公开(公告)号：US20050018160A1

公开(公告)日：2005-01-27

申请号：US10864806

申请日：2004-06-10

申请人： Johannes Adrianus Dams ,  Frank Auer

发明人： Johannes Adrianus Dams ,  Frank Auer

IPC分类号： F16F15/023 ,  F16F15/03 ,  F16F15/04 ,  G03F7/20 ,  H01L21/027 ,  G03B27/42

CPC分类号： F16F15/02 ,  G03F7/70833 ,  G03F7/709 ,  G03F7/70933

摘要： A supporting device for supporting in a lithographic projection apparatus a supported part relative to a supporting part, is presented. The supporting device includes a first part that engages the supporting part of the lithographic projection apparatus; a second part that engages the supported part of the lithographic projection apparatus; a supporting spring system disposed between the first part and the second part; and a position control system configured to control a position of the supported part. The position control system comprises at least one reference object that is movable relative to the supporting part; a reference support device that supports the reference object relative to the first part, wherein the reference object and the reference support device form a reference mass-spring system; at least one position sensor that detects at least one attribute of the position of the second part relative to at least one of the reference objects, the position sensor including a sensor output for outputting a position signal representing at least one of the attributes; and an actuator, communicatively coupled to the position sensor, that is configured to adjust the position of the second part relative to the first part, in response to the position signal.

摘要翻译： 提供了一种用于在光刻投影设备中支撑相对于支撑部件的支撑部件的支撑装置。 支撑装置包括接合光刻投影装置的支撑部分的第一部分; 第二部分，其接合所述光刻投影装置的所述支撑部分; 设置在所述第一部分和所述第二部分之间的支撑弹簧系统; 以及位置控制系统，被配置为控制所述被支撑部件的位置。 位置控制系统包括可相对于支撑部分移动的至少一个参考对象; 参考支撑装置，其相对于所述第一部件支撑所述参考对象，其中所述参考对象和所述参考支撑装置形成参考质量弹簧系统; 至少一个位置传感器，其相对于所述参考对象中的至少一个检测所述第二部分的位置的至少一个属性，所述位置传感器包括用于输出表示所述属性中的至少一个的位置信号的传感器输出; 以及致动器，其通信地耦合到所述位置传感器，所述致动器被配置为响应于所述位置信号而调节所述第二部分相对于所述第一部分的位置。

公开(公告)号：US20060114439A1

公开(公告)日：2006-06-01

申请号：US11000373

申请日：2004-12-01

申请人： Johannes Hendrik Everhardus Muijderman ,  Johannes Adrianus Dams

发明人： Johannes Hendrik Everhardus Muijderman ,  Johannes Adrianus Dams

IPC分类号： G03B27/72

CPC分类号： G03F7/70916 ,  G03F7/70191

摘要： A lithographic apparatus including an illumination system configured to condition a radiation beam is described. The illumination system includes radiation beam uniformity adjuster for adjusting the uniformity of the radiation beam using segments that are at least partly arranged in the radiation beam and that are mounted on a frame by a torsion bar. The device further includes an actuator configured to rotate the segment in order to change the amount of radiation of the radiation beam that is blocked. The device also includes a first magnetic member mounted on the torsion bar configured to co-operate with a second magnetic member mounted on the frame for generating a position dependent torque about the longitudinal axis that is configured to at least partly compensate a torque exerted on the segment by the torsion bar.

摘要翻译： 描述了包括配置成调节辐射束的照明系统的光刻设备。 照明系统包括辐射束均匀性调节器，用于使用至少部分地布置在辐射束中并且由扭杆安装在框架上的段来调节辐射束的均匀性。 该装置还包括致动器，该致动器被配置为使该段旋转以改变被阻挡的辐射束的辐射量。 该装置还包括安装在扭杆上的第一磁性构件，其构造成与安装在框架上的第二磁性构件相配合，用于产生围绕纵向轴线的与位置相关的扭矩，构造成至少部分地补偿施加在 通过扭杆分段。

公开(公告)号：US20050213060A1

公开(公告)日：2005-09-29

申请号：US10807408

申请日：2004-03-24

申请人： Johannes Duisters ,  Johannes Adrianus Dams ,  Wilfred Endendijk

发明人： Johannes Duisters ,  Johannes Adrianus Dams ,  Wilfred Endendijk

IPC分类号： H01L21/027 ,  G02B5/32 ,  G02B27/00 ,  G03F7/20

CPC分类号： G03F7/70933 ,  G02B27/0043 ,  G03F7/70825 ,  G03F7/70983

摘要： A lithographic optical system is presented herein. The optical system comprises a housing with two optically transparent windows and at least one moveable lens therein, as well as at least one other optical element outside said housing. By providing at least one optical element outside the housing, possible deleterious influences thereof on the optical quality of the moveable lens may be diminished. The housing with the moveable lens may be purged, and may be provided with a linear motor and a gas bearing for contactless moving of the lens.

