公开(公告)号：US06905258B2

公开(公告)日：2005-06-14

申请号：US10650453

申请日：2003-08-27

申请人： Joseph D. Tobiason ,  Michael Nahum ,  Kim W. Atherton

发明人： Joseph D. Tobiason ,  Michael Nahum ,  Kim W. Atherton

IPC分类号： G01B11/00 ,  G01D5/347 ,  G02B6/36

CPC分类号： G01D5/34723

摘要： A fiber optic readhead arrangement for imaging a scale onto a set of optical fiber receiver channels is disclosed. The readhead arrangement includes an imaging lens and may include an aperture positioned at a focal point of the imaging lens in a telecentric arrangement. An axicon lens may be utilized to direct source light away from the imaging lens and into a ring-shaped annular source lens which surrounds the imaging lens. A source lens may concentrate source light on the scale in an area where it will be imaged back through the imaging lens to the readhead. In one embodiment, multiple source fibers may be provided around the perimeter of the fiber optic readhead arrangement. In another embodiment, the receiver fibers may also function as source fibers. In various exemplary embodiments, high levels of displacement signal interpolation may be achieved to provide high resolution measurement.

摘要翻译： 公开了一种用于将刻度成像到一组光纤接收器通道上的光纤读头装置。 读取头装置包括成像透镜，并且可以包括以远心布置定位在成像透镜的焦点处的孔。 可以使用旋转透镜来将源光引导离开成像透镜并且将其引导到围绕成像透镜的环形环形源透镜中。 源透镜可以将源光集中在其将通过成像透镜成像回到读取头的区域中的刻度上。 在一个实施例中，可以围绕光纤读头装置的周边设置多个源光纤。 在另一个实施例中，接收器光纤也可用作源光纤。 在各种示例性实施例中，可以实现高水平的位移信号内插以提供高分辨率测量。

公开(公告)号：US07088441B2

公开(公告)日：2006-08-08

申请号：US10251449

申请日：2002-09-19

申请人： Michael Nahum ,  Joseph D. Tobiason ,  Kim W. Atherton

发明人： Michael Nahum ,  Joseph D. Tobiason ,  Kim W. Atherton

IPC分类号： G01J1/42

CPC分类号： G01J9/00

摘要： A method and apparatus for measuring a wavelength-related characteristic of a radiation source is provided. Two beams travel through substantially identical filters at different angles, which produces two different output signals that behave similarly with respect to power and/or temperature variations. In various embodiments, the two beams are filtered through two portions of a single filter. A diffraction grating may be mounted to the filter to split incident radiation into first and second beams. The beams thus travel through the filter at different angles, to produce two output signals that can be combined to compensate for common-mode errors as well as power variations. Extremely small size and high-resolution may be achieved. Single or multiple detectors may also be used. Filter temperature sensitivities may also be compensated based on a direct temperature measurement or based on outputs derived from two additional beams through filters with a different temperature dependency from the filters used for the first two beams. Alternatively, the angle at which a beam travels through a filter may be physically adjusted to compensate for temperature change.

摘要翻译： 提供了用于测量辐射源的波长相关特性的方法和装置。 两个光束以不同的角度行进基本相同的滤光片，这产生两个不同的输出信号，其功率和/或温度变化类似。 在各种实施例中，两个光束通过单个滤光片的两部分进行滤光。 衍射光栅可以安装到滤光器，以将入射的辐射分成第一和第二光束。 因此，光束以不同的角度行进通过滤光器，以产生两个可组合的输出信号，以补偿共模误差以及功率变化。 可以实现非常小的尺寸和高分辨率。 也可以使用单个或多个检测器。 滤波器温度敏感度也可以基于直接温度测量或基于从两个附加光束通过滤波器得到的输出进行补偿，该滤波器具有与用于前两个波束的滤波器不同的温度依赖性。 或者，光束穿过滤光器的角度可以被物理地调节以补偿温度变化。

公开(公告)号：US07211782B2

公开(公告)日：2007-05-01

申请号：US10901701

申请日：2004-07-29

申请人： Joseph D. Tobiason ,  Avron Zwilling ,  Casey Emtman ,  Scott Harsila ,  Mike Goldsworthy ,  Kim W. Atherton

发明人： Joseph D. Tobiason ,  Avron Zwilling ,  Casey Emtman ,  Scott Harsila ,  Mike Goldsworthy ,  Kim W. Atherton

