-
1.发明授权Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation 有权微型音叉陀螺仪和相关的三轴惯性测量系统可以感测到平面外的旋转公开(公告)号：US06257059B1
公开(公告)日：2001-07-10
申请号：US09405721
申请日：1999-09-24
申请人： Marc S. Weinberg , Jonathan J. Bernstein , Gregory A. Kirkos , Tommy W. Lee , Anthony Petrovich
发明人： Marc S. Weinberg , Jonathan J. Bernstein , Gregory A. Kirkos , Tommy W. Lee , Anthony Petrovich
IPC分类号： G01C1900
CPC分类号： G01C19/5719
摘要： A micromechanical tuning fork gyroscope has an input axis out of the plane of the structure. In one embodiment, capacitor plates are provided in parallel strips beneath two apertured, planar proof masses suspended from a substrate by a support structure. The proof masses are paired and set in opposed vibrational motion by an electrostatic comb drive. In response to an input angular rate about the out-of-plane input axis, the proof masses translate with respect to the striped capacitors, thereby varying the capacitance between the capacitor strips and the proof masses as a function of the input rate. In another embodiment, proof mass combs of a comb drive are meshed between fixed drive combs which are electrically excited in pairs 180° out of phase. As the proof masses translate in response to an angular input, the distance between the proof mass combs and the fixed combs varies, thereby varying the capacitance between the combs resulting in an unbalanced voltage on the proof masses that is detected as an indication of input rate. The out-of-plane tuning fork gyroscope can be combined with two in-plane tuning fork gyroscopes to provide a complete three-axis inertial measurement unit from a single wafer or on a single chip.
摘要翻译： 微机械音叉陀螺仪具有离开结构平面的输入轴。 在一个实施例中，电容器板以平行的条带设置在由支撑结构从衬底悬挂的两个有孔的平坦的防护块下方。 证明质量通过静电梳驱动器配对并设置在相反的振动运动中。 响应于关于平面外输入轴的输入角速率，证明质量相对于条纹电容器平移，从而根据输入速率改变电容器条和证明质量块之间的电容。 在另一个实施例中，梳状驱动器的校准质量梳被啮合在固定的驱动梳之间，它们被成对180度异相电激励。 当证明质量响应于角度输入时，证明质量梳与固定梳之间的距离发生变化，从而改变梳子之间的电容，导致作为输入速率的指示被检测到的校验质量块上的不平衡电压 。 外置音叉陀螺仪可以与两个平面内的音叉陀螺仪相结合，从单个晶片或单个芯片提供完整的三轴惯性测量单元。
-
公开(公告)号：US06928875B2
公开(公告)日：2005-08-16
申请号：US10341666
申请日：2003-01-14
IPC分类号： G01P15/08
CPC分类号： G01P15/08
摘要： A system and method for compensating for gradients in a dual cavity device such as but not limited to an accelerometer. A first source drives a first cavity at least two different modes, at least one mode varying with changes in cavity length. A second source drives a second cavity at least two different modes, at least one mode varying with changes in cavity length. A processor determines changes in cavity length as a function of both modes in both cavities to compensate for non-uniform behavior between the cavities.
摘要翻译： 一种用于补偿双腔装置中的梯度的系统和方法，例如但不限于加速度计。 第一源驱动第一腔至少两种不同的模式，至少一种模式随腔长度的变化而变化。 第二源驱动第二腔至少两种不同的模式，至少一种模式随腔长度的变化而变化。 处理器确定腔长度的变化作为两个腔中的两种模式的函数，以补偿腔之间的不均匀行为。
-
公开(公告)号：US5315874A
公开(公告)日：1994-05-31
申请号：US316873
申请日：1989-02-28
IPC分类号： G01P15/08 , G01P15/097 , G01P15/10 , H03H9/05 , H03H9/19 , H01L21/306 , H01L41/00
CPC分类号： G01P15/097 , G01P15/0802 , G01P2015/0814
摘要： A monolithic quartz resonator accelerometer including a monolithic quartz sensing structure with a frame, a proof mass support structure within the frame, and a resonator structure interconnecting the frame and the support structure. Further included are a proof mass fixed to the support structure, and electrodes on the resonator structure for driving the resonator at a vibration frequency which varies as a function of the acceleration of the proof mass.
摘要翻译： 一种单片石英谐振器加速度计，其包括具有框架的单片石英感测结构，框架内的证明质量支撑结构，以及将框架和支撑结构互连的谐振器结构。 还包括固定到支撑结构的证明物质，以及谐振器结构上用于以振动频率驱动谐振器的电极，该振动频率随着校验物质的加速度而变化。
-
公开(公告)号：US5388458A
公开(公告)日：1995-02-14
申请号：US981167
申请日：1992-11-24
IPC分类号： G01C19/5607 , G01P9/04
CPC分类号： G01C19/5607
摘要： A resonantly vibrating or tuning fork rate sensor in which a quartz beam is instrumented with electrodes in first and second regions forming respective sense and drive electrodes wherein the piezoelectric resonance affect of the quartz material between the drive electrodes is used as a tuning element for an oscillator circuit. The electrodes are driven in a balanced voltage mode and sensed in a common mode rejection differential amplifier while leads running to the electrodes along the quartz beam are placed at positions of minimal field strength for improving the signal to noise ratio of the device. The rate sensor utilizes a multi-electrode pattern in order to make such lead placement possible. The sense pattern and drive pattern may be either in one orientation with the drive electrodes proximate to the body of the quartz resonator or in a second pattern with the sense electrodes proximate to the body. Both the drive electrodes and the sense electrodes operate on the piezoelectric principal, utilizing constriction to induce vibration from the drive electrodes and sensing the current generated from piezoelectric effect resulting from the vibrational compression which occurs out of the plane of vibration during inertial rate input. Alternatively, a capacitive electrode structure may be utilized as a pick-off.
