摘要:
A memory device includes a pair of common source lines disposed on a substrate spaced apart from each other and extended in a first direction; a plurality of ground select lines disposed between the pair of common source lines, extended in the first direction, and disposed on the same level; a plurality of word lines disposed on the plurality of ground select lines between the pair of common source lines, extended in the first direction, and disposed on the same level, at least a portion of the plurality of word lines being connected by a connection electrode; and a plurality of first separation insulating patterns disposed between individual ground select lines of a portion of the plurality of ground select lines and extended in the first direction. The at least portion of the plurality of word lines is connected by a connection electrode.
摘要:
A memory device includes a cell region including a channel region extending to be perpendicular to an upper surface of a substrate, a plurality of gate electrode layers stacked on the substrate adjacently to the channel region, a peripheral circuit region including a first active region disposed in the vicinity of the cell region, a second active region having an area larger than an area of the first active region, a plurality of first contacts connected to the first active region, and a plurality of second contacts connected to the second active region. A distance between the plurality of first contacts is less than that between the plurality of second contacts.
摘要:
A memory device includes gate electrode layers stacked on an upper surface of a substrate and each including a plurality of unit electrodes extending in a first direction, and a plurality of connecting electrodes connecting the unit electrodes to each other. The memory device also includes channel structures extending through the gate electrode layers in a direction perpendicular to the upper surface of the substrate, first common source lines extending in the first direction and interposed between the unit electrodes, and second common source lines extending in the first direction between the first common source lines and each having a first line and a second line separated from each other in the first direction by the connecting electrodes.
摘要:
The present invention relates to a semiconductor device, a memory array and a fabrication method thereof, and more particularly to a semiconductor device having a stacked array structure (referred to as a STAR structure: a STacked ARray structure) applicable to not only a switch device but also a memory device, a NAND flash memory array using the same as a memory device and a fabrication method thereof.
摘要:
A semiconductor device includes a gate stack including gate electrodes stacked vertically on a substrate. Channel holes penetrate through the gate stack to extend vertically to the substrate. Each of the channel holes includes a channel region. First channel pads are each disposed at an end of a respective channel hole opposite the substrate. Each of the first channel pads includes at least one first conductivity-type impurity. Second channel pads are each disposed at an end of a respective channel hole opposite the substrate. Each of the second channel pads includes at least one second conductivity-type impurity.
摘要:
The present invention relates to a semiconductor device, a memory array and a fabrication method thereof, and more particularly to a semiconductor device having a stacked array structure (referred to as a STAR structure: a STacked ARray structure) applicable to not only a switch device but also a memory device, a NAND flash memory array using the same as a memory device and a fabrication method thereof.