公开(公告)号：US08793866B1

公开(公告)日：2014-08-05

申请号：US11960596

申请日：2007-12-19

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Yizhong Wang ,  Hai Sun ,  Li He

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Yizhong Wang ,  Hai Sun ,  Li He

IPC分类号： G11B5/187 ,  C23C14/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

摘要： A method provides a PMR transducer. In one aspect, the method includes forming a trench in an intermediate layer using reactive ion etch(es). The trench top is wider than its bottom. In this aspect, the method also includes providing a seed layer using atomic layer deposition and providing a PMR pole on the seed layer. Portion(s) of the seed layer and PMR pole reside in the trench. In another aspect, the method includes providing a mask including a trench having a top wider than its bottom. In this aspect, the method includes providing mask material in the trench, providing an intermediate layer on the mask material and removing the mask material to provide another trench in the intermediate layer. In this aspect, the method also includes providing a PMR pole in the additional trench.

摘要翻译： 一种方法提供PMR换能器。 一方面，该方法包括使用反应离子蚀刻在中间层中形成沟槽。 沟槽顶部比底部宽。 在这方面，该方法还包括使用原子层沉积提供种子层并在种子层上提供PMR极点。 种子层和PMR极的部分位于沟槽中。 在另一方面，该方法包括提供一种掩模，该掩模包括具有比其底部更宽的顶部的沟槽。 在这方面，该方法包括在沟槽中提供掩模材料，在掩模材料上提供中间层并去除掩模材料以在中间层中提供另一个沟槽。 在这方面，该方法还包括在附加沟槽中提供PMR极点。

公开(公告)号：US08284517B1

公开(公告)日：2012-10-09

申请号：US13372775

申请日：2012-02-14

申请人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

发明人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49041

摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PMR head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a planarization stop layer adjacent to the first portion of the at least one side of the PMR pole.

摘要翻译： 垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分 侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PMR头还包括围绕PMR极的底部和至少一侧的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层和与PMR极的相邻的平坦化停止层 PMR极点的至少一侧的第一部分。

公开(公告)号：US08136224B1

公开(公告)日：2012-03-20

申请号：US12121540

申请日：2008-05-15

申请人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

发明人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

IPC分类号： G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49041

摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The line has at least one side, a top, and a bottom. The side(s) have an undercut such that the top of the line is wider than the bottom. The method further include providing a hard mask on the PMR transducer. The hard mask includes an aperture corresponding to the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.

摘要翻译： 公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。 该方法和系统包括在中间层上提供包括线的掩模。 该线至少有一边，顶部和底部。 侧面具有底切，使得线的顶部比底部更宽。 该方法还包括在PMR传感器上提供硬掩模。 硬掩模包括对应于该线的孔。 因此，提供了对应于该线的硬掩模中的孔。 该方法和系统还包括在孔下方的中间层中形成沟槽。 沟槽的底部和顶部宽于底部。 该方法还包括提供PMR极，其至少一部分位于沟槽中。

公开(公告)号：US08166632B1

公开(公告)日：2012-05-01

申请号：US12057611

申请日：2008-03-28

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Donghong Li

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Donghong Li

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method and system for providing a PMR transducer including an intermediate layer. The method and system include providing a hard mask layer on the intermediate layer. The hard mask layer is for a reactive ion etch of the intermediate layer. The method and system also include providing a bottom antireflective coating (BARC) layer on the hard mask layer. The BARC layer is also a masking layer for the hard mask layer. The method and system also include forming a trench in the intermediate layer using at least one reactive ion etch (RIE). The trench has a bottom and a top wider than the bottom. The method and system also include providing a PMR pole. At least a portion of the PMR pole resides in the trench.

