公开(公告)号：US08409947B2

公开(公告)日：2013-04-02

申请号：US12693080

申请日：2010-01-25

申请人： Jin-bum Kim ,  Wook-je Kim ,  Yu-gyun Shin ,  Kwan-heum Lee ,  Sun-ghil Lee

发明人： Jin-bum Kim ,  Wook-je Kim ,  Yu-gyun Shin ,  Kwan-heum Lee ,  Sun-ghil Lee

IPC分类号： H01L21/8238

CPC分类号： H01L29/7848 ,  H01L21/26513 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/823871 ,  H01L29/165 ,  H01L29/66628 ,  H01L29/66636

摘要： Provided is a simplified method of manufacturing a semiconductor device having a stress creating layer. A first conductive first impurity region is formed on a semiconductor substrate on both sides of a first gate of a first area of the semiconductor substrate, and a second conductive second impurity region is formed on the semiconductor substrate on both sides of a second gate of a second area. First and second spacers are formed on sidewalls of the first and second gates, respectively. First and second semiconductor layers are formed in portions of the semiconductor substrate so as to contact the first and second impurity regions, respectively. The second semiconductor layer is removed. First and second barrier layers are formed in the first and second contact holes of the insulation layer, respectively.

摘要翻译： 提供了一种制造具有应力产生层的半导体器件的简化方法。 在半导体衬底的第一区域的第一栅极的两侧上的半导体衬底上形成第一导电第一杂质区，并且在半导体衬底的第二栅极的两侧的半导体衬底上形成第二导电第二杂质区 第二区。 第一和第二间隔物分别形成在第一和第二栅极的侧壁上。 第一半导体层和第二半导体层分别形成在半导体衬底的部分中，以分别接触第一和第二杂质区。 去除第二半导体层。 第一和第二阻挡层分别形成在绝缘层的第一和第二接触孔中。

公开(公告)号：US08361860B2

公开(公告)日：2013-01-29

申请号：US12656130

申请日：2010-01-19

申请人： Jin-bum Kim ,  Wook-je Kim ,  Kwan-heum Lee ,  Yu-gyun Shin ,  Sun-ghil Lee

发明人： Jin-bum Kim ,  Wook-je Kim ,  Kwan-heum Lee ,  Yu-gyun Shin ,  Sun-ghil Lee

IPC分类号： H01L21/8242

CPC分类号： H01L21/7687 ,  H01L27/10855 ,  H01L28/91

摘要： A method of manufacturing a semiconductor device may include forming a first interlayer insulation layer on a substrate including at least one gate structure formed thereon, the substrate having a plurality of source/drain regions formed on both sides of the at least one gate structure, forming at least one buried contact plug on at least one of the plurality of source/drain regions and in the first interlayer insulation layer, forming a second interlayer insulation layer on the first interlayer insulation layer and the at least one buried contact plug, exposing the at least one buried contact plug in the second interlayer insulation layer by forming at least one contact hole, implanting ions in the at least one contact hole in order to create an amorphous upper portion of the at least one buried contact plug, depositing a lower electrode layer on the second interlayer insulation layer and the at least one contact hole, and forming a metal silicide layer in the amorphous upper portion of the at least one buried contact plug.

摘要翻译： 制造半导体器件的方法可以包括在包括形成在其上的至少一个栅极结构的衬底上形成第一层间绝缘层，所述衬底具有形成在所述至少一个栅极结构的两侧上的多个源/漏区，形成 在所述多个源极/漏极区域和所述第一层间绝缘层中的至少一个上的至少一个埋置的接触插塞，在所述第一层间绝缘层和所述至少一个埋置的接触插塞上形成第二层间绝缘层， 通过形成至少一个接触孔，在所述至少一个接触孔中注入离子，以形成所述至少一个埋入接触插塞的非晶体上部，沉积下部电极层 在所述第二层间绝缘层和所述至少一个接触孔上，并且在所述非晶体上部形成金属硅化物层 的所述至少一个埋入式接触插塞。

