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1.发明授权Method and device for measuring thin films and semiconductor substrates using reflection mode geometry 失效使用反射模式几何测量薄膜和半导体衬底的方法和装置公开(公告)号：US06795198B1
公开(公告)日：2004-09-21
申请号：US09087141
申请日：1998-05-28
IPC分类号： G01B902
CPC分类号： G01N21/1717 , G01B11/0666 , G01N29/2418 , G01N2291/0423
摘要： The invention provides both a method and apparatus that measures a property of a structure that includes at least one layer. The apparatus features a laser (e.g., a microchip laser, described below) that generates an optical pulse, and a diffractive mask that receives the optical pulse and diffracts it to generate at least two excitation pulses. An optical system, (e.g., an achromat lens pair) receives the optical pulses and spatially and temporally overlaps them on or in the structure to form an excitation pattern that launches an acoustic wave. The acoustic wave modulates a property of the structure, e.g., it generates a time-dependent “surface ripple” or modulates an optical property such as the sample's refractive index or absorption coefficient. Surface ripple is defined as a time-dependent change in the morphology of the surface; its peak-to-null amplitude is typically a few angstroms or less. The apparatus also includes a light source that produces a probe beam that reflects off the modulated property to generate a signal beam. An optical detection system receives the reflected signal beam and in response generates a light-induced electrical signal. An analyzer analyzes the signal to measure the property of the structure.
摘要翻译： 本发明提供了一种测量包括至少一层的结构的性质的方法和装置。 该装置具有产生光脉冲的激光器（例如，下面描述的微芯片激光器），以及接收光脉冲并衍射以产生至少两个激励脉冲的衍射掩模。 光学系统（例如，消色差透镜对）接收光学脉冲，并且在结构中或结构中空间和时间上重叠它们以形成发射声波的激发图案。 声波调制结构的性质，例如，其产生时间依赖性的“表面纹波”或调制光学特性，例如样品的折射率或吸收系数。 表面波纹定义为表面形态的时间依赖性变化; 其峰到零幅度通常为几埃或更小。 该装置还包括产生探测光束的光源，其反射出调制的特性以产生信号光束。 光学检测系统接收反射的信号光束，并且响应于产生光诱导的电信号。 分析仪分析信号以测量结构的性质。
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公开(公告)号：US5982482A
公开(公告)日：1999-11-09
申请号：US903901
申请日：1997-07-31
申请人： Keith A. Nelson , John A. Rogers
发明人： Keith A. Nelson , John A. Rogers
CPC分类号： G01N29/4427 , G01N29/2418 , G01N2291/011 , G01N2291/015 , G01N2291/0231 , G01N2291/2698
摘要： The invention features a method for detecting a subsurface defect in a thin film structure. The method includes: optically generating an acoustic wave in a first spatial region of the film; optically measuring a time-dependent reflection of the acoustic wave from subsurface features in the film to produce a time-dependent signal; and analyzing the signal to detect an existence of the defect. The optically measuring step can include measuring the diffraction of a probe beam from the reflected acoustic wave. The analyzing step can include comparing the measured signal to a reference signal for defect-free structure.
摘要翻译： 本发明的特征在于一种用于检测薄膜结构中的地下缺陷的方法。 该方法包括：在胶片的第一空间区域中光学地产生声波; 光学地测量来自薄膜中的地下特征的声波的时间依赖性反射以产生时间相关信号; 并分析信号以检测缺陷的存在。 光学测量步骤可以包括测量来自反射声波的探测光束的衍射。 分析步骤可以包括将测量的信号与用于无缺陷结构的参考信号进行比较。
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公开(公告)号：US5812261A
公开(公告)日：1998-09-22
申请号：US783046
申请日：1997-01-15
CPC分类号： G01N21/1702 , G01B11/0666 , G01N21/636 , G01N29/2418 , G01N29/449 , G01N2291/0423 , G01N33/44
摘要： A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the sample's surface by the acoustic waveguide modes. The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes. A thickness of the thin sample is determined by comparing the measured phase velocities or frequencies to the phase velocities or frequencies calculated from a mathematical model.
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4.发明授权Method and device for measuring the thickness of opaque and transparent films 失效用于测量不透明和透明膜厚度的方法和装置公开(公告)号：US06348967B1
公开(公告)日：2002-02-19
申请号：US09568931
申请日：2000-05-11
IPC分类号： G01N2100
CPC分类号： G01N21/1702 , G01B11/0666 , G01N21/636 , G01N29/2418 , G01N29/449 , G01N33/44 , G01N2291/0423
摘要： A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the sample's surface by the acoustic waveguide modes. The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes. A thickness of the thin sample is determined by comparing the measured phase velocities or frequencies to the phase velocities or frequencies calculated from a mathematical model.
