公开(公告)号：US20060184264A1

公开(公告)日：2006-08-17

申请号：US11058321

申请日：2005-02-16

申请人： James Willis ,  Merritt Funk ,  Kevin Lally ,  Kevin Pinto ,  Masayuki Tomoyasu ,  Raymond Peterson ,  Radha Sundararajan

发明人： James Willis ,  Merritt Funk ,  Kevin Lally ,  Kevin Pinto ,  Masayuki Tomoyasu ,  Raymond Peterson ,  Radha Sundararajan

IPC分类号： G06F19/00

CPC分类号： G05B19/4184 ,  G05B2219/31356 ,  G05B2219/32179 ,  G05B2219/45031 ,  Y02P80/40 ,  Y02P90/14 ,  Y02P90/20 ,  Y02P90/22 ,  Y02P90/86

摘要： A method for implementing FDC in an APC system including receiving an FDC model from memory; providing the FDC model to a process model calculation engine; computing a vector of predicted dependent process parameters using the process model calculation engine; receiving a process recipe comprising a set of recipe parameters, providing the process recipe to a process module; executing the process recipe to produce a vector of measured dependent process parameters; calculating a difference between the vector of predicted dependent process parameters and the vector of measured dependent process parameters; comparing the difference to a threshold value; and declaring a fault condition when the difference is greater than the threshold value.

公开(公告)号：US07477960B2

公开(公告)日：2009-01-13

申请号：US11058321

申请日：2005-02-16

申请人： James E. Willis ,  Merritt Funk ,  Kevin Lally ,  Kevin Pinto ,  Masayuki Tomoyasu ,  Raymond Peterson ,  Radha Sundararajan

发明人： James E. Willis ,  Merritt Funk ,  Kevin Lally ,  Kevin Pinto ,  Masayuki Tomoyasu ,  Raymond Peterson ,  Radha Sundararajan

IPC分类号： G06F19/00

CPC分类号： G05B19/4184 ,  G05B2219/31356 ,  G05B2219/32179 ,  G05B2219/45031 ,  Y02P80/40 ,  Y02P90/14 ,  Y02P90/20 ,  Y02P90/22 ,  Y02P90/86

摘要： A method for implementing FDC in an APC system including receiving an FDC model from memory; providing the FDC model to a process model calculation engine; computing a vector of predicted dependent process parameters using the process model calculation engine; receiving a process recipe comprising a set of recipe parameters, providing the process recipe to a process module; executing the process recipe to produce a vector of measured dependent process parameters; calculating a difference between the vector of predicted dependent process parameters and the vector of measured dependent process parameters; comparing the difference to a threshold value; and declaring a fault condition when the difference is greater than the threshold value.

摘要翻译： 一种用于在APC系统中实现FDC的方法，包括从存储器接收FDC模型; 将FDC模型提供给过程模型计算引擎; 使用过程模型计算引擎计算预测的依赖过程参数的向量; 接收包括一组配方参数的处理配方，向处理模块提供处理配方; 执行过程配方以产生测量的依赖过程参数的向量; 计算预测的依赖过程参数的向量与测量的依赖过程参数的向量之间的差; 将差值与阈值进行比较; 并且当差值大于阈值时声明故障状况。

公开(公告)号：US20050187649A1

公开(公告)日：2005-08-25

申请号：US11087071

申请日：2005-03-23

申请人： Merritt Funk ,  Raymond Peterson

发明人： Merritt Funk ,  Raymond Peterson

IPC分类号： G05B19/418 ,  G05B23/02 ,  H01L21/00 ,  H01L21/66 ,  G06F19/00

CPC分类号： G05B19/4184 ,  G05B19/41865 ,  G05B23/0259 ,  G05B23/0264 ,  G05B23/0267 ,  G05B2219/31186 ,  G05B2219/32126 ,  G05B2219/32128 ,  G05B2219/33148 ,  G05B2219/33225 ,  G05B2219/45031 ,  H01L21/67276 ,  H01L22/20 ,  Y02P90/14 ,  Y02P90/18 ,  Y02P90/20 ,  Y02P90/86

摘要： An Advanced Process Control (APC) system including Graphical User Interfaces (GUIs) is presented for monitoring and controlling a semiconductor manufacturing process that is performed by a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules (chambers), and a number of sensors, and the APC system comprises an APC server, database, interface server, client workstation, and GUI component. The GUI is web-based and is viewable by a user using a web browser.

摘要翻译： 提出了包括图形用户界面（GUI）的高级过程控制（APC）系统，用于监控和控制由半导体处理系统执行的半导体制造过程。 半导体处理系统包括多个处理工具，多个处理模块（室）和多个传感器，APC系统包括APC服务器，数据库，接口服务器，客户端工作站和GUI组件。 GUI是基于Web的，并且可以由使用web浏览器的用户查看。

公开(公告)号：US07123980B2

公开(公告)日：2006-10-17

申请号：US11087071

申请日：2005-03-23

申请人： Merritt Funk ,  Raymond Peterson

发明人： Merritt Funk ,  Raymond Peterson

IPC分类号： G06F19/00

CPC分类号： G05B19/4184 ,  G05B19/41865 ,  G05B23/0259 ,  G05B23/0264 ,  G05B23/0267 ,  G05B2219/31186 ,  G05B2219/32126 ,  G05B2219/32128 ,  G05B2219/33148 ,  G05B2219/33225 ,  G05B2219/45031 ,  H01L21/67276 ,  H01L22/20 ,  Y02P90/14 ,  Y02P90/18 ,  Y02P90/20 ,  Y02P90/86

摘要： An Advanced Process Control (APC) system including Graphical User Interfaces (GUIs) is presented for monitoring and controlling a semiconductor manufacturing process that is performed by a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules (chambers), and a number of sensors, and the APC system comprises an APC server, database, interface server, client workstation, and GUI component. The GUI is web-based and is viewable by a user using a web browser.

摘要翻译： 提出了包括图形用户界面（GUI）的高级过程控制（APC）系统，用于监控和控制由半导体处理系统执行的半导体制造过程。 半导体处理系统包括多个处理工具，多个处理模块（室）和多个传感器，APC系统包括APC服务器，数据库，接口服务器，客户端工作站和GUI组件。 GUI是基于Web的，并且可以由使用web浏览器的用户查看。

公开(公告)号：US06925774B2

公开(公告)日：2005-08-09

申请号：US10439051

申请日：2003-05-14

申请人： Raymond Peterson

发明人： Raymond Peterson

IPC分类号： A61J20060101 ,  B65B1/04 ,  B65B5/10 ,  B65B35/04 ,  B65B61/26 ,  B65B35/30

CPC分类号： B65B5/103 ,  B65B35/04 ,  B65B61/26

摘要： An automated solid pharmaceutical product packaging machine includes a plurality of temporary storage members for receiving a plurality of solid pharmaceutical products in a plurality of cavities. The use of the temporary storage cavities enables the machine to process several prescriptions simultaneously. Advantageously, at least one of the temporary storage members is capable of being automatically displaced in a vertical direction in order to increase the capacity of the overall filling system for processing a greater number of solid pharmaceutical products while minimizing the overall footprint of the device.

摘要翻译： 一种自动化固体药物制品包装机包括多个用于在多个空腔中接收多个固体药物产品的临时储存构件。 使用临时储存空腔可使机器同时处理多个处方。 有利地，临时存储构件中的至少一个能够在垂直方向上自动移位，以便增加用于处理更多数量的固体药物产品的整个填充系统的容量，同时使装置的总占地面积最小化。