公开(公告)号：US20150259797A1

公开(公告)日：2015-09-17

申请号：US14316388

申请日：2014-06-26

申请人： Jiangsu Nata Opto-electronic Material Co., Ltd.

发明人： Bao-Yuan LU ,  Ping LU ,  Yi-Jing SHAN ,  Bin SHEN ,  Shuen-Ta TENG

IPC分类号： C23C16/455 ,  F16K11/00 ,  C23C16/18 ,  F17D3/00

CPC分类号： C23C16/18 ,  C23C16/303 ,  C23C16/448 ,  C23C16/45561 ,  F17D3/00 ,  G05D9/12 ,  Y10T137/7287 ,  Y10T137/86493

摘要： Disclosed is a liquid-metal organic compound supply system which is applicable to a metal organic chemical vapor deposition (MOVCD) processing apparatus, including disposing a first bottle body in a thermostat, a second bottle body and a three-way valve in room temperature. Wherein a first connecting end of the three-way valve and a first outlet pipe of the first bottle body connect to the MOVCD processing apparatus, a second connecting end connects to a second inlet pipe of the second bottle body and a third connecting end connects to a first inlet pipe of the first bottle body and a second outlet pipe of the second bottle body. When the present invention is applied to the MOCVD manufacturing process, it prolongs usage period of trimethyl gallium, decreases replacement frequency and increases utilization ratio. Besides, the present invention also decreases the manufacturing and packing costs of trimethyl gallium.

摘要翻译： 公开了一种适用于金属有机化学气相沉积（MOVCD）处理设备的液态金属有机化合物供应系统，包括在室温下将第一瓶体置于恒温器，第二瓶体和三通阀中。 其中三通阀的第一连接端和第一瓶体的第一出口管连接到MOVCD处理装置，第二连接端连接到第二瓶体的第二入口管，第三连接端连接到 第一瓶体的第一入口管和第二瓶体的第二出口管。 当本发明应用于MOCVD制造工艺时，其延长了三甲基镓的使用时间，降低了更换频率并提高了利用率。 此外，本发明还降低了三甲基镓的制造和包装成本。