公开(公告)号：US08310785B1

公开(公告)日：2012-11-13

申请号：US13372316

申请日：2012-02-13

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49041

摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PRM head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a hard mask layer adjacent to the first portion of the at least one side of the PMR pole.

摘要翻译： 垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分 侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PRM头还包括围绕PMR极的底部和至少一个侧面的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层以及邻近PMR极的硬掩模层 PMR极点的至少一侧的第一部分。

公开(公告)号：US08136225B1

公开(公告)日：2012-03-20

申请号：US12121624

申请日：2008-05-15

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49041

摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The method further include providing a hard mask layer on the mask and removing the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.

摘要翻译： 公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。 该方法和系统包括在中间层上提供包括线的掩模。 该方法还包括在掩模上提供硬掩模层并去除线。 因此，提供了对应于该线的硬掩模中的孔。 该方法和系统还包括在孔下方的中间层中形成沟槽。 沟槽的底部和顶部宽于底部。 该方法还包括提供PMR极，其至少一部分位于沟槽中。

公开(公告)号：US08284517B1

公开(公告)日：2012-10-09

申请号：US13372775

申请日：2012-02-14

申请人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

发明人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49041

摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PMR head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a planarization stop layer adjacent to the first portion of the at least one side of the PMR pole.

摘要翻译： 垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分 侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PMR头还包括围绕PMR极的底部和至少一侧的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层和与PMR极的相邻的平坦化停止层 PMR极点的至少一侧的第一部分。

公开(公告)号：US08136224B1

公开(公告)日：2012-03-20

申请号：US12121540

申请日：2008-05-15

申请人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

发明人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49041

摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The line has at least one side, a top, and a bottom. The side(s) have an undercut such that the top of the line is wider than the bottom. The method further include providing a hard mask on the PMR transducer. The hard mask includes an aperture corresponding to the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.

摘要翻译： 公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。 该方法和系统包括在中间层上提供包括线的掩模。 该线至少有一边，顶部和底部。 侧面具有底切，使得线的顶部比底部更宽。 该方法还包括在PMR传感器上提供硬掩模。 硬掩模包括对应于该线的孔。 因此，提供了对应于该线的硬掩模中的孔。 该方法和系统还包括在孔下方的中间层中形成沟槽。 沟槽的底部和顶部宽于底部。 该方法还包括提供PMR极，其至少一部分位于沟槽中。

公开(公告)号：US08649123B1

公开(公告)日：2014-02-11

申请号：US12324519

申请日：2008-11-26

申请人： Jinqiu Zhang ,  Hai Sun ,  Hongping Yuan ,  Tsung Yuan Chen

发明人： Jinqiu Zhang ,  Hai Sun ,  Hongping Yuan ,  Tsung Yuan Chen

IPC分类号： G11B5/31

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A method for providing a perpendicular magnetic recording (PMR) head is disclosed. The method comprises: providing an insulating layer; covering the insulating layer with a hard mask material; forming a pre-defined shape in the hard mask material; forming a pole trench and a yoke area in the insulating layer by a first reactive ion etching (RIE) process in which the yoke area includes a loading prevention pattern; performing a wet etching process to remove the hard mask material from the pole trench and the yoke area; performing a second RIE process to remove the loading prevention pattern of the yoke area, wherein the pole trench and the remainder of the yoke area are not removed and remain having similar side wall angles; and providing a PMR pole in which at least a portion of the PMR pole resides in the pole trench.

摘要翻译： 公开了一种用于提供垂直磁记录（PMR）头的方法。 该方法包括：提供绝缘层; 用硬掩模材料覆盖绝缘层; 在硬掩模材料中形成预定形状; 通过第一反应离子蚀刻（RIE）工艺在绝缘层中形成极沟和轭区，其中轭区包括负载防止图案; 执行湿蚀刻工艺以从磁极沟槽和磁轭区域去除硬掩模材料; 执行第二RIE处理以去除轭区域的负载防止图案，其中极沟槽和轭区域的其余部分不被去除并保持具有相似的侧壁角度; 以及提供PMR极，其中PMR极的至少一部分位于极沟中。

公开(公告)号：US08334093B2

公开(公告)日：2012-12-18

申请号：US12262572

申请日：2008-10-31

申请人： Jinqiu Zhang ,  Hai Sun ,  Hongping Yuan ,  Tsung Yuan Chen ,  Guanxiong Li

发明人： Jinqiu Zhang ,  Hai Sun ,  Hongping Yuan ,  Tsung Yuan Chen ,  Guanxiong Li

IPC分类号： H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49041

摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask on the intermediate layer. The mask includes a line having at least one side. A hard mask layer is provided on the mask. At least a portion of the hard mask layer resides on the side(s) of the line. At least part of the hard mask layer on the side(s) of the line is removed. Thus, at least a portion of the line is exposed. The line is then removed, providing an aperture in the hard mask corresponding to the line. The method also includes forming a trench in the intermediate layer under the aperture. The trench top is wider than its bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.

摘要翻译： 公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。 该方法和系统包括在中间层上提供掩模。 掩模包括具有至少一个侧面的线。 在掩模上设置硬掩模层。 硬掩模层的至少一部分位于线的一侧。 除去线的侧面上的硬掩模层的至少一部分。 因此，线的至少一部分被暴露。 然后去除线，在对应于线的硬掩模中提供孔。 该方法还包括在孔下方的中间层中形成沟槽。 沟槽顶部比底部宽。 该方法还包括提供PMR极，其至少一部分位于沟槽中。

公开(公告)号：US08793866B1

公开(公告)日：2014-08-05

申请号：US11960596

申请日：2007-12-19

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Yizhong Wang ,  Hai Sun ,  Li He

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Yizhong Wang ,  Hai Sun ,  Li He

IPC分类号： G11B5/187 ,  C23C14/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

摘要： A method provides a PMR transducer. In one aspect, the method includes forming a trench in an intermediate layer using reactive ion etch(es). The trench top is wider than its bottom. In this aspect, the method also includes providing a seed layer using atomic layer deposition and providing a PMR pole on the seed layer. Portion(s) of the seed layer and PMR pole reside in the trench. In another aspect, the method includes providing a mask including a trench having a top wider than its bottom. In this aspect, the method includes providing mask material in the trench, providing an intermediate layer on the mask material and removing the mask material to provide another trench in the intermediate layer. In this aspect, the method also includes providing a PMR pole in the additional trench.