摘要翻译： 描述了用于确定薄样品的厚度的方法。 该方法包括利用激发辐射场激发样品中与时间相关的声波导模式的步骤。 通过声波导模式将探针辐射从样品表面感应出的波纹形态衍射出来，来检测声波导模式。 然后分析衍射探针辐射以测量声波导模式的相速度或频率。 通过将测量的相速度或频率与从数学模型计算的相速度或频率进行比较来确定薄样品的厚度。
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公开(公告)号：US06081330A
公开(公告)日：2000-06-27
申请号：US157005
申请日：1998-09-18
CPC分类号： G01N21/1702 , G01B11/0666 , G01N21/636 , G01N29/2418 , G01N29/449 , G01N2291/0423 , G01N33/44
摘要： A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the sample's surface by the acoustic waveguide modes. The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes. A thickness of the thin sample is determined by comparing the measured phase velocities or frequencies to the phase velocities or frequencies calculated from a mathematical model.
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公开(公告)号：US5633711A
公开(公告)日：1997-05-27
申请号：US350378
申请日：1994-12-05
申请人： Keith A. Nelson , Anil R. Duggal , John A. Rogers
发明人： Keith A. Nelson , Anil R. Duggal , John A. Rogers
CPC分类号： G01B11/0666 , G01B11/0675 , G01N21/1717 , G01N21/636 , G01N29/2418 , G01N2291/0235 , G01N2291/02827 , G01N2291/0422 , G01N2291/0423 , G01N33/44
摘要： Samples such as thin polymeric films are analyzed using optically induced phonons by excitation of the sample using radiation preferably absorbed by the sample and probe radiation, preferably not absorbed by the sample, that is diffracted from the surface of the sample. The pulse width of the probe is preferably on the order of the detectable diffraction signal so that the phonon decay from each excitation pulse can be detected and analyzed. The technique is applicable to various samples by inducing a ripple morphology on the sample surface and detection of light diffracted substantially from surface ripple.
摘要翻译： 通过使用优选被样品吸收的辐射和从样品表面衍射的优选不被样品吸收的探针辐射来激发样品，使用光学诱导声子来分析诸如薄聚合物膜的样品。 探针的脉冲宽度优选为可检测的衍射信号的数量级，从而可以检测和分析来自每个激发脉冲的声子衰减。 该技术可以通过在样品表面上诱导纹波形态和基本上从表面纹波衍射的光的检测来应用于各种样品。
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公开(公告)号：US5546811A
公开(公告)日：1996-08-20
申请号：US377308
申请日：1995-01-24
申请人： John A. Rogers , Keith A. Nelson
发明人： John A. Rogers , Keith A. Nelson
CPC分类号： G01L5/0047
摘要： A method for determining the residual stress in an unsupported region of a thin film. The method includes the steps of (a) optically exciting the film with a spatially and temporally varying optical excitation field to launch counter-propagating acoustic modes along at least one wavevector; (b) diffracting a portion of an optical probe field off the excited acoustic modes to generate a time-dependent signal field at the excitation wavevector; (c) detecting the signal field to generate a time-dependent, light-induced signal; (d) analyzing the light-induced signal to determine the frequencies of the acoustic modes; (e) partially determining the dispersion of at least one mode; and, (f) comparing the measured dispersion to that calculated using a mathematical model to allow the residual stress properties of the unsupported region of the film to be determined.
