed with a depression having opposing anchor edges which define a central plane. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element is formed to have a residual shape bowing outward from the central plane in a first direction away from the second layer. The snap-through thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element which causes a sudden rise in the temperature of the deformable element. The deformable element initially bows farther outward in the first direction, then, due to thermomechanical torque's acting at the opposing anchor edges, reverses and snaps through the central plane to bow outward in a second direction toward the second layer, and then relaxes to the residual shape as the temperature decreases. The snap-through thermal actuator is configured with a liquid chamber having a nozzle, a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.

    Modulating the properties of the gain region at spaced locations in an organic vertical cavity laser array device
    9.
    发明申请
    Modulating the properties of the gain region at spaced locations in an organic vertical cavity laser array device 失效
    在有机垂直腔激光器阵列器件的间隔位置调制增益区的属性

    公开(公告)号:US20050025203A1

    公开(公告)日:2005-02-03

    申请号:US10633196

    申请日:2003-08-01

    摘要: A vertical cavity laser array device including a substrate, top and bottom dielectric stacks, and an active region for producing laser light. The active region includes one or more periodic gain region(s) and spacer layers disposed on either side of the periodic gain region(s) and arranged so that the periodic gain region(s) is aligned with the antinodes of the device's standing wave electromagnetic field. A structure is provided for modulating the properties of the periodic gain region(s) at spaced locations so as to provide an array of spaced laser pixels which have higher net gain than the interpixel regions; and the spaced laser pixels having the same or different sizes and the spacings between pixels having the same or different lengths to cause the output of the vertical cavity laser array device to produce single or multimode laser output.

    摘要翻译: 一种垂直腔激光器阵列器件,包括衬底,顶部和底部电介质堆叠以及用于产生激光的有源区域。 有源区域包括一个或多个周期性增益区域和间隔层,其设置在周期性增益区域的两侧,并且被布置成使得周期性增益区域与器件驻波电磁波的波腹对准 领域。 提供了一种用于调制间隔位置处的周期性增益区域的特性的结构,以便提供具有比图像间隔区域更高的净增益的间隔开的激光像素阵列; 并且间隔开的激光像素具有相同或不同的尺寸以及具有相同或不同长度的像素之间的间距,以使垂直腔激光器阵列器件的输出产生单模或多模激光输出。

    Printhead and method of forming same
    10.
    发明申请
    Printhead and method of forming same 审中-公开
    打印头及其形成方法

    公开(公告)号:US20070182777A1

    公开(公告)日:2007-08-09

    申请号:US11349808

    申请日:2006-02-08

    IPC分类号: B41J2/015 G01D15/00

    摘要: A printhead and a method of manufacturing a printhead are provided. The printhead includes a polymeric substrate including a surface. Portions of the polymeric substrate define a liquid chamber. A material layer is disposed on the surface of the polymeric substrate. Portions of the material layer define a nozzle bore. The nozzle bore is in fluid communication with the liquid chamber.

    摘要翻译: 提供一种打印头和制造打印头的方法。 打印头包括包括表面的聚合物基材。 聚合物基材的部分限定液体室。 材料层设置在聚合物基材的表面上。 材料层的一部分限定了喷嘴孔。 喷嘴孔与液体室流体连通。