公开(公告)号：US20100330758A1

公开(公告)日：2010-12-30

申请号：US12656130

申请日：2010-01-19

申请人： Jin-bum Kim ,  Wook-je Kim ,  Kwan-heum Lee ,  Yu-gyun Shin ,  Sun-ghil Lee

发明人： Jin-bum Kim ,  Wook-je Kim ,  Kwan-heum Lee ,  Yu-gyun Shin ,  Sun-ghil Lee

IPC分类号： H01L21/8242 ,  H01L21/283

CPC分类号： H01L21/7687 ,  H01L27/10855 ,  H01L28/91

摘要： A method of manufacturing a semiconductor device may include forming a first interlayer insulation layer on a substrate including at least one gate structure formed thereon, the substrate having a plurality of source/drain regions formed on both sides of the at least one gate structure, forming at least one buried contact plug on at least one of the plurality of source/drain regions and in the first interlayer insulation layer, forming a second interlayer insulation layer on the first interlayer insulation layer and the at least one buried contact plug, exposing the at least one buried contact plug in the second interlayer insulation layer by forming at least one contact hole, implanting ions in the at least one contact hole in order to create an amorphous upper portion of the at least one buried contact plug, depositing a lower electrode layer on the second interlayer insulation layer and the at least one contact hole, and forming a metal silicide layer in the amorphous upper portion of the at least one buried contact plug.

摘要翻译： 制造半导体器件的方法可以包括在包括形成在其上的至少一个栅极结构的衬底上形成第一层间绝缘层，所述衬底具有形成在所述至少一个栅极结构的两侧上的多个源/漏区，形成 在所述多个源极/漏极区域和所述第一层间绝缘层中的至少一个上的至少一个埋置的接触插塞，在所述第一层间绝缘层和所述至少一个埋置的接触插塞上形成第二层间绝缘层， 通过形成至少一个接触孔，在所述至少一个接触孔中注入离子，以形成所述至少一个埋入接触插塞的非晶体上部，沉积下部电极层 在所述第二层间绝缘层和所述至少一个接触孔上，并且在所述非晶体上部形成金属硅化物层 的所述至少一个埋入式接触插塞。

公开(公告)号：US20100197092A1

公开(公告)日：2010-08-05

申请号：US12693080

申请日：2010-01-25

申请人： Jin-bum Kim ,  Wook-je Kim ,  Yu-gyun Shin ,  Kwan-heum Lee ,  Sun-Ghil Lee

发明人： Jin-bum Kim ,  Wook-je Kim ,  Yu-gyun Shin ,  Kwan-heum Lee ,  Sun-Ghil Lee

IPC分类号： H01L21/8238 ,  H01L21/20

CPC分类号： H01L29/7848 ,  H01L21/26513 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/823871 ,  H01L29/165 ,  H01L29/66628 ,  H01L29/66636

摘要： Provided is a simplified method of manufacturing a semiconductor device having a stress creating layer. A first conductive first impurity region is formed on a semiconductor substrate on both sides of a first gate of a first area of the semiconductor substrate, and a second conductive second impurity region is formed on the semiconductor substrate on both sides of a second gate of a second area. First and second spacers are formed on sidewalls of the first and second gates, respectively. First and second semiconductor layers are formed in portions of the semiconductor substrate so as to contact the first and second impurity regions, respectively. The second semiconductor layer is removed. First and second barrier layers are formed in the first and second contact holes of the insulation layer, respectively.

摘要翻译： 提供了一种制造具有应力产生层的半导体器件的简化方法。 在半导体衬底的第一区域的第一栅极的两侧上的半导体衬底上形成第一导电第一杂质区，并且在半导体衬底的第二栅极的两侧的半导体衬底上形成第二导电第二杂质区 第二区。 第一和第二间隔物分别形成在第一和第二栅极的侧壁上。 第一半导体层和第二半导体层分别形成在半导体衬底的部分中，以分别接触第一和第二杂质区。 去除第二半导体层。 第一和第二阻挡层分别形成在绝缘层的第一和第二接触孔中。

公开(公告)号：US20160027875A1

公开(公告)日：2016-01-28

申请号：US14680458

申请日：2015-04-07

申请人： Seok-hoon Kim ,  Jin-bum Kim ,  Kwan-heum Lee ,  Byeong-chan Lee ,  Cho-eun Lee ,  Su-jin Jung

发明人： Seok-hoon Kim ,  Jin-bum Kim ,  Kwan-heum Lee ,  Byeong-chan Lee ,  Cho-eun Lee ,  Su-jin Jung

IPC分类号： H01L29/10 ,  H01L29/78

CPC分类号： H01L29/7848 ,  H01L21/02236 ,  H01L21/02255 ,  H01L21/02532 ,  H01L21/02636 ,  H01L21/823431 ,  H01L21/823821 ,  H01L27/0886 ,  H01L27/0924 ,  H01L29/0649 ,  H01L29/1033 ,  H01L29/1054 ,  H01L29/165 ,  H01L29/41791 ,  H01L29/66795 ,  H01L29/7831 ,  H01L29/785 ,  H01L29/7851 ,  H01L29/7856

