FLUID EJECTOR HAVING AN ANISOTROPIC SURFACE CHAMBER ETCH
    1.
    发明申请
    FLUID EJECTOR HAVING AN ANISOTROPIC SURFACE CHAMBER ETCH 有权
    具有各向异性表面腔体的流体喷射器

    公开(公告)号:US20070153060A1

    公开(公告)日:2007-07-05

    申请号:US11685259

    申请日:2007-03-13

    IPC分类号: B41J2/04

    摘要: A fluid ejecting device and method of forming same are provided. The fluid ejecting device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate. The nozzle plate has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall with the first wall and the second wall being positioned at an angle relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber. A source of fluid impedance comprises a physical structure located between the nozzle and the fluid delivery channel.

    摘要翻译: 提供一种流体喷射装置及其形成方法。 流体喷射装置包括具有第一表面和与第一表面相对的第二表面的基底。 在基板的第一表面上形成喷嘴板。 喷嘴板具有喷嘴,流体被喷射通过喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通,并且具有第一壁和第二壁,其中第一壁和第二壁相对于彼此以一定角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。 流体阻抗源包括位于喷嘴和流体输送通道之间的物理结构。

    Fluid ejector having an anisotropic surface chamber etch
    2.
    发明申请
    Fluid ejector having an anisotropic surface chamber etch 有权
    具有各向异性表面腔蚀刻的流体喷射器

    公开(公告)号:US20060028511A1

    公开(公告)日:2006-02-09

    申请号:US10911186

    申请日:2004-08-04

    IPC分类号: B41J2/05 B41J2/01

    摘要: A fluid ejecting device and method of forming same are provided. The fluid ejecting device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate. The nozzle plate has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall with the first wall and the second wall being positioned at an angle relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber. A source of fluid impedance comprises a physical structure located between the nozzle and the fluid delivery channel.

    摘要翻译: 提供一种流体喷射装置及其形成方法。 流体喷射装置包括具有第一表面和与第一表面相对的第二表面的基底。 在基板的第一表面上形成喷嘴板。 喷嘴板具有喷嘴,流体被喷射通过喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通,并且具有第一壁和第二壁,其中第一壁和第二壁相对于彼此以一定角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。 流体阻抗源包括位于喷嘴和流体输送通道之间的物理结构。

    Substrate etching method for forming connected features
    3.
    发明申请
    Substrate etching method for forming connected features 有权
    用于形成连接特征的基板蚀刻方法

    公开(公告)号:US20060027521A1

    公开(公告)日:2006-02-09

    申请号:US10911183

    申请日:2004-08-04

    IPC分类号: H01L21/311 B44C1/22

    摘要: A method of etching a substrate and an article(s) formed using the method are provided. The method includes providing a substrate; coating a region of the substrate with a temporary material having properties that enable the temporary material to remain substantially intact during subsequent processing and enable the temporary material to be removed by a subsequent process that allows the substrate to remain substantially unaltered; removing a portion of the substrate to form a feature, at least some of the removed portion of the substrate overlapping at least a portion of the coated region of the substrate while allowing the temporary material substantially intact; and removing the temporary material while allowing the substrate to remain substantially unaltered.

    摘要翻译: 提供了使用该方法形成的蚀刻基板和制品的方法。 该方法包括提供基板; 用临时材料涂覆基材的区域,所述临时材料具有使得临时材料能够在随后的处理期间保持基本上完整的,并且使临时材料能够通过允许基材保持基本上不变的后续工艺来除去; 去除衬底的一部分以形成特征,衬底的至少部分被去除的部分与衬底的涂覆区域的至少一部分重叠,同时允许临时材料基本上完整; 并且移除临时材料同时允许基底基本上保持不变。

    Continuous fluid jet ejector with anisotropically etched fluid chambers
    4.
    发明申请
    Continuous fluid jet ejector with anisotropically etched fluid chambers 有权
    具有各向异性蚀刻流体室的连续流体喷射喷射器