摘要翻译： 一种用于确定薄膜未支撑区域中的残余应力的方法。 该方法包括以下步骤：（a）利用空间和时间上变化的光激励场域来对激光膜进行光学激发，以沿着至少一个波矢发射反向传播声模; （b）将光探测器场的一部分衍射离开激发的声学模式，以在激励波矢上产生时间相关的信号场; （c）检测信号场以产生时间依赖的光诱导信号; （d）分析光感信号以确定声模的频率; （e）部分地确定至少一种模式的色散; 和（f）使用数学模型将所测量的色散与所计算的色散进行比较，以确定膜的未支撑区域的残余应力特性。
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8.发明授权Method and device for simultaneously measuring the thickness of multiple thin metal films in a multilayer structure 失效用于同时测量多层结构中多个薄金属膜的厚度的方法和装置
公开(公告)号：US6069703A
公开(公告)日：2000-05-30
申请号：US86975
申请日：1998-05-28
申请人： Matthew J. Banet , Martin Fuchs , John A. Rogers , Keith A. Nelson , Timothy F. Crimmins , Alexei Maznev
发明人： Matthew J. Banet , Martin Fuchs , John A. Rogers , Keith A. Nelson , Timothy F. Crimmins , Alexei Maznev
CPC分类号： G01N29/2418 , G01B11/0666 , G01B17/025 , G01N2021/1725 , G01N2203/0222 , G01N2203/0282 , G01N2291/0231 , G01N2291/0237 , G01N2291/02854
摘要： An apparatus for measuring a property of a structure comprising at least one layer, the appratus including a light source that produces an optical pulse having a duration of less than 10 ps; a diffractive element that receives the optical pulse and diffracts it to generate at least two excitation pulses; an optical system that spatially and temporally overlaps at least two excitation pulses on or in the structure to form an excitation pattern, containing at least two light regions, that launches an acoustic wave having an out-of-plane component that propagates through the layer, reflects off a lower boundary of the layer, and returns to a surface of the structure to modulate a property of the structure; a light source that produces a probe pulse that diffracts off the modulated property to generate at least one signal pulse; a detector that receives at least one signal pulse and in response generates a light-induced electrical signal; and an analyzer that analyzes the light-induced electrical signal to measure the property of the structure.
摘要翻译： 一种用于测量包括至少一层的结构的性质的装置，所述装置包括产生具有小于10ps的持续时间的光脉冲的光源; 衍射元件，其接收光脉冲并衍射以产生至少两个激励脉冲; 在该结构上或其结构中空间和时间上重叠至少两个激励脉冲以形成激发图案的光学系统，其包含至少两个光区域，该至少两个光区域发射具有传播通过该层的平面外部分的声波， 反射层的下边界，并返回到结构的表面以调节结构的性质; 产生探测脉冲的光源，其衍射出调制特性以产生至少一个信号脉冲; 接收至少一个信号脉冲并作为响应的检测器产生光诱导的电信号; 以及分析器，其分析光感应电信号以测量结构的性质。
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公开(公告)号：US5734470A
公开(公告)日：1998-03-31
申请号：US844850
申请日：1997-04-22
申请人： John A. Rogers , Keith A. Nelson
发明人： John A. Rogers , Keith A. Nelson
CPC分类号： G01N21/636 , G01N21/1717
摘要： An optical modulating system which allows modulation of a single light beam with a spatially filtering mask to form a spatially periodic, time-dependent excitation field. Once generated, the field can be used to induce a transient grating in a sample. The optical modulating system is additionally configured to automatically orient a probe beam at the Bragg angle, thereby allowing the intensity of the probe beam diffracted off the induced grating to be maximized. Measurement of the diffracted probe beam allows, for example, determination of mechanical, thermal, electrical, and optical properties of the sample.
摘要翻译： 一种光调制系统，其允许用空间滤波掩模调制单个光束以形成空间周期性的时间依赖的激励场。 一旦生成，该场可用于诱导样品中的瞬态光栅。 光学调制系统另外配置成以布拉格角自动地定向探测光束，从而允许从感应光栅衍射的探测光束的强度最大化。 衍射探针光束的测量允许例如确定样品的机械，热，电和光学性质。
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公开(公告)号：US5672830A
公开(公告)日：1997-09-30
申请号：US763873
申请日：1996-12-11
申请人： John A. Rogers , Keith A. Nelson , Lisa Dhar
发明人： John A. Rogers , Keith A. Nelson , Lisa Dhar
CPC分类号： G01N29/52 , G01N29/2418 , G01N2291/011 , G01N2291/012 , G01N2291/0237 , G01N2291/0422
摘要： Anisotropic mechanical properties of thin films are measured by exciting time-dependent waveguide acoustic modes in the thin film sample with a pair of excitation pulses from an excitation laser. The waveguide acoustic modes are then optically detected by diffracting a probe laser beam off the excited modes. The probe beam is detected to generate an electronic signal. The anisotropic moduli and related properties in the film are determined by analyzing the electronic signal using a mathematical inversion procedure.
摘要翻译： 利用激发激光器的一对激发脉冲，通过激发薄膜样品中的时间依赖波导声模来测量薄膜的各向异性机械性能。 然后通过将探针激光束衍射离开激发模式来光学检测波导声模式。 检测探测光束以产生电子信号。 通过使用数学反演程序分析电子信号来确定膜中的各向异性模量和相关性质。
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