摘要翻译： 一种谐振振动或音叉速率传感器，其中在形成相应感测和驱动电极的第一和第二区域中，石英束被装配有电极，其中驱动电极之间的石英材料的压电共振影响被用作振荡器的调谐元件 电路。 电极以平衡电压模式驱动并且在共模抑制差分放大器中感测，而沿着石英束的电极的引线被放置在最小场强的位置，以提高器件的信噪比。 速率传感器利用多电极图案以使得这种引线放置成为可能。 感测图案和驱动图案可以处于与驱动电极靠近石英谐振器的主体的一个方向上，或者处于具有接近身体的感测电极的第二图案中。 驱动电极和感测电极都在压电体上工作，利用收缩来引起来自驱动电极的振动，并且感测由在惯性速率输入期间出现在振动平面之外的振动压缩产生的压电效应产生的电流。 或者，可以使用电容电极结构作为拾取器。
-
公开(公告)号：US06481286B1
公开(公告)日：2002-11-19
申请号：US09650783
申请日：2000-08-30
IPC分类号： G01P1508
CPC分类号： G01P15/097
摘要： An improved microwave resonant cavity accelerometer includes a reentrant microwave resonant cavity. Preferably, the accelerometer includes first and second complementary reentrant microwave resonant cavities, each being characterized by a nominal resonant frequency. Each cavity includes a capacitive gap, and an inductive gap surrounding each capacitive gap. A coupler couples to each cavity a microwave signal substantially at the nominal resonant frequency of each cavity. In response to an acceleration force along a sensing axis, a proof mass positioned along the sensing axis differentially changes the dimensions of each cavity and establishes a resonant frequency for each cavity which varies as a function of the acceleration force. The accelerometer includes means for detecting electromagnetic energy in each cavity and determining the frequency of the detected energy. The shift in resonant frequency is used to determine the acceleration of the proof mass. By using-reentrant cavities, the sensitivity of the accelerometer to an acceleration of the proof mass is improved by a factor of about 100 for miniaturized proof masses. The accelerometer may be fabricated using micromachining techniques.
摘要翻译： 改进的微波谐振腔加速度计包括可重入微波谐振腔。 优选地，加速度计包括第一和第二互补可折入的微波谐振腔，每个都具有标称谐振频率。 每个腔包括电容性间隙和围绕每个电容间隙的电感间隙。 耦合器耦合到每个空腔，基本上以每个空腔的标称谐振频率的微波信号耦合。 响应于沿着感测轴的加速力，沿着感测轴定位的检测质量块差异地改变每个空腔的尺寸，并且为根据加速力变化的每个空腔建立谐振频率。 加速度计包括用于检测每个空腔中的电磁能并确定检测能量的频率的装置。 谐振频率的移动用于确定校验质量的加速度。 通过使用凹陷腔，加速度计对检测质量的加速度的灵敏度对于小型化的检验质量提高约100倍。 加速度计可以使用微加工技术制造。
-
公开(公告)号：US5505865A
公开(公告)日：1996-04-09
申请号：US869887
申请日：1992-04-14
申请人： Kaplesh Kumar , Anthony Petrovich
发明人： Kaplesh Kumar , Anthony Petrovich
CPC分类号： C04B35/64 , C04B35/2658
摘要： A process for synthesizing advanced ceramics having superior microstructures and properties. Metal oxide powder particles are produced from solutions of soluble salts of the respective metals by a spray decomposition process. The as-formed powders are heated in an inert atmosphere at a temperature below their sintering temperature and for a time sufficient to cause the oxide powder particles to densify without sintering, and the densified powder is then compacted under high pressure and finally sintered at a temperature above that employed in the initial heating step. Products of this process possess superior magnetic and structural uniformity, excellent grain structure, and very high mechanical strength relative to ceramics prepared without using a heat treatment for densification prior to the compacting step.
