公开(公告)号：US07154607B2

公开(公告)日：2006-12-26

申请号：US10700086

申请日：2003-11-03

申请人： James Lee Hendrix ,  David Y. Wang ,  David M. Aikens ,  Lawrence Rotter ,  Joel Ng

发明人： James Lee Hendrix ,  David Y. Wang ,  David M. Aikens ,  Lawrence Rotter ,  Joel Ng

IPC分类号： G01N21/55

CPC分类号： G01J3/02 ,  G01J3/0218 ,  G01J3/10 ,  G01N21/55 ,  G01N21/9501 ,  G01N2201/06146 ,  G01N2201/0826

摘要： A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.

摘要翻译： 用于光学测量系统的平面光谱照明源包括产生可见光束的第一光源和产生紫外光束的第二光源。 照明源还包括在可见光束和紫外光束之间的波长处产生光束的辅助光源。 三个光束被组合以提供在宽范围的波长上具有基本均匀的照明水平的宽带探测光束。 或者，照明源可以被制造为被选择以覆盖一定范围的分开的波长的发光二极管的阵列。 组合LED阵列的输出以产生宽带探测光束。

公开(公告)号：US07251036B2

公开(公告)日：2007-07-31

申请号：US11334999

申请日：2006-01-19

申请人： James Hendrix ,  David Wang ,  Michael Ellison ,  Joel Ng

发明人： James Hendrix ,  David Wang ,  Michael Ellison ,  Joel Ng

IPC分类号： G01N21/45

CPC分类号： G01B11/0625 ,  G01N21/211 ,  G01N21/255 ,  G01N21/55 ,  G01N21/9501

摘要： A combiner for optical beams includes a substrate overlaid by a multi-layer dielectric film stack. The substrate is a clear material and the dielectric film stack is a series of alternating layer of high and low refractive index. This gives the combiner relatively high reflectivity across UV wavelengths and relatively high transmissivity in the visible and longer wavelengths and allows visible light to pass through the combiner while UV light is reflected. At the same time dielectric film stack has minimal absorption and scatter. This means that the intensity of visible light maintains at least 90% of its intensity as it passes through combiner and UV light retains at least 90% of its intensity as it is reflected by combiner.

摘要翻译： 用于光束的组合器包括由多层电介质膜叠层覆盖的衬底。 衬底是透明材料，电介质膜堆叠是一系列具有高低折射率的交替层。 这使得组合器在UV波长上相对较高的反射率和可见光和较长波长的相对高的透射率，并且允许可见光在反射UV光的同时通过组合器。 同时电介质薄膜叠层具有最小的吸收和散射。 这意味着当可见光通过组合器时，可见光的强度保持其强度的至少90％，并且当光被组合器反射时，紫外光保持其强度的至少90％。

公开(公告)号：US20060126071A1

公开(公告)日：2006-06-15

申请号：US11334999

申请日：2006-01-19

申请人： James Hendrix ,  David Wang ,  Michael Ellison ,  Joel Ng

发明人： James Hendrix ,  David Wang ,  Michael Ellison ,  Joel Ng

IPC分类号： G01N21/55

CPC分类号： G01B11/0625 ,  G01N21/211 ,  G01N21/255 ,  G01N21/55 ,  G01N21/9501

摘要： A combiner for optical beams includes a substrate overlaid by a multi-layer dielectric film stack. The substrate is a clear material and the dielectric film stack is a series of alternating layer of high and low refractive index. This gives the combiner relatively high reflectivity across UV wavelengths and relatively high transmissivity in the visible and longer wavelengths and allows visible light to pass through the combiner while UV light is reflected. At the same time dielectric film stack has minimal absorption and scatter. This means that the intensity of visible light maintains at least 90% of its intensity as it passes through combiner and UV light retains at least 90% of its intensity as it is reflected by combiner.

摘要翻译： 用于光束的组合器包括由多层电介质膜叠层覆盖的衬底。 衬底是透明材料，电介质膜堆叠是一系列具有高低折射率的交替层。 这使得组合器在UV波长上相对较高的反射率和可见光和较长波长的相对高的透射率，并且允许可见光在反射UV光的同时通过组合器。 同时电介质薄膜叠层具有最小的吸收和散射。 这意味着当可见光通过组合器时，可见光的强度保持其强度的至少90％，并且当光被组合器反射时，紫外光保持其强度的至少90％。

公开(公告)号：US07027158B2

公开(公告)日：2006-04-11

申请号：US10229630

申请日：2002-08-28

申请人： James Hendrix ,  David Wang ,  Michael Ellison ,  Joel Ng

发明人： James Hendrix ,  David Wang ,  Michael Ellison ,  Joel Ng

IPC分类号： G01N21/45

CPC分类号： G01B11/0625 ,  G01N21/211 ,  G01N21/255 ,  G01N21/55 ,  G01N21/9501

摘要： A combiner for optical beams includes a substrate overlaid by a multi-layer dielectric film stack. The substrate is a clear material and the dielectric film stack is a series of alternating layer of high and low refractive index. This gives the combiner relatively high reflectivity across UV wavelengths and relatively high transmissivity in the visible and longer wavelengths and allows visible light to pass through the combiner while UV light is reflected. At the same time dielectric film stack has minimal absorption and scatter. This means that the intensity of visible light maintains at least 90% of its intensity as it passes through combiner and UV light retains at least 90% of its intensity as it is reflected by combiner.