摘要翻译： 一种用于提供包括中间层的PMR换能器的方法和系统。 该方法和系统包括在中间层上提供硬掩模层。 硬掩模层用于中间层的反应离子蚀刻。 该方法和系统还包括在硬掩模层上提供底部抗反射涂层（BARC）层。 BARC层也是硬掩模层的掩模层。 该方法和系统还包括使用至少一个反应离子蚀刻（RIE）在中间层中形成沟槽。 沟槽的底部和顶部宽于底部。 该方法和系统还包括提供PMR极点。 PMR极的至少一部分位于沟槽中。

公开(公告)号：US08310785B1

公开(公告)日：2012-11-13

申请号：US13372316

申请日：2012-02-13

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49041

摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PRM head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a hard mask layer adjacent to the first portion of the at least one side of the PMR pole.

摘要翻译： 垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分 侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PRM头还包括围绕PMR极的底部和至少一个侧面的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层以及邻近PMR极的硬掩模层 PMR极点的至少一侧的第一部分。

公开(公告)号：US08136225B1

公开(公告)日：2012-03-20

申请号：US12121624

申请日：2008-05-15

申请人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

发明人： Jinqiu Zhang ,  Liubo Hong ,  Yong Shen ,  Hongping Yuan ,  Tsung Yuan Chen ,  Honglin Zhu

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49041

摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The method further include providing a hard mask layer on the mask and removing the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.

摘要翻译： 公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。 该方法和系统包括在中间层上提供包括线的掩模。 该方法还包括在掩模上提供硬掩模层并去除线。 因此，提供了对应于该线的硬掩模中的孔。 该方法和系统还包括在孔下方的中间层中形成沟槽。 沟槽的底部和顶部宽于底部。 该方法还包括提供PMR极，其至少一部分位于沟槽中。

公开(公告)号：US07785666B1

公开(公告)日：2010-08-31

申请号：US11955266

申请日：2007-12-12

申请人： Hai Sun ,  Liubo Hong ,  Hongping Yuan ,  Yizhong Wang ,  Winnie Yu ,  Xianzhong Zeng

发明人： Hai Sun ,  Liubo Hong ,  Hongping Yuan ,  Yizhong Wang ,  Winnie Yu ,  Xianzhong Zeng

IPC分类号： B05D1/32

CPC分类号： G11B5/855 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

摘要： A method and system for fabricating a magnetic recording device are described. The method and system include providing a mask layer on the magnetic recording device and imprinting a pattern in the mask layer to form a mask. The method and system also include transferring the pattern from the mask to the magnetic recording device. In another aspect, the method and system include providing a malleable mask layer on the magnetic recording device. In this aspect, the method and system also include depressing an imprint mask into the mask layer and curing the mask layer while the imprint mask is depressed into the mask layer to provide a mask having a pattern. The pattern may correspond to a read sensor and/or a perpendicular magnetic recording pole. The method and system also include transferring the pattern from the mask to the magnetic recording device.

摘要翻译： 描述了用于制造磁记录装置的方法和系统。 所述方法和系统包括在磁记录装置上设置掩模层并在掩模层中印刷图案以形成掩模。 该方法和系统还包括将图案从掩模转移到磁记录装置。 在另一方面，该方法和系统包括在磁记录装置上提供可延展的掩模层。 在这方面，该方法和系统还包括将印模掩模压入掩模层中并固化掩模层，同时将印模掩模压入掩模层中以提供具有图案的掩模。 图案可以对应于读取传感器和/或垂直磁记录极。 该方法和系统还包括将图案从掩模转移到磁记录装置。

公开(公告)号：US08196285B1

公开(公告)日：2012-06-12

申请号：US12336758

申请日：2008-12-17

申请人： Jinqiu Zhang ,  Liubo Hong

发明人： Jinqiu Zhang ,  Liubo Hong

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49052

摘要： A method and system for providing a PMR pole in a transducer including an intermediate layer are disclosed. A mask including line(s) having side(s) is provided. A hard mask is provided on the mask. Portions of the hard mask reside on the line side(s) and intermediate layer surface. The hard mask includes a wet-etchable layer and a high removal ratio layer on the wet-etchable layer. Part of the hard mask on the side(s) of the line is removed, exposing part of the line. The high removal ratio layer has a low angle removal rate on the line side(s) and a high angle removal rate on the intermediate layer surface. The low angle removal rate is at least four times the high angle removal rate. The line is removed, providing an aperture in the hard mask. A trench is provided in the intermediate layer. A PMR pole is provided.

