公开(公告)号：US07903253B2

公开(公告)日：2011-03-08

申请号：US12613586

申请日：2009-11-06

Applicant: Jun Koshoubu

Inventor： Jun Koshoubu

IPC: G01B9/02

CPC classification number: G01J3/453 ,  G01J3/2889 ,  G02B21/0096

Abstract: A microscope comprising: a light sampler for collecting light from a measurement area of a sample; a multi-element detector having a plurality of photoelectric elements, for detecting the light collected by the light sampler, each photoelectric element corresponding to a minute measurement region in the measurement area with one-to-one correspondence; a Fourier transform spectrophotometer as a spectroscope; a data sampler for concurrently sampling intensity data sent from each photoelectric element of the multi-element detector at a timing determined by the Fourier transform spectrophotometer; and a data processor for obtaining time-resolved spectrum data for each minute measurement region according to temporally changed interference light data obtained by the data sampler.

Abstract translation: 一种显微镜，包括：用于收集来自样品的测量区域的光的光采样器; 具有多个光电元件的多元件检测器，用于检测由光采样器收集的光，每个光电元件对应于测量区域中的微小测量区域与一一对应; 傅里叶变换分光光度计作为分光镜; 数据采样器，用于在由傅里叶变换分光光度计确定的时刻同时采样从多元素检测器的每个光电元件发送的强度数据; 以及数据处理器，用于根据由数据采样器获得的时间上改变的干涉光数据，为每个微小测量区域获得时间分辨的光谱数据。

公开(公告)号：US06891162B2

公开(公告)日：2005-05-10

申请号：US10355295

申请日：2003-01-31

Applicant: Toshiyuki Nagoshi ,  Seiichi Kashiwabara ,  Jun Koshoubu

Inventor： Toshiyuki Nagoshi ,  Seiichi Kashiwabara ,  Jun Koshoubu

IPC: G01J3/45 ,  H04N5/33 ,  G01J5/02

CPC classification number: G01J3/45

Abstract: A method capable of acquiring data at a high speed while holding proper precision during measurement with an infrared imaging apparatus uses an FTIR device of a continuous scan type for detecting a signal by a multi-element detector. A method which acquires data from a multi-element detector in an infrared imaging apparatus. The method involves starting to scan an element of the said multi-element detector synchronously with a sampling signal based on a reference signal of an interferometer, and scanning the element at a higher frequency than a sampling frequency of the sampling signal. The method further involves completing the scanning of all the elements before a next sampling signal to the sampling signal starting the element scanning is generated, and repeating a series of operations every time the sampling signal is generated.

Abstract translation: 利用红外成像装置测量时能够以高速度获取数据并保持适当精度的方法使用连续扫描型的FTIR装置，用于通过多元件检测器检测信号。 一种从红外成像装置中的多元件检测器采集数据的方法。 该方法包括基于干涉仪的参考信号开始与采样信号同步扫描所述多元件检测器的元件，并以比采样信号的采样频率更高的频率扫描元件。 该方法还涉及在产生开始元素扫描的采样信号的下一个采样信号之前完成所有元件的扫描，并且每当产生采样信号时重复一系列操作。

公开(公告)号：US20110252871A1

公开(公告)日：2011-10-20

申请号：US13085563

申请日：2011-04-13

Applicant: Toshiyuki Nagoshi ,  Jun Koshoubu ,  Mitsuo Watanabe ,  Takashi Inoue ,  Shigeru Ito

Inventor： Toshiyuki Nagoshi ,  Jun Koshoubu ,  Mitsuo Watanabe ,  Takashi Inoue ,  Shigeru Ito

IPC: G01N11/14 ,  G01N3/00

CPC classification number: G01N11/142 ,  G01N2011/008 ,  G01N2203/0092

Abstract: Measuring apparatus comprises a rotating plate 17, a torque detection plate 18 disposed on a same axis parallel to the plate 17 with a given gap, a torque sensor about the plate 18 through the specimen held between two plates. The plate 18 is a total reflection prism which is made from a material that has a greater refractive index than the specimen and transmits UV and infrared light. An ultraviolet beam is directed onto the specimen through the prism. An infrared beam is directed into the prism. The infrared beam emerging from the prism after total reflection from the interface between the prism and the specimen is detected. A signal processor analyzes the infrared absorption spectrum of the specimen on the basis of the infrared beam. While the viscosity of the specimen in the curing process is measured, the signal processor simultaneously measures the infrared absorption spectrum.

