-
公开(公告)号:US20060146092A1
公开(公告)日:2006-07-06
申请号:US11026504
申请日:2004-12-30
申请人: Johnathan Barnes , Craig Bertelsen , Brian Hart , Gary Williams , Sean Weaver , Girish Patil
发明人: Johnathan Barnes , Craig Bertelsen , Brian Hart , Gary Williams , Sean Weaver , Girish Patil
IPC分类号: B41J2/04
CPC分类号: B41J2/1628 , B41J2/14024 , B41J2/1404 , B41J2/14072 , B41J2/1603 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1635 , B41J2/1639 , B41J2/1645 , Y10T29/49135 , Y10T29/49139 , Y10T29/4914 , Y10T29/49401 , Y10T29/4979 , Y10T29/49798
摘要: A method of making a micro-fluid ejection head structure for a micro-fluid ejection device. The method includes applying a removable mandrel material to a semiconductor substrate wafer containing fluid ejection actuators on a device surface thereof. The mandrel material is shaped to provide fluid chamber and fluid channel locations on the substrate wafer. A micro machinable material is applied to the shaped mandrel and the device surface of the wafer to provide a nozzle plate and flow feature layer on the shaped mandrel and wafer. A plurality of nozzle holes are formed in the nozzle plate and flow feature layer. The shaped mandrel material is then removed from the device surface of the substrate wafer to provide fluid chambers and fluid channels in the nozzle plate and flow feature layer.
摘要翻译: 一种制造用于微流体喷射装置的微流体喷射头结构的方法。 该方法包括将可移除的心轴材料施加到在其装置表面上含有流体喷射致动器的半导体衬底晶片。 心轴材料成型为在衬底晶片上提供流体室和流体通道位置。 将微加工材料施加到成形心轴和晶片的装置表面,以在成形心轴和晶片上提供喷嘴板和流动特征层。 在喷嘴板和流动特征层中形成多个喷嘴孔。 然后将成形的心轴材料从衬底晶片的器件表面移除,以在喷嘴板和流动特征层中提供流体室和流体通道。
-
公开(公告)号:US20070222820A1
公开(公告)日:2007-09-27
申请号:US11754715
申请日:2007-05-29
申请人: Johnathan Barnes , Craig Bertelsen , Brian Hart , Gary Williams , Sean Weaver , Girish Patil
发明人: Johnathan Barnes , Craig Bertelsen , Brian Hart , Gary Williams , Sean Weaver , Girish Patil
IPC分类号: B41J2/04
CPC分类号: B41J2/1628 , B41J2/14024 , B41J2/1404 , B41J2/14072 , B41J2/1603 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1635 , B41J2/1639 , B41J2/1645 , Y10T29/49135 , Y10T29/49139 , Y10T29/4914 , Y10T29/49401 , Y10T29/4979 , Y10T29/49798
摘要: A method of making a micro-fluid ejection head structure for a micro-fluid ejection device. The method includes applying a removable mandrel material to a semiconductor substrate wafer containing fluid ejection actuators on a device surface thereof. The mandrel material is shaped to provide fluid chamber and fluid channel locations on the substrate wafer. A micro machinable material is applied to the shaped mandrel and the device surface of the wafer to provide a nozzle plate and flow feature layer on the shaped mandrel and wafer. A plurality of nozzle holes are formed in the nozzle plate and flow feature layer. The shaped mandrel material is then removed from the device surface of the substrate wafer to provide fluid chambers and fluid channels in the nozzle plate and flow feature layer.
摘要翻译: 一种制造用于微流体喷射装置的微流体喷射头结构的方法。 该方法包括将可移除的心轴材料施加到在其装置表面上含有流体喷射致动器的半导体衬底晶片。 心轴材料成型为在衬底晶片上提供流体室和流体通道位置。 将微加工材料施加到成形心轴和晶片的装置表面,以在成形心轴和晶片上提供喷嘴板和流动特征层。 在喷嘴板和流动特征层中形成多个喷嘴孔。 然后将成形的心轴材料从衬底晶片的器件表面移除,以在喷嘴板和流动特征层中提供流体室和流体通道。
-