    公开(公告)号:US20070052766A1

    公开(公告)日:2007-03-08

    申请号:US11220514

    申请日:2005-09-07

    IPC分类号: B41J2/02

    摘要: A fluid ejection device, a method of cleaning the device, and a method of operating the device are provided. The device includes a substrate having a first surface and a second surface located opposite the first surface. A nozzle plate is formed over the first surface of the substrate and has a nozzle through which fluid is ejected. A drop forming mechanism is situated at the periphery of the nozzle. A fluid chamber is in fluid communication with the nozzle and has a first wall and a second wall. The first wall and the second wall are positioned at an angle other than 90° relative to each other. A fluid delivery channel is formed in the substrate and extends from the second surface of the substrate to the fluid chamber. The fluid delivery channel is in fluid communication with the fluid chamber.

    摘要翻译: 提供流体喷射装置,清洁装置的方法以及操作装置的方法。 该装置包括具有第一表面和与该第一表面相对的第二表面的基底。 喷嘴板形成在基板的第一表面上,并且具有喷嘴,流体被喷射通过该喷嘴。 液滴形成机构位于喷嘴的周边。 流体室与喷嘴流体连通并且具有第一壁和第二壁。 第一壁和第二壁相对于彼此以不同于90°的角度定位。 流体输送通道形成在基底中并从基底的第二表面延伸到流体腔。 流体输送通道与流体室流体连通。

    Tapered multi-layer thermal actuator and method of operating same

    公开(公告)号:US20050052496A1

    公开(公告)日:2005-03-10

    申请号:US10953401

    申请日:2004-09-29

    摘要: An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end and base end width, wb, adjacent the base element, and a free end and free end width, wf, adjacent the free end tip, wherein the base end width is substantially greater than the free end width. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, ΔT1b, that is greater than a first deflector layer free end temperature increase, ΔT1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, ΔT2b that is greater than a second deflector layer free end temperature increase, ΔT2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant τB. The thermal actuator is activated by a heat pulses of duration τP wherein τP

    Tapered multi-layer thermal actuator and method of operating same

    公开(公告)号:US20050052498A1

    公开(公告)日:2005-03-10

    申请号:US10953398

    申请日:2004-09-29

    摘要: An apparatus for and method of operating a thermal actuator for a micromechanical device, especially a liquid drop emitter such as an ink jet printhead, is disclosed. The disclosed thermal actuator comprises a base element and a cantilevered element including a thermo-mechanical bender portion extending from the base element to a free end tip. The thermo-mechanical bender portion includes a barrier layer constructed of a dielectric material having low thermal conductivity, a first deflector layer constructed of a first electrically resistive material having a large coefficient of thermal expansion, and a second deflector layer constructed of a second electrically resistive material having a large coefficient of thermal expansion wherein the barrier layer is bonded between the first and second deflector layers. The thermo-mechanical bender portion further has a base end and base end width, wb, adjacent the base element, and a free end and free end width, wf, adjacent the free end tip, wherein the base end width is substantially greater than the free end width. A first heater resistor is formed in the first deflector layer and adapted to apply heat energy having a first spatial thermal pattern which results in a first deflector layer base end temperature increase, ΔT1b, that is greater than a first deflector layer free end temperature increase, ΔT1f. A second heater resistor is formed in the second deflector layer and adapted to apply heat energy having a second spatial thermal pattern which results in a second deflector layer base end temperature increase, ΔT2b that is greater than a second deflector layer free end temperature increase, ΔT2f. Application of an electrical pulse to either the first or second heater resistors causes deflection of the cantilevered element, followed by restoration of the cantilevered element to an initial position as heat diffuses through the barrier layer and the cantilevered element reaches a uniform temperature. For liquid drop emitter embodiments, the thermal actuator resides in a liquid-filled chamber that includes a nozzle for ejecting liquid. Application of electrical pulses to the heater resistors is used to adjust the characteristics of liquid drop emission. The barrier layer exhibits a heat transfer time constant τB. The thermal actuator is activated by a heat pulses of duration τP wherein τP