Abstract translation: 测量装置包括旋转板17，以与给定间隙平行于板17的同一轴线设置的扭矩检测板18，通过保持在两个板之间的试样围绕板18的转矩传感器。 板18是由具有比样本更大的折射率的材料制成并透射紫外线和红外光的全反射棱镜。 紫外光束通过棱镜被引导到样品上。 红外光束被引导到棱镜中。 检测从棱镜和样品之间的界面全反射后从棱镜出射的红外光束。 信号处理器基于红外光束分析样品的红外吸收光谱。 当测量固化过程中样品的粘度时，信号处理器同时测量红外吸收光谱。

公开(公告)号：US07869039B2

公开(公告)日：2011-01-11

申请号：US12255687

申请日：2008-10-22

Applicant: Kenichi Akao ,  Jun Koshoubu

Inventor： Kenichi Akao ,  Jun Koshoubu

IPC: G01J4/00

CPC classification number: G02B21/0004 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/0289 ,  G01J3/453 ,  G02B21/002 ,  G02B21/365

Abstract: A microscopic-measurement apparatus capable of conducting measurement successively in several set areas regardless of the type of stage driving system or the precision of the stage driving system. The microscopic-measurement apparatus for acquiring optical information from desired portions of a sample by moving a measuring optical axis on a surface of the sample includes an observation-image display section for displaying a sample surface image as an observation image, in a range of visual field which is observable at a present sample position; an optical-axis display section for displaying areas to be measured and a present position of the measuring optical axis in an overlapped state with the observation image; an area setting section capable of setting measuring areas by expanding, reducing, changing in shape and moving the areas to be measured; and an optical-information acquisition section for measuring one set measuring area or several set measuring areas successively with an instruction of starting measurement.

Abstract translation: 一种能够在几个设定区域中依次进行测量而不管舞台驱动系统的类型或舞台驱动系统的精度的微观测量装置。 用于通过在样品的表面上移动测量光轴从样品的期望部分获取光学信息的微观测量装置包括用于在视觉范围内显示样品表面图像作为观察图像的观察图像显示部分 在当前样本位置可观察到的场; 用于以与观察图像重叠的状态显示测量区域和测量光轴的当前位置的光轴显示部分; 区域设定部，其能够通过扩大，缩小，变形和移动要测量的区域来设定测量区域; 以及光学信息获取部分，用于连续地用开始测量的指令测量一个设置的测量区域或多个设置的测量区域。

公开(公告)号：US20100309455A1

公开(公告)日：2010-12-09

申请号：US12763311

申请日：2010-04-20

Applicant: Noriaki Soga ,  Hiroshi Sugiyama ,  Takayuki Sera ,  Jun Koshoubu

Inventor： Noriaki Soga ,  Hiroshi Sugiyama ,  Takayuki Sera ,  Jun Koshoubu

IPC: G01N21/55 ,  G01J3/00

CPC classification number: G02B17/0808 ,  G01N21/3563 ,  G01N21/55 ,  G01N21/8806 ,  G02B21/0016