IPC分类号： G01J1/04 ,  G02B6/36

CPC分类号： G01D5/35303 ,  G02B6/381

摘要： All-optical output precision measuring gauges that sense the displacement of an internal scale grating are disclosed. Each type of gauge includes a compact, miniature, or ultra-miniature optical readhead that includes a light source for transmitting light to the scale grating, and optical-fiber detector channels for receiving light from the scale grating and outputting optical measuring signals from the gauge. In various embodiments, the optical-fiber detector channels have respective phase grating masks for receiving a periodic light pattern that moves in correspondence to the scale grating, and the channels are arranged in balanced pairs. In various embodiments, the optical readhead is an interferometric-type optical readhead that provides a measuring resolution as fine as 10–50 nanometers or less. In various embodiments, the gauge is provided in an unprecedented miniature size. In various embodiments, the gauge is motorized to provide a precision actuator.

摘要翻译： 公开了感测内部刻度光栅的位移的全光输出精密测量计。 每种类型的量规包括一个紧凑型，微型或超微型光学读取头，其包括用于将光传输到刻度光栅的光源和用于接收来自刻度光栅的光的光纤检测器通道，并从该规格输出光学测量信号 。 在各种实施例中，光纤检测器通道具有各自的相位光栅掩模，用于接收对应于刻度光栅移动的周期性光图案，并且通道以平衡对布置。 在各种实施例中，光学读取头是干涉式光学读取头，其提供的精度为10-50纳米或更小的测量分辨率。 在各种实施例中，以前所未有的微型尺寸提供量规。 在各种实施例中，将该量规机动化以提供精密致动器。

公开(公告)号：US06847457B2

公开(公告)日：2005-01-25

申请号：US10282110

申请日：2002-10-29

申请人： Joseph D. Tobiason ,  Kim W. Atherton

发明人： Joseph D. Tobiason ,  Kim W. Atherton

IPC分类号： G01B9/02

CPC分类号： G01B9/02081 ,  G01B9/02056 ,  G01B2290/70

摘要： An integrated imaging element for an interferometer generates at least one interference image that includes multiple interference portions with different relative phase shifts interleaved in a pattern having a high spatial frequency in the image. The interleaved pattern is at least partially determined by the pattern of a high density relative retarder array used in the integrated imaging element. In various embodiments, the multiple interference portions are interleaved in a checkerboard-like pattern across the entire surface of a detector device. As a result, various non-common mode errors present in various interferometers that generate separate non-interleaved images for each relative phase are reduced or eliminated.

摘要翻译： 用于干涉仪的集成成像元件产生至少一个干涉图像，该干涉图像包括具有在图像中具有高空间频率的图案中交错的不同相对相移的多个干涉部分。 交错图案至少部分地由在集成成像元件中使用的高密度相对延迟器阵列的图案确定。 在各种实施例中，多个干涉部分在检测器装置的整个表面上以棋盘状图案交错。 结果，减少或消除了在每个相对相位产生分离的非交错图像的各种干涉仪中存在的各种非共模误差。

公开(公告)号：US06850329B2

公开(公告)日：2005-02-01

申请号：US10270130

申请日：2002-10-15

申请人： Joseph D. Tobiason ,  Kim W. Atherton

发明人： Joseph D. Tobiason ,  Kim W. Atherton

IPC分类号： G01B9/02

CPC分类号： G01B9/02081 ,  G01B9/02056 ,  G01B2290/70

摘要： An integrated imaging element for an interferometer generates at least one image that includes multiple interference portions with different relative phase shifts interleaved in a pattern having a high spatial frequency in the image. The interleaved pattern is at least partially determined by the pattern of a high density polarizing array used in the integrated imaging element. In various embodiments, the multiple interference portions are interleaved in a checkerboard pattern across the entire surface of a detector device. As a result, various non-common mode errors present in various interferometers that generate separate non-interleaved images for each relative phase are reduced or eliminated because multiple phase-shifted interference image information for a small region of an object is provided within a small region on the detector device.

