摘要:
A spin head includes chucking pins configures to chuck and unchuck a substrate. Contact portions of the chucking pins and the substrate are varied during a process to prevent a treating solution from remaining at the contact portions.
摘要:
A spin head includes chucking pins configures to chuck and unchuck a substrate. Contact portions of the chucking pins and the substrate are varied during a process to prevent a treating solution from remaining at the contact portions.
摘要:
A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving the first and second chucking pins. The driving unit includes a first magnet connected to the first chucking pin and disposed at a first height, a second magnet connected to the second chucking pin and disposed at a second height, and a driving magnet for driving the first and second magnets. The driving magnet is elevated by means of an elevating member to selectively apply a magnetic force to the first or second magnet and moves in the radius outside direction of the first or second chucking pin due to a magnetic force.
摘要:
A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving the first and second chucking pins. The driving unit includes a first magnet connected to the first chucking pin and disposed at a first height, a second magnet connected to the second chucking pin and disposed at a second height, and a driving magnet for driving the first and second magnets. The driving magnet is elevated by means of an elevating member to selectively apply a magnetic force to the first or second magnet and moves in the radius outside direction of the first or second chucking pin due to a magnetic force.
摘要:
A color generation device 1000 according to the present invention has a light source 8, and also has a linear polarizing means 10, a first birefringence medium 30a and a second birefringence medium 30b attached to each other in sequence in front of the light source 8. A display means 500 is provided which is distanced from the linear polarizing means 10, the first birefringence medium 30a and a second birefringence medium 30b. The first birefringence means 30a is arranged for the principal axes thereof to be at angle of 45° or −45° with respect to the polarization direction a1 of the linear polarizing means 10 and the second birefringence medium 30b is arranged for the principal axes thereof to be the same as or perpendicular to polarization direction a1 of the linear polarizing means 10 and quarter wave plate is used therefor.
摘要:
A polarization illumination system 1000a according to the first invention of the present patent application includes an illumination means having light source means 8, polarizing means 10 for receiving and polarizing light emitted from the light source means, a birefringence medium 20 for receiving and double refracting the light emitted from the light source means and transmitted through the polarizing means. Illumination space S to which the light of the illumination means is illuminated has a polarized reflection object 60 that reflects an incident light in a way that the reflected light partly or fully polarized.
摘要:
A color generation device 1000 according to the present invention has a light source 8, and also has a linear polarizing means 10, a first birefringence medium 30a and a second birefringence medium 30b attached to each other in sequence in front of the light source 8. A display means 500 is provided which is distanced from the linear polarizing means 10, the first birefringence medium 30a and a second birefringence medium 30b. The first birefringence means 30a is arranged for the principal axes thereof to be at angle of 45° or −45° with respect to the polarization direction a1 of the linear polarizing means 10 and the second birefringence medium 30b is arranged for the principal axes thereof to be the same as or perpendicular to polarization direction a1 of the linear polarizing means 10 and quarter wave plate is used therefor.
摘要:
The present invention provides a polarized light display device that uses a shadow as display element to provide a unique display effect. The polarized light display device 1000 according to the first aspect of the present invention has a polarized light source 80 emitting a polarized light and an ornamental or sign member 51 positioned to be distanced from the polarized light source 80 which receives and transmits out the light from the polarized light source 80 therethrough and double-refracts the light transmitting therethrough. A polarization shadow projection means 60 on which a shadow of the ornamental or sign member 51 is projected provided. The shadow of the ornamental or sign member 51 projected on the polarization shadow projection means 60 shows color.
摘要:
A polarization display device 1000a according to the present invention includes a polarization zone comprising polarizing means for polarizing light; a polarization light source 100 emitting light that is polarized and illuminated to the polarization zone and that its polarization direction changes.
摘要:
A display device includes a reflective base member, a first light polarizing film disposed on the surface of the base member, a light source, a second light polarizing medium receiving light from the light source and emitting polarized light towards the first light polarizing film, a birefringence medium positioned between the second light polarizing medium and the first light polarizing film, and means for changing the direction of polarization of the second light polarizing means.