摘要翻译： 一种合成具有优良微结构和性能的先进陶瓷的方法。 金属氧化物粉末颗粒是通过喷雾分解过程由各种金属的可溶性盐的溶液制成的。 将形成的粉末在惰性气氛中在低于其烧结温度的温度下加热足够长的时间，使得氧化物粉末颗粒在不烧结的情况下致密化，然后将致密粉末在高压下压实，最后在温度下烧结 高于在初始加热步骤中使用的。 相对于在压实步骤之前不使用热处理致密化制备的陶瓷，该方法的产品具有优异的磁性和结构均匀性，优异的晶粒结构和非常高的机械强度。
-
公开(公告)号：US06972553B2
公开(公告)日：2005-12-06
申请号：US10075754
申请日：2002-02-14
CPC分类号： G01N29/036 , G01D3/06 , G01H13/00 , G01N2291/0256
摘要： A sensor readout circuit which provides a frequency signal output including a phase detector circuit responsive to an output signal from a sensor and an input signal to the sensor and configured to detect the phase difference between the input signal and the output signal, and a drive circuit responsive to the phase detector circuit and configured to maintain a fixed phase difference between the input signal and the output signal.
摘要翻译： 传感器读出电路，其提供频率信号输出，所述频率信号输出包括响应于来自传感器的输出信号的相位检测器电路和对所述传感器的输入信号，并且被配置为检测所述输入信号和所述输出信号之间的相位差;以及驱动电路 响应于相位检测器电路并且被配置为保持输入信号和输出信号之间的固定相位差。
-
公开(公告)号：US20050115319A1
公开(公告)日：2005-06-02
申请号：US10341666
申请日：2003-01-14
申请人： James Bickford , Marc Weinberg , Anthony Petrovich
发明人： James Bickford , Marc Weinberg , Anthony Petrovich
CPC分类号： G01P15/08
摘要： A system and method for compensating for gradients in a dual cavity device such as but not limited to an accelerometer. A first source drives a first cavity at least two different modes, at least one mode varying with changes in cavity length. A second source drives a second cavity at least two different modes, at least one mode varying with changes in cavity length. A processor determines changes in cavity length as a function of both modes in both cavities to compensate for non-uniform behavior between the cavities.
摘要翻译： 一种用于补偿双腔装置中的梯度的系统和方法，例如但不限于加速度计。 第一源驱动第一腔至少两种不同的模式，至少一种模式随腔长度的变化而变化。 第二源驱动第二腔至少两种不同的模式，至少一种模式随腔长度的变化而变化。 处理器确定腔长度的变化作为两个腔中的两种模式的函数，以补偿腔之间的不均匀行为。
-
公开(公告)号：US5351541A
公开(公告)日：1994-10-04
申请号：US823866
申请日：1992-01-22
申请人： Anthony Petrovich , Marc Weinberg
发明人： Anthony Petrovich , Marc Weinberg
IPC分类号： G01P15/08 , G01P15/097 , G01P15/10
CPC分类号： G01P15/097 , G01P15/08
摘要： A microwave resonator accelerometer including a microwave resonant cavity having a predetermined resonant frequency; the cavity including a flexible portion; a proof mass fixed to the flexible portion for changing the geometry and establishing a new resonant frequency of the cavity in response to an acceleration force on the proof mass; a microwave frequency signal at or approximately at the predetermined resonant frequency coupled to the cavity; and a discrimination circuit, responsive to the reflected microwave signal from the cavity, for discriminating a shift in the predetermined resonant frequency of the cavity to a new resonant frequency effected by the change in geometry of the cavity resulting from the acceleration force on the proof mass.
摘要翻译： 一种微波谐振器加速度计，包括具有预定谐振频率的微波谐振腔; 所述腔包括柔性部分; 固定到所述柔性部分上的用于改变所述几何形状并且响应于所述证明质量块上的加速力建立所述空腔的新的共振频率的校验物质; 微波频率信号处于或接近于耦合到空腔的预定谐振频率; 以及响应于来自空腔的反射的微波信号的鉴别电路，用于将空腔的预定谐振频率的偏移鉴定为新的谐振频率，该谐振频率受到由检测质量块上的加速力引起的空腔几何形状的变化的影响 。
-
公开(公告)号：US5292569A
公开(公告)日：1994-03-08
申请号：US936092
申请日：1992-08-26
IPC分类号： G01P1/00 , G01P15/08 , G01P15/093 , B32B3/10
CPC分类号： G01P1/00 , G01P15/08 , G01P15/093 , Y10T428/218
摘要： A flexure for an accelerometer includes an inner hub; an outer rim spaced from the inner hub; one of the hub and rim being mounted to the accelerometer body and the other to the proof mass of the accelerometer; at least three curved tapered beams extending between the rim and the hub with the widest beam portion proximate the rim, for flexibly supporting the proof mass and enabling relative rotational relief between the hub and rim for preventing nonlinear stretching of the beams.
摘要翻译： 用于加速度计的挠曲件包括内毂; 与内毂间隔开的外缘; 轮毂和轮辋中的一个安装到加速度计主体，另一个安装到加速度计的检验质量块; 至少三个弯曲的锥形梁，其在边缘和轮毂之间延伸，最宽的梁部分靠近轮辋，用于柔性地支撑检验质量块，并实现轮毂和轮辋之间的相对旋转释放，以防止梁的非线性拉伸。
-
-
-
-
-
-
-
-
-
搜索结果
11 条记录 (耗时 0.034 秒)