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    Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
    2.
    发明授权
    Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation 有权
    微型音叉陀螺仪和相关的三轴惯性测量系统可以感测到平面外的旋转

    公开(公告)号：US06257059B1

    公开(公告)日：2001-07-10

    申请号：US09405721

    申请日：1999-09-24

    申请人： Marc S. Weinberg ,  Jonathan J. Bernstein ,  Gregory A. Kirkos ,  Tommy W. Lee ,  Anthony Petrovich

    发明人： Marc S. Weinberg ,  Jonathan J. Bernstein ,  Gregory A. Kirkos ,  Tommy W. Lee ,  Anthony Petrovich

    IPC分类号： G01C1900

    CPC分类号： G01C19/5719

    摘要： A micromechanical tuning fork gyroscope has an input axis out of the plane of the structure. In one embodiment, capacitor plates are provided in parallel strips beneath two apertured, planar proof masses suspended from a substrate by a support structure. The proof masses are paired and set in opposed vibrational motion by an electrostatic comb drive. In response to an input angular rate about the out-of-plane input axis, the proof masses translate with respect to the striped capacitors, thereby varying the capacitance between the capacitor strips and the proof masses as a function of the input rate. In another embodiment, proof mass combs of a comb drive are meshed between fixed drive combs which are electrically excited in pairs 180° out of phase. As the proof masses translate in response to an angular input, the distance between the proof mass combs and the fixed combs varies, thereby varying the capacitance between the combs resulting in an unbalanced voltage on the proof masses that is detected as an indication of input rate. The out-of-plane tuning fork gyroscope can be combined with two in-plane tuning fork gyroscopes to provide a complete three-axis inertial measurement unit from a single wafer or on a single chip.

    摘要翻译： 微机械音叉陀螺仪具有离开结构平面的输入轴。 在一个实施例中，电容器板以平行的条带设置在由支撑结构从衬底悬挂的两个有孔的平坦的防护块下方。 证明质量通过静电梳驱动器配对并设置在相反的振动运动中。 响应于关于平面外输入轴的输入角速率，证明质量相对于条纹电容器平移，从而根据输入速率改变电容器条和证明质量块之间的电容。 在另一个实施例中，梳状驱动器的校准质量梳被啮合在固定的驱动梳之间，它们被成对180度异相电激励。 当证明质量响应于角度输入时，证明质量梳与固定梳之间的距离发生变化，从而改变梳子之间的电容，导致作为输入速率的指示被检测到的校验质量块上的不平衡电压 。 外置音叉陀螺仪可以与两个平面内的音叉陀螺仪相结合，从单个晶片或单个芯片提供完整的三轴惯性测量单元。