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1.发明授权Plasma process apparatus for integrated circuit fabrication having dome-shaped induction coil 失效用于具有圆顶形感应线圈的集成电路制造的等离子体处理装置公开(公告)号：US06225744B1
公开(公告)日：2001-05-01
申请号：US08804584
申请日：1997-02-24
IPC分类号： H01J724
CPC分类号： H01J37/321
摘要： An induction plasma source for integrated circuit fabrication includes an induction coil which defines a generally convex surface. The convex surface may be in the form of a spherical section less than a hemisphere, a paraboloid, or some other smooth convex surface. The windings of the induction coil may be spaced at different intervals in different sections of the coil and may be in multiple layers in at least a portion of the coil. Varying the shape of the coil and the distribution of the coil windings allows the plasma to be shaped in a desired manner.
摘要翻译： 用于集成电路制造的感应等离子体源包括限定大致凸表面的感应线圈。 凸面可以是小于半球，抛物面或一些其它光滑凸面的球形部分的形式。 感应线圈的绕组可以在线圈的不同部分中以不同的间隔隔开，并且在线圈的至少一部分中可以是多层。 改变线圈的形状和线圈绕组的分布允许等离子体以期望的方式成形。
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公开(公告)号：US5619103A
公开(公告)日：1997-04-08
申请号：US486917
申请日：1995-06-07
申请人： Jeffrey A. Tobin , Guifang Li
发明人： Jeffrey A. Tobin , Guifang Li
CPC分类号： H01J37/321 , H01J65/048
摘要： A broad area plasma lighting device in which a sealed gas envelope placed adjacent to a planar inductive coupling structure generates visible light. Representative planar inductive coupling structures include a planar spiral coil and a parallel conductor coupling structure. According to the invention, a parallel conductor coupling structure has two basic forms: separate parallel conductors each driven by its own generator/tuning circuit, or single conductor such as a flattened helix or series of square coils driven by one generator/tuning circuit. In addition, a plasma generating device having one or more parallel conductor inductive coupling structures is described. The resulting plasma generator can be used in such applications as plasma processing and inductive plasma lighting.
摘要翻译： 一种广泛的等离子体照明装置，其中与平面感应耦合结构相邻放置的密封气体封套产生可见光。 代表性的平面感应耦合结构包括平面螺旋线圈和平行导体耦合结构。 根据本发明，并联导体耦合结构具有两种基本形式：每个由其自身的发电机/调谐电路驱动的单独的并联导体，或由一个发电机/调谐电路驱动的扁平螺旋或一系列方形线圈的单导体。 此外，描述了具有一个或多个平行导体感应耦合结构的等离子体产生装置。 所得到的等离子体发生器可用于等离子体处理和感应等离子体照明等应用。
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公开(公告)号：US5304255A
公开(公告)日：1994-04-19
申请号：US955
申请日：1993-01-05
申请人： Guifang Li , Jeffrey A. Tobin , Denice D. Denton
发明人： Guifang Li , Jeffrey A. Tobin , Denice D. Denton
IPC分类号： C08J7/00 , C09K11/06 , C23C16/505 , H01L31/052 , H01L31/055
CPC分类号： C23C16/505 , H01L31/055 , B05D1/62 , Y02E10/52
摘要： Plasma polymerized organic films deposited on a substrate exhibit broad bandwidth photoluminescence after excitation with blue, violet, or ultraviolet light. The photoluminescent properties of such organic films may be exploited by using such films as wavelength transformers for photovoltaic materials, as organic solid-state gain media, as process quality control tools, and as color-correcting coatings for fluorescent lamps.
摘要翻译： 沉积在基板上的等离子体聚合的有机膜在用蓝色，紫色或紫外光激发后表现出宽带宽的光致发光。 这种有机膜的光致发光性能可以通过使用诸如作为光电材料的波长变换器，作为有机固态增益介质，作为工艺质量控制工具以及用作荧光灯的颜色校正涂层的膜来利用。
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4.发明授权公开(公告)号：US06200412B1
公开(公告)日：2001-03-13
申请号：US08602641
申请日：1996-02-16
申请人： Michael D. Kilgore , Wilbert G. M. van den Hoek , Christopher J. Rau , Bart J. van Schravendijk , Jeffrey A. Tobin , Thomas W. Mountsier , James C. Oswalt
发明人： Michael D. Kilgore , Wilbert G. M. van den Hoek , Christopher J. Rau , Bart J. van Schravendijk , Jeffrey A. Tobin , Thomas W. Mountsier , James C. Oswalt
IPC分类号： B65C326
CPC分类号： H01J37/32862 , C23C16/4405 , H01J37/3244 , Y10S156/916
摘要： A plasma-enhanced chemical vapor deposition system includes a number of process gas injection tubes and at least one dedicated clean gas injection tube. A plasma is used to periodically clean the interior surfaces of the deposition chamber. The cleaning is made more rapid and effective by introducing the clean gas through the dedicated clean gas injection tube. In this manner the clean gas can be introduced at a relatively high flow rate without detracting from the cleaning of the interior surfaces of the process gas injection tubes. As a separate aspect of this invention, a high-frequency signal is applied to both terminals of the coil during the cleaning process. This produces a plasma, mainly by capacitive coupling, which has a shape and uniformity that are well-suited to cleaning the surfaces of the deposition chamber.
