FAST MEASUREMENT OF X-RAY DIFFRACTION FROM TILTED LAYERS
    1.
    发明申请
    FAST MEASUREMENT OF X-RAY DIFFRACTION FROM TILTED LAYERS 有权
    从倾斜层快速测量X射线衍射

    公开(公告)号:US20120140889A1

    公开(公告)日:2012-06-07

    申请号:US12958420

    申请日:2010-12-02

    IPC分类号: G01N23/207

    CPC分类号: G01N23/207

    摘要: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having multiple single-crystal layers, including at least a first layer and a second layer that is formed over and tilted relative to the first layer. The X-rays that are diffracted from each of the first and second layers are sensed simultaneously while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including at least a first diffraction peak due to the first layer and a second diffraction peak due to the second layer. The diffraction spectrum is analyzed so as to identify a characteristic of at least the second layer.

    摘要翻译: 一种用于分析的方法包括将X射线的会聚束指向具有多个单晶层的样品的表面,所述样品具有至少第一层和形成在第一层上并相对于第一层倾斜的第二层。 在将感测到的X射线分解为角度的同时,同时检测从第一和第二层中的每一个衍射的X射线,以便产生至少包括由于第一层的第一衍射峰的衍射光谱,以及 由于第二层造成的第二衍射峰。 分析衍射光谱以识别至少第二层的特征。

    Fast measurement of X-ray diffraction from tilted layers
    2.
    发明授权
    Fast measurement of X-ray diffraction from tilted layers 有权
    从倾斜层快速测量X射线衍射

    公开(公告)号:US08437450B2

    公开(公告)日:2013-05-07

    申请号:US12958420

    申请日:2010-12-02

    IPC分类号: G01N23/207

    CPC分类号: G01N23/207

    摘要: A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having multiple single-crystal layers, including at least a first layer and a second layer that is formed over and tilted relative to the first layer. The X-rays that are diffracted from each of the first and second layers are sensed simultaneously while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including at least a first diffraction peak due to the first layer and a second diffraction peak due to the second layer. The diffraction spectrum is analyzed so as to identify a characteristic of at least the second layer.

    摘要翻译: 一种用于分析的方法包括将X射线的会聚束指向具有多个单晶层的样品的表面,所述样品具有至少第一层和形成在第一层上并相对于第一层倾斜的第二层。 在将感测到的X射线分解为角度的同时,同时检测从第一和第二层中的每一个衍射的X射线,以便产生至少包括由于第一层的第一衍射峰的衍射光谱,以及 由于第二层造成的第二衍射峰。 分析衍射光谱以识别至少第二层的特征。

    Optical 3D digitizer with enlarged no-ambiguity zone
    3.
    发明授权
    Optical 3D digitizer with enlarged no-ambiguity zone 有权
    光学3D数字化仪具有放大的无歧义区域

    公开(公告)号:US07274470B2

    公开(公告)日:2007-09-25

    申请号:US10898504

    申请日:2004-07-23

    IPC分类号: G01B11/24

    摘要: An optical 3D digitizer with an enlarged non-ambiguity zone, comprising a structured light projector for projecting a fringe pattern over a target area, the fringe pattern having a shiftable position over the target area is disclosed. First and second cameras having overlapping measurement fields are directed toward the target area and positioned with respect to the projector to define distinct triangulation planes therewith. The second camera has a larger non-ambiguity depth than the first camera. A computer evaluates a same set of camera-projector related functions from images captured by the cameras including the projected pattern at shifted positions, builds low depth resolution and degenerated 3D models from the camera-projector related functions evaluated with respect to the second and first cameras respectively, determines chromatic texture from the images, and builds a complete textured 3D model from data corresponding between the low depth resolution and degenerated 3D models within a tolerance range.

    摘要翻译: 公开了一种具有放大的非歧义区域的光学3D数字化仪,其包括用于将目标区域上的条纹图案投影的结构化投光器,所述条纹图案具有在所述目标区域上方的可移位位置。 具有重叠测量场的第一和第二相机指向目标区域并相对于投影仪定位以与其定义明确的三角剖面。 第二台相机具有比第一台相机更大的非歧义深度。 计算机根据摄像机拍摄的图像评估相同的摄像机 - 投影仪相关功能,包括在偏移位置处的投影图案,从相对于第二和第一摄像机评估的相机投影仪相关功能构建低深度分辨率和退化3D模型 分别从图像中确定色彩纹理,并从容差范围内的低深度分辨率和退化3D模型之间的数据构建完整的纹理3D模型。

    Optical 3D digitizer with enlarged non-ambiguity zone
    5.
    发明申请
    Optical 3D digitizer with enlarged non-ambiguity zone 有权
    光学3D数字化仪具有放大的非歧义区域

    公开(公告)号:US20050018209A1

    公开(公告)日:2005-01-27

    申请号:US10898504

    申请日:2004-07-23

    IPC分类号: G01B11/25 G01B11/24

    摘要: An optical 3D digitizer with an enlarged non-ambiguity zone, comprising a structured light projector for projecting a fringe pattern over a target area, the fringe pattern having a shiftable position over the target area is disclosed. First and second cameras having overlapping measurement fields are directed toward the target area and positioned with respect to the projector to define distinct triangulation planes therewith. The second camera has a larger non-ambiguity depth than the first camera. A computer evaluates a same set of camera-projector related functions from images captured by the cameras including the projected pattern at shifted positions, builds low depth resolution and degenerated 3D models from the camera-projector related functions evaluated with respect to the second and first cameras respectively, determines chromatic texture from the images, and builds a complete textured 3D model from data corresponding between the low depth resolution and degenerated 3D models within a tolerance range.

    摘要翻译: 公开了一种具有放大的非歧义区域的光学3D数字化仪,其包括用于将目标区域上的条纹图案投影的结构化投光器,所述条纹图案具有在所述目标区域上方的可移位位置。 具有重叠测量场的第一和第二相机指向目标区域并相对于投影仪定位以与其定义明确的三角剖面。 第二台相机具有比第一台相机更大的非歧义深度。 计算机根据摄像机拍摄的图像评估相同的摄像机 - 投影仪相关功能,包括在偏移位置处的投影图案,从相对于第二和第一摄像机评估的相机投影仪相关功能构建低深度分辨率和退化3D模型 分别从图像中确定色彩纹理,并从容差范围内的低深度分辨率和退化3D模型之间的数据构建完整的纹理3D模型。