Abstract: An object of the present invention is to provide a total reflection measuring apparatus which, while visually observing a specific minute area of a measurement object, is capable of efficiently obtaining optical data on the basis of the total reflection measurement. A microscopic total reflection measuring apparatus of the present invention comprises a Cassegrain mirror 12 having a Cassegrain primary mirror 16 and a Cassegrain secondary mirror 18, which condenses an incident light beam 30 on a measurement object 20 by making an incident light beam successively reflected by the secondary mirror 18 and the primary mirror 16, and which obtains a reflected light beam 32 from the measurement object 20 by making the reflected light beam 32 successively reflected by the primary mirror 16 and the secondary mirror 18. And, a total reflection prism 14 is arranged below the Cassegrain secondary mirror 18. And the incident light beam includes a visible light beam for visual observation and a measurement light beam for acquisition of analysis information, and present invention comprises a visible light filter which separates at least one of the incident light beam to the total reflection prism and the reflected light beam from the total reflection prism 14 into a total reflection area B and a normal reflection area A, and which removes, from the one of the incident light beam and the reflected light beam, the visible light beam in the total reflection area B.

Abstract translation: 本发明的目的是提供一种全视镜测量装置，其在目视观察测量对象的特定微小区域的同时能够基于全反射测量有效地获得光学数据。 本发明的微观全反射测量装置包括具有卡塞格林主镜16和卡塞格伦二次镜18的卡塞格伦镜12，其通过使入射光束连续地反射在入射光束30上而将测量对象20上的入射光束30会聚 副镜18和主镜16，并且通过使由反射镜16和次反射镜18连续反射的反射光束32从测量对象20获得反射光束32.并且，全反射棱镜14是 并且入射光束包括用于视觉观察的可见光束和用于获取分析信息的测量光束，本发明包括一个可见光滤光器，该可见光滤光器将至少一个入射光束 到全反射棱镜14的反射光束和全反射棱镜14的反射光束 全反射区域B和正反射区域A，其从入射光束和反射光束中的一个去除全反射区域B中的可见光束。

公开(公告)号：US08531674B2

公开(公告)日：2013-09-10

申请号：US12763311

申请日：2010-04-20

Applicant: Noriaki Soga ,  Hiroshi Sugiyama ,  Takayuki Sera ,  Jun Koshoubu

Inventor： Noriaki Soga ,  Hiroshi Sugiyama ,  Takayuki Sera ,  Jun Koshoubu

IPC: G01B9/02 ,  G01J3/00 ,  G01J5/02

CPC classification number: G02B17/0808 ,  G01N21/3563 ,  G01N21/55 ,  G01N21/8806 ,  G02B21/0016

Abstract: An object of the present invention is to provide a total reflection measuring apparatus which, while visually observing a specific minute area of a measurement object, is capable of efficiently obtaining optical data on the basis of the total reflection measurement. A microscopic total reflection measuring apparatus of the present invention comprises a Cassegrain mirror 12 having a Cassegrain primary mirror 16 and a Cassegrain secondary mirror 18, which condenses an incident light beam 30 on a measurement object 20 by making an incident light beam successively reflected by the secondary mirror 18 and the primary mirror 16, and which obtains a reflected light beam 32 from the measurement object 20 by making the reflected light beam 32 successively reflected by the primary mirror 16 and the secondary mirror 18. And, a total reflection prism 14 is arranged below the Cassegrain secondary mirror 18. And the incident light beam includes a visible light beam for visual observation and a measurement light beam for acquisition of analysis information, and present invention comprises a visible light filter which separates at least one of the incident light beam to the total reflection prism and the reflected light beam from the total reflection prism 14 into a total reflection area B and a normal reflection area A, and which removes, from the one of the incident light beam and the reflected light beam, the visible light beam in the total reflection area B.

Abstract translation: 本发明的目的是提供一种全视镜测量装置，其在目视观察测量对象的特定微小区域的同时能够基于全反射测量有效地获得光学数据。 本发明的微观全反射测量装置包括具有卡塞格林主镜16和卡塞格伦二次镜18的卡塞格伦镜12，其通过使入射光束连续地反射在入射光束30上而将测量对象20上的入射光束30会聚 副镜18和主镜16，并且通过使由反射镜16和次反射镜18连续反射的反射光束32从测量对象20获得反射光束32.并且，全反射棱镜14是 并且入射光束包括用于视觉观察的可见光束和用于获取分析信息的测量光束，本发明包括一个可见光滤光器，该可见光滤光器将至少一个入射光束 到全反射棱镜14的反射光束和全反射棱镜14的反射光束 全反射区域B和正反射区域A，其从入射光束和反射光束中的一个去除全反射区域B中的可见光束。