摘要翻译： 用于干涉仪的集成成像元件产生至少一个图像，该图像包括具有在图像中具有高空间频率的图案中交错的不同相对相移的多个干涉部分。 交错图案至少部分地由在集成成像元件中使用的高密度偏振阵列的图案决定。 在各种实施例中，多个干涉部分在检测器装置的整个表面上以棋盘图案交错。 结果，由于在小区域内提供了用于对象的小区域的多个相移干涉图像信息，因此减少或消除了在每个相对相位产生单独的非交错图像的各种干涉仪中存在的各种非共模误差 在检测器装置上。

公开(公告)号：US07053362B2

公开(公告)日：2006-05-30

申请号：US10428238

申请日：2003-05-02

申请人： Joseph D. Tobiason ,  Kim W. Atherton

发明人： Joseph D. Tobiason ,  Kim W. Atherton

IPC分类号： G01B9/02

CPC分类号： G01D5/34723

摘要： An absolute position fiber optic encoder readhead having multiple readhead portions for sensing the displacement of respective scale grating tracks of a scale is disclosed. The detector channels of the readhead portions are fiber optic detector channels having respective phase grating masks. The fiber optic encoder readhead portions are configured to detect the displacement of a self-image of a respective scale grating track of the scale. In various exemplary embodiments, the fiber optic readhead portions are constructed according to various design relationships that provide a relatively high signal-to-noise ratio. Accordingly, high levels of displacement signal interpolation may be achieved, allowing submicrometer displacement measurements. The fiber optic encoder readhead portions may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1–2 millimeters, resulting in a very small overall absolute readhead dimension that is dependent on the number of readhead portions that are incorporated. Optical fiber receiver channels carrying binary optical signals derived from a scale code track may be provided in the readhead, to provide an extended absolute measurement range.

摘要翻译： 公开了一种绝对位置光纤编码器读头，其具有用于感测刻度尺的各个刻度光栅的位移的多个读取头部分。 读取头部分的检测器通道是具有各自的相位光栅掩模的光纤检测器通道。 光纤编码器读取头部分被配置为检测刻度的相应刻度光栅的自我图像的位移。 在各种示例性实施例中，根据提供相对高的信噪比的各种设计关系来构造光纤读取头部分。 因此，可以实现高水平的位移信号插值，从而允许亚微米位移测量。 光纤编码器读取头部分可以以特别精确和经济的方式组装，并且可以设置在尺寸为1-2毫米量级的封装中，导致非常小的整体绝对读取头尺寸，其取决于 读入头部分被并入。 可以在读头中提供载有从刻度码轨道导出的二进制光信号的光纤接收器通道，以提供扩展的绝对测量范围。

公开(公告)号：US07432496B1

公开(公告)日：2008-10-07

申请号：US11829715

申请日：2007-07-27

申请人： Michael Nahum ,  Joseph D. Tobiason

发明人： Michael Nahum ,  Joseph D. Tobiason

IPC分类号： G01B11/00 ,  G06K9/82

CPC分类号： G01D5/34707 ,  G01D18/008

摘要： A method for writing or calibrating the scale of a scale-based position encoder. The scale is installed where it will be used to provide ongoing position measurements for a host system. The image correlation sensor is temporarily mounted proximate to the mounting position of the scale-based position encoder readhead on the host system, and is moved along the measuring axis relative to the scale, to provide corresponding displacement measurement information. The displacement measurement information is used to govern a scale writing process or a calibration process for the scale-based position encoder, such that the displacement measurement information at least partially governs the values of respective ongoing position measurements provided by the scale-based position encoder at respective positions along the measuring axis. A two-axis image correlation displacement sensor is advantageously used to detect and/or corrected various potential errors during the calibration or writing process.

摘要翻译： 一种用于写入或校准基于刻度的位置编码器的刻度的方法。 规模安装在将用于为主机系统提供正在进行的位置测量的位置。 图像相关传感器临时安装在主机系统上靠近基于刻度的位置编码器读取头的安装位置，并且相对于刻度沿着测量轴线移动，以提供对应的位移测量信息。 位移测量信息用于控制基于比例的位置编码器的刻度写入过程或校准过程，使得位移测量信息至少部分地控制由基于比例的位置编码器提供的各个正在进行的位置测量值 沿着测量轴的各个位置。 有利地，双轴图像相关位移传感器用于在校准或写入过程期间检测和/或校正各种潜在误差。

公开(公告)号：US20130001412A1

公开(公告)日：2013-01-03

申请号：US13175795

申请日：2011-07-01

申请人： Joseph D. Tobiason

发明人： Joseph D. Tobiason

IPC分类号： G01D5/34

CPC分类号： G01D5/34746 ,  G01D5/34715 ,  G01D5/38

摘要： An optical encoder system with a passive readhead is provided. The passive readhead does not have an attached cable and is an all optical readhead where the measurement position information relative to a scale is read remotely by direct line-of-sight optical transmission to a remote companion system. The remote companion system includes a light source and a sensing portion. In one embodiment, the sensing portion may comprise a remote lens portion and a photodetector arrangement. The remote companion system is configured to optically sense intensities of imaged regions from the passive readhead, and to output a plurality of signals indicative of the measurement position based on the sensed intensities.