摘要翻译： 一种方法提供PMR换能器。 一方面，该方法包括使用反应离子蚀刻在中间层中形成沟槽。 沟槽顶部比底部宽。 在这方面，该方法还包括使用原子层沉积提供种子层并在种子层上提供PMR极点。 种子层和PMR极的部分位于沟槽中。 在另一方面，该方法包括提供一种掩模，该掩模包括具有比其底部更宽的顶部的沟槽。 在这方面，该方法包括在沟槽中提供掩模材料，在掩模材料上提供中间层并去除掩模材料以在中间层中提供另一个沟槽。 在这方面，该方法还包括在附加沟槽中提供PMR极点。

公开(公告)号：US08166632B1

公开(公告)日：2012-05-01

申请号：US12057611

申请日：2008-03-28

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Donghong Li

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Donghong Li

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for providing a PMR transducer including an intermediate layer. The method and system include providing a hard mask layer on the intermediate layer. The hard mask layer is for a reactive ion etch of the intermediate layer. The method and system also include providing a bottom antireflective coating (BARC) layer on the hard mask layer. The BARC layer is also a masking layer for the hard mask layer. The method and system also include forming a trench in the intermediate layer using at least one reactive ion etch (RIE). The trench has a bottom and a top wider than the bottom. The method and system also include providing a PMR pole. At least a portion of the PMR pole resides in the trench.

摘要翻译： 一种用于提供包括中间层的PMR换能器的方法和系统。 该方法和系统包括在中间层上提供硬掩模层。 硬掩模层用于中间层的反应离子蚀刻。 该方法和系统还包括在硬掩模层上提供底部抗反射涂层（BARC）层。 BARC层也是硬掩模层的掩模层。 该方法和系统还包括使用至少一个反应离子蚀刻（RIE）在中间层中形成沟槽。 沟槽的底部和顶部宽于底部。 该方法和系统还包括提供PMR极点。 PMR极的至少一部分位于沟槽中。

公开(公告)号：US08018678B1

公开(公告)日：2011-09-13

申请号：US12324442

申请日：2008-11-26

申请人： Jinqiu Zhang ,  Tsung Yuan Chen ,  Steven C. Rudy

发明人： Jinqiu Zhang ,  Tsung Yuan Chen ,  Steven C. Rudy

IPC分类号： G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/3169

摘要： A method for providing a perpendicular magnetic recording (PMR) head is disclosed. The method comprises: providing a stop layer; providing an insulating layer over the stop layer; forming a pole trench in the insulating layer by performing a reactive ion etching (RIE) process in the insulating layer over the stop layer; forming an electronic lapping guide (ELG) in the insulating layer by performing the RIE process in the insulating layer over the stop layer; and providing a PMR pole in which at least a portion of the PMR pole resides in the pole trench.

摘要翻译： 公开了一种用于提供垂直磁记录（PMR）头的方法。 该方法包括：提供停止层; 在停止层上提供绝缘层; 通过在所述绝缘层上在停止层上进行反应离子蚀刻（RIE）工艺，在所述绝缘层中形成极沟槽; 通过在所述阻挡层上的所述绝缘层中进行RIE处理，在所述绝缘层中形成电子研磨导向器（ELG）; 以及提供PMR极，其中PMR极的至少一部分位于极沟中。

公开(公告)号：US08277669B1

公开(公告)日：2012-10-02

申请号：US12643954

申请日：2009-12-21

申请人： Tsung Yuan Chen ,  Yimin Guo ,  Jinqiu Zhang ,  Ut Tran

发明人： Tsung Yuan Chen ,  Yimin Guo ,  Jinqiu Zhang ,  Ut Tran

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49046

摘要： A method and system for providing a pole of magnetic transducer having an air-bearing surface (ABS) are described. Leading shield and planarization stop layers are provided. Portions of the planarization stop and shield layers distal from the ABS location are removed, providing a depression forming a bevel. The bevel has an angle greater than zero and less than ninety degrees. An intermediate layer having a top surface substantially perpendicular to the ABS location is provided. Part of the intermediate layer is removed, forming a trench having a bottom corresponding to the leading shield and a location and profile corresponding to the pole. A nonmagnetic layer is provided at least partially in the trench. The pole with a leading edge bevel corresponding to the bevel is provided in the trench. A capping layer covering the pole is provided, at least part of the intermediate layer removed, and a wrap-around shield provided.

摘要翻译： 描述了一种用于提供具有空气轴承表面（ABS）的磁换能器极的方法和系统。 提供了领先的屏蔽和平坦化停止层。 除去远离ABS位置的平坦化停止和屏蔽层的部分，提供形成斜面的凹陷。 斜面角度大于零，小于九十度。 提供具有基本上垂直于ABS位置的顶表面的中间层。 中间层的一部分被去除，形成具有对应于前屏蔽的底部的沟槽和对应于极的位置和轮廓。 至少部分地在沟槽中提供非磁性层。 在沟槽中设置有与斜面相对应的前缘斜面的极。 提供覆盖极的覆盖层，去除中间层的至少一部分和设置的环绕护罩。