摘要翻译： 本文介绍了光刻光学系统。 光学系统包括具有两个光学透明窗口的壳体和其中的至少一个可移动透镜，以及在所述壳体外部的至少一个其它光学元件。 通过在壳体外部设置至少一个光学元件，可能会对可移动透镜的光学质量产生有害的影响。 具有可移动透镜的壳体可以被清洗，并且可以设置有线性电动机和用于透镜的无接触移动的气体轴承。

公开(公告)号：US20050002008A1

公开(公告)日：2005-01-06

申请号：US10839712

申请日：2004-05-06

申请人： Robrecht Emiel De Weerdt ,  Johannes Adrianus Dams

发明人： Robrecht Emiel De Weerdt ,  Johannes Adrianus Dams

IPC分类号： G03F7/20 ,  H01L21/027 ,  G03B27/58

CPC分类号： H02N15/00 ,  F16C39/063 ,  G03F7/70758

摘要： A lithographic projection apparatus includes a passive magnetic bearing configured to provide support between a first and second part of the lithographic apparatus and allow both parts to be displaced relative to each other in a direction perpendicular to the support direction. The passive magnetic bearing includes first and second magnetic assemblies. Each magnetic assembly includes at least one permanent magnet.

摘要翻译： 光刻投影装置包括被动磁轴承，被配置为在光刻设备的第一和第二部分之间提供支撑，并允许两个部件在垂直于支撑方向的方向上相对于彼此移位。 被动磁轴承包括第一和第二磁性组件。 每个磁性组件包括至少一个永磁体。

公开(公告)号：US20070258069A1

公开(公告)日：2007-11-08

申请号：US11417222

申请日：2006-05-04

申请人： Bastiaan Lambertus Van De Ven ,  Johannes Adrianus Dams ,  Jacob Vink

发明人： Bastiaan Lambertus Van De Ven ,  Johannes Adrianus Dams ,  Jacob Vink

IPC分类号： G03B27/42 ,  G03B27/58

CPC分类号： G03F7/70816 ,  F16C29/025 ,  F16C32/0603

摘要： A gas bearing has a first bearing part defining a first bearing surface and a second bearing part defining a second bearing surface. Between the first bearing surface and the second bearing surface there is a gap. A gas supply device supplies a gas to the gap. The first bearing part is at least partly ferromagnetic, and the second bearing part has at least one permanent magnet interacting with the first bearing part for pre-tensioning the gas bearing. The gas bearing may be part of a lithographic apparatus.

摘要翻译： 气体轴承具有限定第一轴承表面的第一轴承部分和限定第二轴承表面的第二轴承部件。 在第一支承面和第二支承面之间存在间隙。 气体供给装置向间隙供给气体。 第一轴承部分至少部分是铁磁性的，并且第二轴承部分具有与第一轴承部件相互作用的至少一个永磁体，用于预紧气体轴承。 气体轴承可以是光刻设备的一部分。

公开(公告)号：US20060072098A1

公开(公告)日：2006-04-06

申请号：US10957744

申请日：2004-10-05

申请人： Johannes Adrianus Dams

发明人： Johannes Adrianus Dams

IPC分类号： G03B27/58

CPC分类号： G03B27/58 ,  G03F7/70758

摘要： A positioning device for positioning an object table relative to a reference frame with a drive unit including a first part connectable to the reference frame and a second part for holding the object table is described. The drive unit is constructed to displace the object table in a first direction by generating a force in the first direction on the second part, and a torque acting on the second part about an axis substantially perpendicular to the first direction such that the resulting force of the force and the torque is directed substantially through the center of gravity of the assembly including the object table and the second part.

摘要翻译： 描述了一种定位装置，用于通过具有可连接到参考框架的第一部件的驱动单元和用于保持对象工作台的第二部件相对于参考框架定位对象工作台。 驱动单元被构造成通过在第二部分上产生沿第一方向的力和围绕基本上垂直于第一方向的轴线作用在第二部分上的力沿第一方向移动物体台，使得所产生的力 力和扭矩基本上通过包括对象台和第二部件的组件的重心。

公开(公告)号：US20060139617A1

公开(公告)日：2006-06-29

申请号：US11214053

申请日：2005-08-30

申请人： Johannes Adrianus Dams

发明人： Johannes Adrianus Dams

IPC分类号： G03B27/62

CPC分类号： F16C29/025 ,  F16C32/0603 ,  G03F7/70066 ,  G03F7/70816 ,  H02K1/27 ,  H02K41/031 ,  H02K2201/18

摘要： A lithographic apparatus is arranged to transfer a pattern from a patterning device onto a substrate and includes an electromagnetic actuator to actuate a part of the lithographic apparatus in a linear direction or in a rotational direction. The actuator has a substantially stationary part and a movable part interacting with each other. The stationary part has a plurality of coils and a magnetic circuit of magnetizable material, and the movable part has a magnet system. The magnet system has an array of magnets forming a magnet array having opposite ends. The magnet array has an array of primary magnets and an array of subsidiary magnets alternating with the primary magnets. A direction of polarization of an end primary magnet at an end position of the array of primary magnets differs from a direction of polarization of an intermediate primary magnet at an intermediate position between the end primary magnets.

摘要翻译： 光刻设备被布置成将图案从图案形成装置传送到基板上，并且包括电磁致动器，以在线性方向或旋转方向上致动光刻设备的一部分。 致动器具有基本上静止的部分和彼此相互作用的可动部分。 固定部具有多个线圈和可磁化材料的磁路，并且可动部具有磁体系。 磁体系统具有形成具有相对端的磁体阵列的磁体阵列。 磁体阵列具有主磁体阵列和与主磁体交替的辅助磁体阵列。 主磁体阵列的端部位置的端部主要磁体的偏振方向与端子主磁体之间的中间位置处的中间主磁体的偏振方向不同。