    Apparatus and method of controlling temperatures in ejection mechanisms
    7.
    发明申请
    Apparatus and method of controlling temperatures in ejection mechanisms 审中-公开
    控制喷射机构温度的装置和方法

    公开(公告)号:US20050179716A1

    公开(公告)日:2005-08-18

    申请号:US10778280

    申请日:2004-02-14

    IPC分类号: B41J2/14 B41J29/393

    摘要: An apparatus and method for controlling temperature profiles in ejection mechanisms is provided. A heater includes a first resistor segment having an electrical resistivity, a second resistor segment; and a coupling segment positioned between the first resistor segment and the second resistor segment. The coupling segment has an electrical resistivity, wherein the ratio of the resistivity of the coupling segment to the resistivity of the first resistor segment is substantially zero. Alternatively, the first resistor segment has an electrical conductivity and the coupling segment has an electrical conductivity, wherein the electrical conductivity of the coupling segment is greater than the electrical conductivity of the first resistor segment.

    摘要翻译: 提供了一种用于控制喷射机构温度分布的装置和方法。 加热器包括具有电阻率的第一电阻器段,第二电阻器段; 以及位于第一电阻器段和第二电阻器段之间的耦合段。 耦合段具有电阻率,其中耦合段的电阻率与第一电阻器段的电阻率之比基本为零。 或者,第一电阻器段具有导电性,并且耦合段具有导电性,其中耦合段的电导率大于第一电阻器段的电导率。

    Latency stirring in fluid ejection mechanisms
    8.
    发明申请
    Latency stirring in fluid ejection mechanisms 有权
    流体喷射机构的延迟搅拌

    公开(公告)号:US20050285912A1

    公开(公告)日:2005-12-29

    申请号:US10878097

    申请日:2004-06-28

    IPC分类号: B41J2/165 B41J2/17

    CPC分类号: B41J2/165 B41J2002/16502

    摘要: A liquid drop emitter, a method of mixing a liquid, and a method of printing are provided. The liquid emitter includes a structure defining a chamber adapted to provide a liquid having an orifice through which a drop of the liquid can be emitted. A drop forming mechanism is operatively associated with the chamber. A mixing mechanism is associated with the chamber and is operable to create a surface tension gradient on the liquid provided by the chamber such that the liquid flows without being emitted from the chamber.

    摘要翻译: 提供液滴发射器,混合液体的方法和印刷方法。 液体发射器包括限定适于提供具有孔的液体的结构的结构,通过该孔可以发射一滴液体。 液滴形成机构与腔室可操作地相关联。 混合机构与室相关联并且可操作以在由室提供的液体上产生表面张力梯度,使得液体流动而不从室发射。

    Apparatus for controlling temperature profiles in liquid droplet ejectors
    9.
    发明申请
    Apparatus for controlling temperature profiles in liquid droplet ejectors 失效
    用于控制液滴喷射器中的温度曲线的装置

    公开(公告)号:US20050247689A1

    公开(公告)日:2005-11-10

    申请号:US10830688

    申请日:2004-04-23

    摘要: A heater is provided. The heater includes a first material having a circular form and a first sheet resistivity. The first material has a first radius of curvature. The heater also includes a second material having a circular form and a second sheet resistivity. The second material is positioned adjacent to the first material and has a second radius of curvature. The first radius of curvature is greater than the second radius of curvature and the first sheet resistivity is less than the second sheet resistivity.

    摘要翻译: 提供加热器。 加热器包括具有圆形形状和第一薄层电阻率的第一材料。 第一材料具有第一曲率半径。 加热器还包括具有圆形形式和第二薄层电阻率的第二材料。 第二材料定位成与第一材料相邻并且具有第二曲率半径。 第一曲率半径大于第二曲率半径,第一片电阻率小于第二片电阻率。