公开(公告)号：US07954069B2

公开(公告)日：2011-05-31

申请号：US12117252

申请日：2008-05-08

Applicant: Masaaki Yumoto ,  Kenichi Akao ,  Yoshiko Akao ,  Jun Koshoubu

Inventor： Masaaki Yumoto ,  Kenichi Akao ,  Yoshiko Akao ,  Jun Koshoubu

IPC: G06F15/00 ,  G06F13/00

CPC classification number: G02B21/365

Abstract: A microscopic-measurement apparatus capable of displaying, on a display device, an enlarged view of a particular part of a specimen placed on a movable stage and providing optical information of a desired portion includes an observation-image display section for displaying an enlarged view of a specific part of the specimen on the display device; a thumbnail-image display section for acquiring the enlarged image of the specific part as a thumbnail image when the enlarged observation image is specified and displaying the thumbnail image together with the enlarged image on the display device; a thumbnail-coordinate storage section for storing coordinate information of the specific part, where the thumbnail image is acquired, in association with the thumbnail image; and a thumbnail jump display section for causing the observation-image display section to display an enlarged image of the position of the thumbnail image by specifying the thumbnail image.

Abstract translation: 一种能够在显示装置上显示放置在可移动台上的试样的特定部分并提供所需部分的光学信息的微观测量装置，包括观察图像显示部分，用于显示放大视图 显示装置上的样本的特定部分; 缩略图像显示部分，用于在指定放大的观察图像时获取特定部分的放大图像作为缩略图像，并且将显示缩略图与放大的图像一起显示在显示装置上; 缩略图坐标存储部分，用于存储与缩略图相关联的获取缩略图的特定部分的坐标信息; 以及缩略图跳转显示部分，用于使观察图像显示部分通过指定缩略图来显示缩略图像的位置的放大图像。

公开(公告)号：US20060164633A1

公开(公告)日：2006-07-27

申请号：US11337817

申请日：2006-01-23

Applicant: Jun Koshoubu ,  Noriaki Soga

Inventor： Jun Koshoubu ,  Noriaki Soga

IPC: G01J3/00

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01N21/552

Abstract: An attenuated-total-reflection measurement apparatus 10 of the present invention collects light onto a contact surface between a sample and an ATR prim 14 at an incident angle greater than or equal to a critical angle and measures total-reflection light from the contact surface. The attenuated-total-reflection measurement apparatus 10 comprises: a light-irradiating system 12 for emitting the light which is collected onto the contact surface; a photodetector 18 for detecting the total-reflection light from the contact surface; an aperture 20 for restricting the light which the photodetector 18 detects to only light from a specific measurement site in the contact surface; and a detection-side scanning mirror 22 provided in a light path extending from the ATR prism 14 to the aperture 20. The detection-side scanning mirror 22 is configured to allow the orientation of a reflecting surface thereof to be changed. And the measurement site in the contact surface, which is to be measured with the photodetector 18, is changed by moving the reflecting surface of the detection-side scanning mirror 22 with respect to the total-reflection light from the contact surface, to perform mapping measurement in the contact surface.

Abstract translation: 本发明的衰减全反射测量装置10以大于或等于临界角的入射角将光收集在样品和ATR原子14之间的接触表面上，并测量来自接触表面的全反射光。 衰减全反射测量装置10包括：光照射系统12，用于发射收集在接触表面上的光; 用于检测来自接触表面的全反射光的光电检测器18; 用于限制光电检测器18检测到的光仅在接触表面中的特定测量位置发光的光圈20; 以及设置在从ATR棱镜14延伸到孔20的光路中的检测侧扫描镜22。 检测侧扫描镜22被配置为允许其反射表面的取向改变。 并且，通过使检测侧扫描镜22的反射面相对于来自接触面的全反射光移动来改变与光检测器18进行测量的接触面的测量部位， 接触面测量。

