Wafer carrier for chemical mechanical planarization polishing

    公开(公告)号:US6113479A

    公开(公告)日:2000-09-05

    申请号:US900184

    申请日:1997-07-25

    CPC classification number: B24B37/30 B24B41/061 B24B49/04

    Abstract: An apparatus, and particularly, a wafer carrier for polishing the face of a semiconductor wafer are provided. The wafer carrier forms a first cavity which can be pressure controlled to vary the shape of a face of a platen which contacts the wafer during polishing. A second cavity within the first cavity is provided. The second cavity can be independently pressure controlled to form a vacuum for holding the wafer against the platen surface or for forming a pressure stream to separate the wafer from the platen and/or to purge the holes in the surface of the platen. A non-contact displacement sensor capable of measuring a distance between the wafer carrier mount and the platen, may be provided. An endpoint detector capable of detecting a relative surface roughness of the wafer, to determine when the wafer has been sufficiently polished, may also be provided. A ring is peripherally located about an outer edge of the platen, and is mounted and positioned to resist lateral forces on the wafer during polishing. The ring is adjustably mounted so as to be variably and controllably vertically positioned, with respect to the wafer to help control standing waves in the polishing media and uneven polishing of the wafer surface.

    Wafer carrier for chemical mechanical planarization polishing
    2.
    发明授权
    Wafer carrier for chemical mechanical planarization polishing 有权
    用于化学机械平面抛光的晶圆载体

    公开(公告)号:US06494769B1

    公开(公告)日:2002-12-17

    申请号:US09586733

    申请日:2000-06-05

    CPC classification number: B24B37/30 B24B41/061 B24B49/04

    Abstract: An apparatus, and particularly, a wafer carrier for polishing the face of a semiconductor wafer are provided. The wafer carrier forms a first cavity which can be pressure controlled to vary the shape of a face of a platen which contacts the wafer during polishing. A second cavity within the first cavity is provided. The second cavity can be independently pressure controlled to form a vacuum for holding the wafer against the platen surface or for forming a pressure stream to separate the wafer from the platen and/or to purge the holes in the surface of the platen. A non-contact displacement sensor capable of measuring a distance between the wafer carrier mount and the platen, may be provided. An endpoint detector capable of detecting a relative surface roughness of the wafer, to determine when the wafer has been sufficiently polished, may also be provided. A ring is peripherally located about an outer edge of the platen, and is mounted and positioned to resist lateral forces on the wafer during polishing. The ring is adjustably mounted so as to be variably and controllably vertically positioned, with respect to the wafer to help control standing waves in the polishing media and uneven polishing of the wafer surface.

    Abstract translation: 提供一种装置,特别是用于抛光半导体晶片的表面的晶片载体。 晶片载体形成第一空腔,其可被压力控制以改变在抛光期间接触晶片的压板的表面的形状。 提供第一腔内的第二腔。 可以独立地对第二腔进行压力控制,以形成用于将晶片保持在压板表面上或用于形成压力流以将晶片与压板分离和/或清除压板表面中的孔的真空。 可以提供能够测量晶片载体支架和压板之间的距离的非接触位移传感器。 还可以提供能够检测晶片的相对表面粗糙度以确定晶片何时被充分抛光的端点检测器。 环围绕压板的外边缘周边设置,并且被安装和定位成在抛光期间抵抗晶片上的横向力。 环可调节地安装成相对于晶片可变地和可控地垂直地定位,以帮助控制抛光介质中的驻波和晶片表面的不均匀抛光。

    Adjustable low profile gimbal system for chemical mechanical polishing
    3.
    发明授权
    Adjustable low profile gimbal system for chemical mechanical polishing 有权
    用于化学机械抛光的可调小面型万向节系统

    公开(公告)号:US6116990A

    公开(公告)日:2000-09-12

    申请号:US247769

    申请日:1999-02-09

    CPC classification number: B24B41/047 B24B37/30

    Abstract: A low profile gimbal system is provided to greatly reduce the generation of moments about a pivot point of the gimbal system during polishing processes. The gimbal system is adjustable so that a preferred balance between stiffness and friction may be selected as appropriate for a variety of different polishing conditions. A locking feature ensures that the adjustment setting is maintained during polishing.

