公开(公告)号：US6074463A

公开(公告)日：2000-06-13

申请号：US3523

申请日：1998-01-06

申请人： Joung-sun Lee ,  Ki-whan Lim

发明人： Joung-sun Lee ,  Ki-whan Lim

IPC分类号： F24F7/06 ,  B01D46/00 ,  B01D46/42 ,  B01D46/44 ,  F24F11/02 ,  H01L21/02 ,  H01L21/68 ,  B01D35/143

CPC分类号： B01D46/0086 ,  B01D46/4254 ,  B01D2273/30 ,  Y10S116/25 ,  Y10S55/34

摘要： A fan filter unit has a blower, a motor, a filter and a charge induction sensor installed on the ceiling of a clean room. The charge induction sensor is movable between a drive stopped position at which the sensor can be seen with the naked eye and a normal drive position at which the sensor can not be discriminated from the bottom of the filter. The direction of air passing through the filter and static charges prevailing in the unit dictate the position assumed by the sensor.

摘要翻译： 风扇过滤器单元具有安装在洁净室的天花板上的鼓风机，电动机，过滤器和电荷感应传感器。 电荷感应传感器可以在用肉眼观察传感器的驱动停止位置与传感器不能从过滤器的底部区分开的正常驱动位置之间移动。 通过过滤器的空气的方向和单元中的静电荷指示传感器假设的位置。

公开(公告)号：US5792226A

公开(公告)日：1998-08-11

申请号：US752385

申请日：1996-11-20

申请人： Joung-sun Lee ,  Jae-jun Ruy ,  Kun-hyung Lee ,  Sang-young Mun

发明人： Joung-sun Lee ,  Jae-jun Ruy ,  Kun-hyung Lee ,  Sang-young Mun

IPC分类号： F24F7/06 ,  F24F3/16 ,  F24F13/075 ,  H01L21/00 ,  B01D46/10 ,  B01L1/04

CPC分类号： F24F3/161

摘要： An air current controlling device for a clean room having a high efficiency particle filter, a housing cap for the filter, and an air current directional controller provided between the filter and the housing cap. The controller has a shaft extending therefrom, which extends through a central opening in the bottom of the housing cap. The controller includes a plurality of extendable and retractable blades, each being connected to a square plate that is in turn connected to the shaft. A clean room having the above air current controlling device installed in each air inlet is capable of widely distributing the clean air in the clean room. The wide air distribution reduces the temperature difference in the clean room, while optimizing the relative humidity and thereby reducing the electrostatic level of the clean room.

摘要翻译： 一种用于洁净室的气流控制装置，其具有高效率粒子滤波器，用于过滤器的壳体盖，以及设置在过滤器和壳体盖之间的气流定向控制器。 控制器具有从其延伸的轴，其延伸穿过壳体盖的底部中的中心开口。 控制器包括多个可伸缩和可缩回的叶片，每个叶片连接到正方形板，该方板又连接到轴上。 具有安装在每个空气入口中的上述气流控制装置的洁净室能够将清洁空气广泛地分布在洁净室中。 广泛的空气分布降低了洁净室中的温差，同时优化了相对湿度，从而降低了洁净室的静电电平。

公开(公告)号：US5856623A

公开(公告)日：1999-01-05

申请号：US946172

申请日：1997-10-07

申请人： Yo-han Ahn ,  Tac-ho Kim ,  Jae-jun Ryu ,  Joung-sun Lee

发明人： Yo-han Ahn ,  Tac-ho Kim ,  Jae-jun Ryu ,  Joung-sun Lee

IPC分类号： G01N15/14 ,  G01N1/02 ,  G01N1/22 ,  H01L21/66 ,  G01N27/00

CPC分类号： G01N1/2247 ,  G01N1/2202 ,  G01N2001/2223 ,  G01N2001/225 ,  G01N2001/2285

摘要： A particle counter for counting a number of particles in an air sample includes a sampling probe connected to a counter body with an intake section of the sampling probe having an adjustable area. The intake section is constructed of a plurality of telescopically interconnected shaped pieces that slide within one another to permit lengthening and shortening. The degree of lengthening or shortening determines the adjustable area of the sampling probe, which corresponds to an air speed of the air sample to provide precise particle measurements.

摘要翻译： 用于对空气样品中的颗粒数进行计数的颗粒计数器包括连接到对置体的采样探针，其中采样探针的进气部分具有可调节区域。 进气部分由多个可伸缩互连的成形件构成，其彼此滑动以允许延长和缩短。 延长或缩短的程度决定了采样探针的可调节面积，这对应于空气样品的空气速度以提供精确的粒子测量。