摘要： Semiconductor devices include a strain-inducing layer capable of applying a strain to a channel region of a transistor included in a miniaturized electronic device, and a method of manufacturing the semiconductor device. The semiconductor device includes a substrate having a channel region; a pair of source/drain regions provided on the substrate and arranged on both sides of the channel region in a first direction; and a gate structure provided on the channel region and comprising a gate electrode pattern extending in a second direction that is different from the first direction, a gate dielectric layer disposed between the channel region and the gate electrode pattern, and a gate spacer covering respective lateral surfaces of the gate electrode pattern and the gate dielectric layer. At least one of the source/drain regions includes a first strain-inducing layer and a second strain-inducing layer. The first strain-inducing layer is disposed between a lateral surface of the channel region and the second strain-inducing layer and contacts at least a portion of the gate dielectric layer.

摘要翻译： 半导体器件包括能够对包括在小型化电子器件中的晶体管的沟道区域施加应变的应变诱导层以及半导体器件的制造方法。 半导体器件包括具有沟道区的衬底; 一对源极/漏极区，设置在所述衬底上并沿第一方向布置在所述沟道区的两侧; 以及栅极结构，设置在所述沟道区上并且包括在与所述第一方向不同的第二方向上延伸的栅极电极图案，设置在所述沟道区域和所述栅极电极图案之间的栅极介电层以及覆盖相应侧面的栅极间隔件 栅电极图案和栅介质层的表面。 源极/漏极区域中的至少一个包括第一应变诱导层和第二应变诱导层。 第一应变诱导层设置在沟道区的侧表面和第二应变诱导层之间，并与栅介质层的至少一部分接触。

公开(公告)号：US09397219B2

公开(公告)日：2016-07-19

申请号：US14680458

申请日：2015-04-07

申请人： Seok-hoon Kim ,  Jin-bum Kim ,  Kwan-heum Lee ,  Byeong-chan Lee ,  Cho-eun Lee ,  Su-jin Jung

发明人： Seok-hoon Kim ,  Jin-bum Kim ,  Kwan-heum Lee ,  Byeong-chan Lee ,  Cho-eun Lee ,  Su-jin Jung

IPC分类号： H01L21/302 ,  H01L21/461 ,  H01L29/78 ,  H01L29/165

CPC分类号： H01L29/7848 ,  H01L21/02236 ,  H01L21/02255 ,  H01L21/02532 ,  H01L21/02636 ,  H01L21/823431 ,  H01L21/823821 ,  H01L27/0886 ,  H01L27/0924 ,  H01L29/0649 ,  H01L29/1033 ,  H01L29/1054 ,  H01L29/165 ,  H01L29/41791 ,  H01L29/66795 ,  H01L29/7831 ,  H01L29/785 ,  H01L29/7851 ,  H01L29/7856

摘要： Semiconductor devices include a strain-inducing layer capable of applying a strain to a channel region of a transistor included in the device, and a method of manufacturing the device. The semiconductor device includes a substrate having a channel region; a pair of source/drain regions provided on the substrate and arranged on both sides of the channel region in a first direction; and a gate structure provided on the channel region. The gate structure includes a gate electrode pattern extending in a second direction that is different from the first direction, a gate dielectric layer between the channel region and the gate electrode pattern, and a gate spacer covering respective lateral surfaces of the gate electrode pattern and the gate dielectric layer. At least one of the source/drain regions includes a first strain-inducing layer and a second strain-inducing layer. The first strain-inducing layer is disposed between a lateral surface of the channel region and the second strain-inducing layer and contacts at least a portion of the gate dielectric layer.

摘要翻译： 半导体器件包括能够对包括在器件中的晶体管的沟道区域施加应变的应变诱导层以及该器件的制造方法。 半导体器件包括具有沟道区的衬底; 一对源极/漏极区，设置在所述衬底上并且沿着第一方向布置在所述沟道区的两侧; 以及设置在通道区域上的栅极结构。 栅极结构包括沿与第一方向不同的第二方向延伸的栅极电极图案，沟道区域和栅电极图案之间的栅极介电层以及覆盖栅电极图案的各个侧表面的栅极间隔 栅介质层。 源极/漏极区域中的至少一个包括第一应变诱导层和第二应变诱导层。 第一应变诱导层设置在沟道区的侧表面和第二应变诱导层之间，并与栅介质层的至少一部分接触。