    Abstract translation: 提供了一种低调万向节系统,以在抛光过程中大大减少万向节系统枢轴点周围的力矩的产生。 万向节系统是可调节的,使得可以根据各种不同的抛光条件适当地选择刚度和摩擦之间的优选平衡。 锁定功能确保在抛光过程中保持调整设置。

    Trading System Having Increased Liquidity Provision
    4.
    发明申请
    Trading System Having Increased Liquidity Provision 有权
    增加流动性提供的交易系统

    公开(公告)号:US20120239547A1

    公开(公告)日:2012-09-20

    申请号:US13482486

    申请日:2012-05-29

    CPC classification number: G06Q40/04 G06Q30/0601

    Abstract: An anonymous trading system includes a prime broker facility that allows a third party to trade on behalf of an institution. A deal is executed between the third party and a counter-party and a further deal is then executed between the third party and the party on whose behalf it has traded. The second deal may be for the same amount as the first deal or may be altered to include the third party's fee for conducting the first deal. Clients of the third party have prices available to them for trades made via the third party which are displayed at their trader terminals. The client sees that a better price is available though the third party than by dealing direct and selects to conduct a deal through the third party.

    Abstract translation: 一个匿名的交易系统包括一个主要的经纪人设施,允许第三方代表一个机构进行交易。 第三方与对方之间签订协议,再由第三方与其交易的代理方签订进一步协议。 第二笔交易可能与第一笔交易相同,或可能被更改,以包括第三方进行第一笔交易的费用。 第三方的客户可以通过第三方在其交易终端上显示的交易获得价格。 客户认为,通过第三方可以获得更好的价格,而不是直接交易,并通过第三方进行交易。

    Automated trading system
    5.
    发明授权
    Automated trading system 有权
    自动交易系统

    公开(公告)号:US08209254B2

    公开(公告)日:2012-06-26

    申请号:US10202827

    申请日:2002-07-26

    CPC classification number: G06Q40/04 G06Q20/10 G06Q40/00 G06Q40/06

    Abstract: A computer trading system includes a quote screening function configured to accept quotes specifying a quote amount in a price where the quote amount is greater than a minimum quote amount to produce screen quote messages and to reject quotes specifying a quote amount less than the minimum quote amount. A market view generator generates market views from those quotes which specify an amount greater than or equal to the minimum quote amount. An order screening function only accepts orders specifying an amount less than a maximum transaction amount submitted in response to the market views to produce screened order messages. A transaction processor receives screened quote messages and screened order messages and matches appropriate messages with each other. The minimum quote amount is substantially equal to or greater than the maximum transaction amount whereby a screened order message can be matched entirely with one screened quote message.

    Abstract translation: 计算机交易系统包括报价筛选功能,其配置为接受报价指定报价金额的报价,报价金额大于最低报价金额以生成屏幕报价信息,并拒绝报价指定小于最低报价金额的报价 。 市场视图生成器根据这些报价产生市场观点,指定金额大于或等于最低报价金额。 订单筛选功能仅接受指定小于响应市场视图而提交的最大交易金额的订单以生成筛选订单消息的订单。 交易处理器接收筛选的报价消息和筛选的订单消息并将适当的消息彼此匹配。 最小报价金额基本上等于或大于最大交易金额,从而筛选的订单消息可以完全与一个已筛选的报价消息相匹配。

    TRADING SYSTEM
    6.
    发明申请
    TRADING SYSTEM 有权
    交易系统

    公开(公告)号:US20090292635A1

    公开(公告)日:2009-11-26

    申请号:US12435553

    申请日:2009-05-05

    CPC classification number: G06Q40/04 G06Q30/0601

    Abstract: An anonymous trading system includes a prime broker facility that allows a third party to trade on behalf of an institution. A deal is executed between the third party and a counter-party and a further deal is then executed between the third party and the party on whose behalf it has traded. The second deal may be for the same amount as the first deal or may be altered to include the third party's fee for conducting the first deal. Clients of the third party have prices available to them for trades made via the third party which are displayed at their trader terminals. The client sees that a better price is available though the third party than by dealing direct and selects to conduct a deal through the third party.

    Abstract translation: 一个匿名的交易系统包括一个主要的经纪人设施,允许第三方代表一个机构进行交易。 第三方与对方之间签订协议,再由第三方与其交易的代理方签订进一步协议。 第二笔交易可能与第一笔交易相同,或可能被更改,以包括第三方进行第一笔交易的费用。 第三方的客户可以通过第三方在其交易终端上显示的交易获得价格。 客户认为,通过第三方可以获得更好的价格,而不是直接交易,并通过第三方进行交易。

    Calculation engine for use in olap environments
    8.
    发明申请
    Calculation engine for use in olap environments 有权
    用于奥拉环境的计算引擎

