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公开(公告)号:US08784672B2
公开(公告)日:2014-07-22
申请号:US13279859
申请日:2011-10-24
申请人: Jong-Keun Oh , Dae-Hyuk Kang , Chan-Uk Jeon , Hyung-Ho Ko , Sung-Jae Han , Jung-Jin Kim
发明人: Jong-Keun Oh , Dae-Hyuk Kang , Chan-Uk Jeon , Hyung-Ho Ko , Sung-Jae Han , Jung-Jin Kim
摘要: In a method of manufacturing a photomask pattern, a light-shielding layer pattern and an anti-reflective layer pattern are formed sequentially on a transparent substrate. Oxidation and nitridation processes are performed on a sidewall of the light-shielding layer pattern to form a protection layer pattern on a lateral portion of the light-shielding layer pattern.
摘要翻译: 在制造光掩模图案的方法中,在透明基板上依次形成遮光层图案和抗反射层图案。 在遮光层图案的侧壁上进行氧化和氮化处理,以在遮光层图案的横向部分上形成保护层图案。
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公开(公告)号:US09370805B2
公开(公告)日:2016-06-21
申请号:US13618521
申请日:2012-09-14
申请人: Jae-Hyuck Choi , Won-Jung Kim , Ho-Young Kim , Hyung-Ho Ko , Jong-Keun Oh , Chan-Uk Jeon , Keun-Hwan Park
发明人: Jae-Hyuck Choi , Won-Jung Kim , Ho-Young Kim , Hyung-Ho Ko , Jong-Keun Oh , Chan-Uk Jeon , Keun-Hwan Park
CPC分类号: B08B3/12 , G03F1/82 , H01L21/02057 , H01L21/67057
摘要: A megasonic cleaning method and a megasonic cleaning apparatus are provided. Microcavitation bubbles may be formed by applying an electromotive force to a cleaning solution using a megasonic energy in a separate room from an object to be cleaned. The microcavitation bubbles having a stable oscillation among the formed microcavitation bubbles may be moved to the object to be cleaned. A surface of the object to be cleaned may be cleaned using the microcavitation bubbles having the stable oscillation. Particles attached onto the surface of the object to be cleaned may be effectively removed while preventing pattern damage.
摘要翻译: 提供了一种兆声波清洗方法和一种超声波清洗装置。 微气泡可以通过使用超声波能量在与要清洁的物体分离的房间中的清洁溶液施加电动势来形成。 在形成的微气泡之间具有稳定振荡的微气泡可以移动到要清洁的物体。 可以使用具有稳定振荡的微气泡来清洁待清洁物体的表面。 可以有效地除去附着在待清洁物体表面上的颗粒,同时防止图案损坏。
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公开(公告)号:US08293020B2
公开(公告)日:2012-10-23
申请号:US12907642
申请日:2010-10-19
申请人: Jae-Hyuck Choi , Won-Jung Kim , Ho-Young Kim , Hyung-Ho Ko , Jong-Keun Oh , Chan-Uk Jeon , Keun-Hwan Park
发明人: Jae-Hyuck Choi , Won-Jung Kim , Ho-Young Kim , Hyung-Ho Ko , Jong-Keun Oh , Chan-Uk Jeon , Keun-Hwan Park
IPC分类号: B08B3/12
CPC分类号: B08B3/12 , G03F1/82 , H01L21/02057 , H01L21/67057
摘要: A megasonic cleaning method and a megasonic cleaning apparatus are provided. Microcavitation bubbles may be formed by applying an electromotive force to a cleaning solution using a megasonic energy in a separate room from an object to be cleaned. The microcavitation bubbles having a stable oscillation among the formed microcavitation bubbles may be moved to the object to be cleaned. A surface of the object to be cleaned may be cleaned using the microcavitation bubbles having the stable oscillation. Particles attached onto the surface of the object to be cleaned may be effectively removed while preventing pattern damage.
摘要翻译: 提供了一种兆声波清洗方法和一种超声波清洗装置。 微气泡可以通过使用超声波能量在与要清洁的物体分离的房间中的清洁溶液施加电动势来形成。 在形成的微气泡之间具有稳定振荡的微气泡可以移动到要清洁的物体。 可以使用具有稳定振荡的微气泡来清洁待清洁物体的表面。 可以有效地除去附着在待清洁物体表面上的颗粒,同时防止图案损坏。
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公开(公告)号:US20130008476A1
公开(公告)日:2013-01-10
申请号:US13618521
申请日:2012-09-14
申请人: Jae-Hyuck CHOI , Won-Jung Kim , Ho-Young Kim , Hyung-Ho Ko , Jong-Keun Oh , Chan-Uk Jeon , Keun-Hwan Park
发明人: Jae-Hyuck CHOI , Won-Jung Kim , Ho-Young Kim , Hyung-Ho Ko , Jong-Keun Oh , Chan-Uk Jeon , Keun-Hwan Park
IPC分类号: B08B3/12
CPC分类号: B08B3/12 , G03F1/82 , H01L21/02057 , H01L21/67057
摘要: A megasonic cleaning method and a megasonic cleaning apparatus are provided. Microcavitation bubbles may be formed by applying an electromotive force to a cleaning solution using a megasonic energy in a separate room from an object to be cleaned. The microcavitation bubbles having a stable oscillation among the formed microcavitation bubbles may be moved to the object to be cleaned. A surface of the object to be cleaned may be cleaned using the microcavitation bubbles having the stable oscillation. Particles attached onto the surface of the object to be cleaned may be effectively removed while preventing pattern damage.
摘要翻译: 提供了一种兆声波清洗方法和一种超声波清洗装置。 微气泡可以通过使用超声波能量在与要清洁的物体分离的房间中的清洁溶液施加电动势来形成。 在形成的微气泡之间具有稳定振荡的微气泡可以移动到要清洁的物体。 可以使用具有稳定振荡的微气泡来清洁待清洁物体的表面。 可以有效地除去附着在待清洁物体表面上的颗粒,同时防止图案损坏。
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公开(公告)号:US20110297182A1
公开(公告)日:2011-12-08
申请号:US12907642
申请日:2010-10-19
申请人: Jae-Hyuck Choi , Won-Jung Kim , Ho-Young Kim , Hyung-Ho Ko , Jong-Keun Oh , Chan-Uk Jeon , Keun-Hwan Park
发明人: Jae-Hyuck Choi , Won-Jung Kim , Ho-Young Kim , Hyung-Ho Ko , Jong-Keun Oh , Chan-Uk Jeon , Keun-Hwan Park
IPC分类号: B08B3/12
CPC分类号: B08B3/12 , G03F1/82 , H01L21/02057 , H01L21/67057
摘要: A megasonic cleaning method and a megasonic cleaning apparatus are provided. Microcavitation bubbles may be formed by applying an electromotive force to a cleaning solution using a megasonic energy in a separate room from an object to be cleaned. The microcavitation bubbles having a stable oscillation among the formed microcavitation bubbles may be moved to the object to be cleaned. A surface of the object to be cleaned may be cleaned using the microcavitation bubbles having the stable oscillation. Particles attached onto the surface of the object to be cleaned may be effectively removed while preventing pattern damage.
摘要翻译: 提供了一种兆声波清洗方法和一种超声波清洗装置。 微气泡可以通过使用超声波能量在与要清洁的物体分离的房间中的清洁溶液施加电动势来形成。 在形成的微气泡之间具有稳定振荡的微气泡可以移动到要清洁的物体。 可以使用具有稳定振荡的微气泡来清洁待清洁物体的表面。 可以有效地除去附着在待清洁物体表面上的颗粒,同时防止图案损坏。
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