摘要翻译： 提供具有被动读取头的光学编码器系统。 被动读取头不具有连接的电缆，并且是全光学读取头，其中相对于刻度尺的测量位置信息通过直接视线光学传输远程读取到远程配套系统。 远程配套系统包括光源和感测部分。 在一个实施例中，感测部分可以包括远程镜头部分和光电检测器装置。 远程伴侣系统被配置为光学地感测来自被动读取头的成像区域的强度，并且基于感测到的强度来输出指示测量位置的多个信号。

公开(公告)号：US20080024789A1

公开(公告)日：2008-01-31

申请号：US11461423

申请日：2006-07-31

申请人： Joseph D. Tobiason ,  Eric Herbert Altendorf

发明人： Joseph D. Tobiason ,  Eric Herbert Altendorf

IPC分类号： G01B9/02

CPC分类号： G01D5/38

摘要： An ultra-miniature interferometric fiber-optic encoder readhead for sensing displacement of a very fine pitch scale grating is disclosed. The readhead includes a source grating that diffracts diverging source light into ±1st order beams, a pair of mirrors that reflect the ±1st order beams to converge toward the scale grating. The ±1st order scale light beams are reflectively diffracted back from scale grating to return to the mirrors, and are then reflected to converge back toward the light source and a set of adjacent fiber-optic receiver channels. An interference field generating grating positioned in front of the receiver channels produces interference fringes having a desired pitch. Movement of the interference fringes is sensed by the fiber-optic receiver channels to provide displacement information. The readhead may be configured so that primarily or only ±1st order light reaches the receiver channels.

摘要翻译： 公开了一种用于感测极细节距光栅的位移的超微型干涉光纤编码器读头。 读取头包括将发散源光衍射为±1级光束的源光栅，反射±1级光束以朝向刻度光栅会聚的一对反射镜。 ±1级标度光束从刻度光栅反射衍射回到反射镜，然后被反射回会聚到光源和一组相邻的光纤接收器通道。 位于接收器通道前方的干涉场产生光栅产生具有期望间距的干涉条纹。 干涉条纹的运动由光纤接收器通道感测以提供位移信息。 读取头可以被配置为使得主要或仅仅±1 命令光到达接收器通道。

公开(公告)号：US20130277540A1

公开(公告)日：2013-10-24

申请号：US13452782

申请日：2012-04-20

申请人： Joseph D. Tobiason

发明人： Joseph D. Tobiason

IPC分类号： G01D5/347

CPC分类号： G01D5/38 ,  G01D5/268

摘要： A readhead and scale arrangement comprises: a readhead comprising a light source configured to output diverging source light comprising a plurality of individually detected wavelengths and at least a first optical signal receiver channel configured to provide a first set of position signals; and a scale track extending along the measuring axis direction on a scale member comprising a scale grating, the scale track configured to diffract the first diverging source light to provide first and second diffracted scale light portions of each of the individually detected wavelengths to the first optical signal receiver channel which provide interference fringes. The readhead comprises an optical path difference element, arranged such that respective wavelengths undergo different phase shifts. Such an encoder is robust to scale track contamination and other signal degradation.

摘要翻译： 读取头和刻度布置包括：读取头，其包括被配置为输出包括多个单独检测的波长的发散源光的光源以及被配置为提供第一组位置信号的至少第一光信号接收器通道; 以及沿着测量轴方向在包括刻度光栅的刻度部件上延伸的刻度轨道，所述刻度轨道被配置为衍射第一发散源光，以将每个单独检测的波长的第一和第二衍射刻度光部分提供给第一光学 信号接收机通道，提供干扰条纹。 读取头包括光路差分元件，其布置成使得各个波长经历不同的相移。 这样的编码器是鲁棒的，以便缩放轨道污染和其他信号劣化。