公开(公告)号：US20050088656A1

公开(公告)日：2005-04-28

申请号：US10970518

申请日：2004-10-21

Applicant: Noriaki Soga ,  Jun Koshoubu ,  Hiroshi Tsukada

Inventor： Noriaki Soga ,  Jun Koshoubu ,  Hiroshi Tsukada

IPC: G01N21/27 ,  G01N21/59 ,  G01N21/55

CPC classification number: G01N21/3563 ,  G01N21/55 ,  G01N21/59 ,  G01N2201/1053 ,  G01N2201/117

Abstract: A mapping-measurement apparatus for applying mapping measurement to a predetermined area on a surface of a sample, comprising: a light illumination unit for illuminating the sample with light; a photodetector for detecting, through an aperture, reflection light or transmission light coming from the sample; and a detection-side scanning mirror provided in the optical path from the sample to the aperture. The aperture restricts light to be detected by the photodetector only to light coming from a given measurement portion only on the surface of the sample. The detection-side scanning mirror is structured such that the direction of a reflection plane thereof can be changed. The direction of the reflection plane of the detection-side scanning mirror is changed with respect to the incident direction of the reflection light or the transmission light coming from the sample to change the measurement portion on the surface of the sample where measurement is performed by the photodetector.

Abstract translation: 一种用于将样本测量应用于样品表面上的预定区域的测绘装置，包括：用光照射样品的光照射单元; 光检测器，用于通过孔径检测来自样品的反射光或透射光; 以及设置在从样品到孔的光路中的检测侧扫描反射镜。 孔径仅将光检测器的光限制在仅在样品表面上的来自给定测量部分的光。 检测侧扫描镜的结构使得其反射面的方向可以改变。 检测侧扫描反射镜的反射面的方向相对于来自样品的反射光或透射光的入射方向发生变化，从而将被测定的样品的表面上的测定部变更为 光电探测器

公开(公告)号：US08763447B2

公开(公告)日：2014-07-01

申请号：US13085563

申请日：2011-04-13

Applicant: Toshiyuki Nagoshi ,  Jun Koshoubu ,  Mitsuo Watanabe ,  Takashi Inoue ,  Shigeru Ito

Inventor： Toshiyuki Nagoshi ,  Jun Koshoubu ,  Mitsuo Watanabe ,  Takashi Inoue ,  Shigeru Ito

IPC: G01N11/14

CPC classification number: G01N11/142 ,  G01N2011/008 ,  G01N2203/0092

Abstract: Measuring apparatus comprises a rotating plate 17, a torque detection plate 18 disposed on a same axis parallel to the plate 17 with a given gap, a torque sensor about the plate 18 through the specimen held between two plates. The plate 18 is a total reflection prism which is made from a material that has a greater refractive index than the specimen and transmits UV and infrared light. An ultraviolet beam is directed onto the specimen through the prism. An infrared beam is directed into the prism. The infrared beam emerging from the prism after total reflection from the interface between the prism and the specimen is detected. A signal processor analyzes the infrared absorption spectrum of the specimen on the basis of the infrared beam. While the viscosity of the specimen in the curing process is measured, the signal processor simultaneously measures the infrared absorption spectrum.

Abstract translation: 测量装置包括旋转板17，以与给定间隙平行于板17的同一轴线设置的转矩检测板18，通过保持在两个板之间的试样围绕板18的转矩传感器。 板18是由具有比样本更大的折射率的材料制成并透射紫外线和红外光的全反射棱镜。 紫外光束通过棱镜被引导到样品上。 红外光束被引导到棱镜中。 检测从棱镜和样品之间的界面全反射后从棱镜出射的红外光束。 信号处理器基于红外光束分析样品的红外吸收光谱。 当测量固化过程中样品的粘度时，信号处理器同时测量红外吸收光谱。