    公开(公告)号:US20060200448A1

    公开(公告)日:2006-09-07

    申请号:US11405152

    申请日:2006-04-17

    CPC classification number: G06F17/30539

    Abstract: This invention addresses the need for dealing with complex planning calculations based on data warehouse or Planning Data Repository (PDR) data where some aggregated data or forecast data might be changed without directly manipulating the underlying data, and where there may be several relationships linking the data. The system is able to deal with complex relationships along more than one axis or dimension. A number of iterations are typically used involving both back-solving and ‘forward-solving’. The subset of cells that needs to be recalculated is identified before steps of back-solving and/or forward-solving using parent/child tables. The scanning of these tables looking for potential dependencies is much simpler and faster than to looking at the actual formulae or functions relating the cells. The step of creating the parent/child tables is carried out in advance of the actual calculation by parsing all the relationships (formulae and functions) and summarising the dependencies between cells in the parent/child tables.

    Abstract translation: 本发明解决了处理基于数据仓库或规划数据存储库(PDR)数据的复杂规划计算的需要,其中可以改变一些聚合数据或预测数据而不直接操纵底层数据,以及可能存在几个关联数据的关系 。 该系统能够处理沿着多个轴或维度的复杂关系。 通常使用多次迭代,包括反求解和“前向解决”。 需要重新计算的单元的子集在使用父/子表的反求解和/或前向解析的步骤之前被识别。 寻找潜在依赖关系的这些表的扫描比查看与单元格相关的实际公式或功能更简单和更快。 通过解析所有关系(公式和函数)并总结父/子表中的单元格之间的依赖关系,在实际计算之前执行创建父/子表的步骤。

    Trading system having increased liquidity provision
    9.
    发明授权
    Trading system having increased liquidity provision 有权
    增加流动性提供的交易系统

    公开(公告)号:US08577784B2

    公开(公告)日:2013-11-05

    申请号:US13482486

    申请日:2012-05-29

    CPC classification number: G06Q40/04 G06Q30/0601

    Abstract: An anonymous trading system includes a prime broker facility that allows a third party to trade on behalf of an institution. A deal is executed between the third party and a counter-party and a further deal is then executed between the third party and the party on whose behalf it has traded. The second deal may be for the same amount as the first deal or may be altered to include the third party's fee for conducting the first deal. Clients of the third party have prices available to them for trades made via the third party which are displayed at their trader terminals. The client sees that a better price is available though the third party than by dealing direct and selects to conduct a deal through the third party.

    Abstract translation: 一个匿名的交易系统包括一个主要的经纪人设施,允许第三方代表一个机构进行交易。 第三方与对方之间签订协议,再由第三方与其交易的代理方签订进一步协议。 第二笔交易可能与第一笔交易相同,或可能被更改,以包括第三方进行第一笔交易的费用。 第三方的客户可以通过第三方在其交易终端上显示的交易获得价格。 客户认为,通过第三方可以获得更好的价格,而不是直接交易,并通过第三方进行交易。

    Control method for a common rail fuel pump and apparatus for performing the same
    10.
    发明授权
    Control method for a common rail fuel pump and apparatus for performing the same 有权
    共轨燃油泵的控制方法及其执行装置

    公开(公告)号:US08516995B2

    公开(公告)日:2013-08-27

    申请号:US12843956

    申请日:2010-07-27

    Applicant: James Sinclair

    Inventor: James Sinclair

    Abstract: A method and apparatus for controlling a fuel pump assembly comprising a plurality of pump elements, each pump element comprising a cam-driven plunger to perform at least one pumping event per engine revolution and a control valve. Each pumping event corresponds to an associated cam lobe of the associated cam. The method comprises, for each pumping event of each pump element, controlling the control valve of said pump element in response to an output control signal derived from at least one previous pumping event. Fuel pressure is measured within a rail volume and compared with a demanded rail pressure value to derive a rail pressure error. A proportional term and an integral term for the rail pressure error are derived and combined to derive the output control signal. Monitoring of the integral term for each pumping event provides a means for identifying and diagnosing a fault condition.

    Abstract translation: 一种用于控制包括多个泵元件的燃料泵组件的方法和装置,每个泵元件包括凸轮驱动的柱塞,用于每发动机转速执行至少一个泵送事件和控制阀。 每个泵送事件对应于相关凸轮的相关凸轮凸角。 该方法包括对于每个泵元件的每个泵送事件,响应于从至少一个先前泵送事件导出的输出控制信号来控制所述泵浦元件的控制阀。 在轨道容积内测量燃料压力,并与要求的轨道压力值进行比较以导出轨道压力误差。 导出与压力误差的比例项和积分项,并组合起来导出输出控制信号。 监测每个泵送事件的积分项提供了识别和诊断故障状况的手段。

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