摘要翻译： 等离子体增强化学气相沉积系统包括多个工艺气体注入管和至少一个专用清洁气体注入管。 使用等离子体来周期性地清洁沉积室的内表面。 通过引入清洁气体通过专用的清洁气体注入管，清洁更加快速和有效。 以这种方式，可以以相对较高的流速引入清洁气体，而不会降低工艺气体注入管的内表面的清洁。 作为本发明的另一方面，在清洁过程中将高频信号施加到线圈的两个端子。 这产生主要通过电容耦合的等离子体，其具有非常适合于清洁沉积室的表面的形状和均匀性。
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公开(公告)号：US5217749A
公开(公告)日：1993-06-08
申请号：US765077
申请日：1991-09-24
申请人： Denice D. Denton , Jeffrey A. Tobin
发明人： Denice D. Denton , Jeffrey A. Tobin
CPC分类号： B05D1/62 , G02B6/1221 , B05D2502/00 , Y10T428/265
摘要： A method is disclosed for the deposition of plasma films in which the optical index of refraction of the deposited film can be varied continuously or discontinuously as the material is deposited. The change in refractive index is accomplished by changing the input power applied to the plasma chamber. The method can be used to create optical wave guides from material of a single input monomer vapor.
摘要翻译： 公开了一种用于沉积等离子体膜的方法，其中沉积膜的光学折射率可以随着材料沉积而连续地或不连续地变化。 通过改变施加到等离子体室的输入功率来实现折射率的变化。 该方法可用于从单一输入单体蒸气的材料产生光波导。
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6.发明授权Apparatus and method for physical vapor deposition using an open top hollow cathode magnetron 有权使用开顶空心阴极磁控管进行物理气相沉积的装置和方法公开(公告)号：US06613199B1
公开(公告)日：2003-09-02
申请号：US10033165
申请日：2001-10-25
IPC分类号： C23C1435
CPC分类号： H01J37/3405
摘要： A hollow cathode magnetron comprises an open top target within a hollow cathode. The open top target can be biased to a negative potential so as to form an electric field within the cathode to generate a plasma. The magnetron uses at least one electromagnetic coil to shape and maintain a density of the plasma within the cathode. The magnetron also has an anode located beneath the cathode. The open top target can have one of several different geometries including flat annular, conical and cylindrical, etc.
摘要翻译： 空心阴极磁控管包括空心阴极内的开放顶部靶。 敞开的顶部靶可以被偏压到负电位，以便在阴极内形成电场以产生等离子体。 磁控管使用至少一个电磁线圈来形成并保持阴极内的等离子体的密度。 磁控管还具有位于阴极下方的阳极。 敞开的顶部目标可以具有几种不同的几何形状之一，包括平的环形，圆锥形和圆柱形等。
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公开(公告)号：US5511143A
公开(公告)日：1996-04-23
申请号：US195742
申请日：1994-02-14
申请人： Denice D. Denton , Jeffrey A. Tobin
发明人： Denice D. Denton , Jeffrey A. Tobin
CPC分类号： B05D1/62 , G02B6/1221 , B05D2502/00 , Y10T428/265
摘要： A method is disclosed for the deposition of plasma films in which the optical index of refraction of the deposited film can be varied continuously or discontinuously as the material is deposited. The change in refractive index is accomplished by changing the input power applied to the plasma chamber. The method can be used to create optical wave guides from material of a single input monomer vapor.
摘要翻译： 公开了一种用于沉积等离子体膜的方法，其中沉积膜的光学折射率可以随着材料沉积而连续地或不连续地变化。 通过改变施加到等离子体室的输入功率来实现折射率的变化。 该方法可用于从单一输入单体蒸气的材料产生光波导。
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