摘要翻译： 公开了一种用于在包括中间层的换能器中提供PMR极的方法和系统。 提供包括具有侧面的线的面罩。 在面罩上提供硬掩模。 硬掩模的一部分位于线路侧和中间层表面。 硬掩模在湿蚀刻层上包括湿蚀刻层和高去除率层。 线的一侧的硬掩模的一部分被去除，露出部分线。 高去除率层在线路侧具有低角度去除速率和在中间层表面上具有高角度去除速率。 低角度去除率至少是高角度去除率的四倍。 线被去除，在硬掩模中提供孔。 在中间层设置沟槽。 提供PMR极。

公开(公告)号：US08163185B1

公开(公告)日：2012-04-24

申请号：US12059903

申请日：2008-03-31

申请人： Hai Sun ,  Liubo Hong ,  Rowena Schmidt ,  Lijie Zhao ,  Winnie Yu ,  Hongping Yuan

发明人： Hai Sun ,  Liubo Hong ,  Rowena Schmidt ,  Lijie Zhao ,  Winnie Yu ,  Hongping Yuan

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  Y10T29/49032

摘要： A method of lifting off photoresist beneath an overlayer includes providing a structure including photoresist and depositing an overlayer impenetrable to a liftoff solution over the photoresist and a field region around the structure. The method also includes forming a mask over the structure and ion milling to remove the overlayer in the field region not covered by the mask. The method then includes lifting off the photoresist using the liftoff solution.

摘要翻译： 提供覆盖层下面的光致抗蚀剂的方法包括提供包括光致抗蚀剂的结构，以及沉积在光致抗蚀剂上的不透气的覆盖层和围绕结构的场区域的覆盖层。 该方法还包括在结构上形成掩模和离子研磨以去除未被掩模覆盖的场区域中的覆盖层。 该方法然后包括使用提升溶液提取光致抗蚀剂。

公开(公告)号：US08079135B1

公开(公告)日：2011-12-20

申请号：US11955667

申请日：2007-12-13

申请人： Yong Shen ,  Liubo Hong ,  Guanghong Luo ,  Honglin Zhu ,  Lei Wang ,  Yingjian Chen

发明人： Yong Shen ,  Liubo Hong ,  Guanghong Luo ,  Honglin Zhu ,  Lei Wang ,  Yingjian Chen

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for providing a perpendicular magnetic recording (PMR) transducer is described. The PMR transducer provided includes a PMR pole and yoke structure coupled with the PMR pole. The method includes providing a hard mask and an intermediate layer. A first portion of the hard mask resides on the PMR pole. A second portion of the hard mask resides on another structure. The intermediate layer surrounds at least the PMR pole. The method also includes performing a planarization on at least the intermediate layer, removing the first portion of the hard mask on the PMR pole without completely removing the second portion of the hard mask on the other structure. The method further includes removing a remaining portion of the hard mask on the other structure, providing a write gap on the PMR pole, and providing a shield on the write gap.

摘要翻译： 描述了一种用于提供垂直磁记录（PMR）换能器的方法。 提供的PMR传感器包括与PMR极耦合的PMR极和轭结构。 该方法包括提供硬掩模和中间层。 硬掩模的第一部分位于PMR杆上。 硬掩模的第二部分位于另一结构上。 中间层至少包围PMR极。 该方法还包括在至少中间层上执行平面化，在PMR极上去除硬掩模的第一部分，而不必在另一个结构上完全去除硬掩模的第二部分。 该方法还包括移除另一结构上的硬掩模的剩余部分，在PMR极上提供写入间隙，并在写入间隙上提供屏蔽。