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10 条记录 (耗时 0.02 秒)

    Multilayer material and method of preparing same
    1.
    发明申请
    Multilayer material and method of preparing same 有权
    多层材料及其制备方法

    公开(公告)号：US20060134433A1

    公开(公告)日：2006-06-22

    申请号：US11305024

    申请日：2005-12-19

    申请人： Jarmo Maula ,  Kari Harkonen ,  Anguel Nikolov

    发明人： Jarmo Maula ,  Kari Harkonen ,  Anguel Nikolov

    IPC分类号： C23C16/00

    CPC分类号： G02B1/10 ,  C03C17/3417 ,  C03C17/3694 ,  C03C2217/91 ,  C23C16/403 ,  C23C16/405 ,  C23C16/45525 ,  C23C16/45529 ,  C23C16/45555 ,  H01L21/3141 ,  Y10T428/31504

    摘要： The invention relates to a multilayer material deposited by ALD. A multi-layer structure of a high refractive index material is deposited on a substrate using ALD at a temperature below about 450° C. Advantageous results are obtained when a high refractive index material A is coated with another material B after a certain thickness of material A has been achieved. Thus, the B barrier layer stops the tendency for material A to crystallize. The amorphous structure gives rise to less optical loss. Further, the different stress nature of materials A and B may be utilized to achieve a final optical material with minimal stress. The thickness of each material B layer is less than that of the adjacent A layer(s). The total effective refractive index of the high refractive index material A+B being shall be greater than 2.20 at a wavelength of 600 nm. Titanium oxide and aluminium oxide are preferred A and B materials. The structure is useful for optical coatings.

    摘要翻译： 本发明涉及由ALD沉积的多层材料。 在低于约450℃的温度下，使用ALD将高折射率材料的多层结构沉积在基板上。当高折射率材料A在一定厚度的材料之后用另一种材料B涂覆时，可获得有利的结果 A已经实现。 因此，B阻挡层阻止材料A结晶的倾向。 非晶结构导致较少的光损耗。 此外，可以利用材料A和B的不同应力性质来实现具有最小应力的最终光学材料。 每个材料B层的厚度小于相邻A层的厚度。 高折射率材料A + B的总有效折射率在600nm波长处应大于2.20。 氧化钛和氧化铝优选为A和B材料。 该结构对于光学涂层是有用的。

    Multilayer material and method of preparing same
    2.
    发明授权
    Multilayer material and method of preparing same 有权
    多层材料及其制备方法

    公开(公告)号：US07901736B2

    公开(公告)日：2011-03-08

    申请号：US11305024

    申请日：2005-12-19

    申请人： Jarmo Maula ,  Kari Härkönen ,  Anguel Nikolov

    发明人： Jarmo Maula ,  Kari Härkönen ,  Anguel Nikolov

    IPC分类号： C23C16/00

    CPC分类号： G02B1/10 ,  C03C17/3417 ,  C03C17/3694 ,  C03C2217/91 ,  C23C16/403 ,  C23C16/405 ,  C23C16/45525 ,  C23C16/45529 ,  C23C16/45555 ,  H01L21/3141 ,  Y10T428/31504

    摘要： The invention relates to a multilayer material deposited by ALD. A multi-layer structure of a high refractive index material is deposited on a substrate using ALD at a temperature below about 450° C. Advantageous results are obtained when a high refractive index material A is coated with another material B after a certain thickness of material A has been achieved. Thus, the B barrier layer stops the tendency for material A to crystallize. The amorphous structure gives rise to less optical loss. Further, the different stress nature of materials A and B may be utilized to achieve a final optical material with minimal stress. The thickness of each material B layer is less than that of the adjacent A layer(s). The total effective refractive index of the high refractive index material A+B being shall be greater than 2.20 at a wavelength of 600 nm. Titanium oxide and aluminium oxide are preferred A and B materials. The structure is useful for optical coatings.

    摘要翻译： 本发明涉及由ALD沉积的多层材料。 在低于约450℃的温度下，使用ALD将高折射率材料的多层结构沉积在基板上。当高折射率材料A在一定厚度的材料之后用另一种材料B涂覆时，可获得有利的结果 A已经实现。 因此，B阻挡层阻止材料A结晶的倾向。 非晶结构导致较少的光损耗。 此外，可以利用材料A和B的不同应力性质来实现具有最小应力的最终光学材料。 每个材料B层的厚度小于相邻A层的厚度。 高折射率材料A + B的总有效折射率在600nm波长处应大于2.20。 氧化钛和氧化铝优选为A和B材料。 该结构对于光学涂层是有用的。

    Precision phase retardation devices and method of making same
    3.
    发明授权
    Precision phase retardation devices and method of making same 有权
    精密相位延迟器件及其制造方法

    公开(公告)号：US07050233B2

    公开(公告)日：2006-05-23

    申请号：US10633372

    申请日：2003-08-01

    申请人： Anguel Nikolov ,  Wang Wang ,  Xuegong Deng ,  Wei Zhang ,  Greg Blonder

    发明人： Anguel Nikolov ,  Wang Wang ,  Xuegong Deng ,  Wei Zhang ,  Greg Blonder

    IPC分类号： G02B27/28 ,  G02B5/30

    CPC分类号： G02B5/3025 ,  G02B5/1809 ,  G02B5/3083

    摘要： A birefringent device of substantially uniform thickness less than about 10 microns, and being suitable for operating in a wavelength range about a central wavelength is disclosed. The device includes a base substrate, a layer of periodic index regions of alternating refractive indices applied to a first surface of the base substrate, and a cap substrate located substantially adjacent to the layer distal to the base substrate. The layer of periodic index regions has a periodicity of less than the central wavelength. The device being suitable to produce an arbitrary phase retardation between 0 and 2Π phase.

    摘要翻译： 公开了一种双折射装置，其厚度基本上均匀小于约10微米，适用于围绕中心波长的波长范围内工作。 该器件包括基底，施加到基底衬底的第一表面的交替折射率的周期性折射率区域层，以及基本上邻近于基底衬底的层的盖衬底。 周期性折射率区域的周期性小于中心波长。 该装置适于产生0和2Pi相之间的任意相位延迟。

    Optical polarization beam combiner/splitter
    5.
    发明申请
    Optical polarization beam combiner/splitter 审中-公开

    公开(公告)号：US20050201656A1

    公开(公告)日：2005-09-15

    申请号：US11063327

    申请日：2005-02-22

    申请人： Anguel Nikolov ,  Stephen Chou

    发明人： Anguel Nikolov ,  Stephen Chou

    IPC分类号： G02B5/30 ,  G02B6/27 ,  G02B6/34 ,  G02B6/00

    CPC分类号： G02B6/272 ,  G02B5/3058 ,  G02B6/2773 ,  G02B6/2937

    摘要： An optical device for combining two orthogonally polarized beams or splitting a beam into two orthogonally polarized beams is provided that utilizes two collimating/focusing lenses and a thin film wire-grid polarizer. Because the thin film wire-grid polarizer can be fabricated in very thin profile, the provision of a thin film wire-grid polarizer allows the optical polarization beam combiner/splitter device to be highly integrated and simultaneously realize a number of performance advantages of a thin film wire-grid polarizer over other types of polarizers utilized in various prior art polarization beam combiner/splitters.

    Optical polarization beam combiner/splitter
    10.
    发明授权
    Optical polarization beam combiner/splitter 失效
    光偏振光束组合器/分光器

    公开(公告)号：US06876784B2

    公开(公告)日：2005-04-05

    申请号：US10158025

    申请日：2002-05-30

    申请人： Anguel Nikolov ,  Stephen Y. Chou

    发明人： Anguel Nikolov ,  Stephen Y. Chou

    IPC分类号： G02B5/30 ,  G02B6/27 ,  G02B6/34

    CPC分类号： G02B6/272 ,  G02B5/3058 ,  G02B6/2773 ,  G02B6/2937

    摘要： An optical device for combining two orthogonally polarized beams or splitting a beam into two orthogonally polarized beams is provided that utilizes two collimating/focusing lenses and a thin film wire-grid polarizer. Because the thin film wire-grid polarizer can be fabricated in very thin profile, the provision of a thin film wire-grid polarizer allows the optical polarization beam combiner/splitter device to be highly integrated and simultaneously realize a number of performance advantages of a thin film wire-grid polarizer over other types of polarizers utilized in various prior art polarization beam combiner/splitters.

    摘要翻译： 提供了一种用于组合两个正交偏振光束或将光束分成两个正交偏振光束的光学装置，其利用两个准直/聚焦透镜和薄膜线栅偏振器。 因为薄膜线栅偏振器可以制造成非常薄的轮廓，所以提供薄膜线栅偏振器允许光偏振束组合器/分离器器件被高度集成并且同时实现薄的线性偏振器的许多性能优点 在各种现有技术的偏振光束组合器/分离器中使用的其它类型的偏振器的薄膜线栅偏振器。