公开(公告)号：US06877383B2

公开(公告)日：2005-04-12

申请号：US10247637

申请日：2002-09-20

申请人： Junichi Horie ,  Yasuo Onose ,  Norio Ichikawa ,  Seiji Kuryu ,  Satoshi Shimada ,  Akihiko Saito ,  Keiji Hanzawa ,  Masahiro Matsumoto ,  Hiroshi Moriya ,  Akio Yasukawa ,  Atsushi Miyazaki

发明人： Junichi Horie ,  Yasuo Onose ,  Norio Ichikawa ,  Seiji Kuryu ,  Satoshi Shimada ,  Akihiko Saito ,  Keiji Hanzawa ,  Masahiro Matsumoto ,  Hiroshi Moriya ,  Akio Yasukawa ,  Atsushi Miyazaki

IPC分类号： G01L9/00 ,  G01L9/12

CPC分类号： G01L9/0073

摘要： By sealing a diaphragm with less processes and lower cost and reducing deformation due to remaining stress, a stable and highly reliable pressure sensor construction is proposed. The pressure sensor is low in measurement error and small in floating capacitance and leakage current and good in characteristic. As a means to attain the above object, a polycrystalline silicon diaphragm is sealed with a silicon oxide film deposited through a LPCVD method and then completely covered. The diaphragm is placed on a surface of a semiconductor substrate with a nearly constant gap of 0.15 to 1.3 μm, and has difference-in-grade constructions of a deformation reducing means due to remaining stress.

摘要翻译： 通过以较少的工艺密封隔膜，降低成本，减少由于剩余应力引起的变形，提出了一种稳定可靠的压力传感器结构。 压力传感器测量误差小，浮动电容和漏电流小，特性好。 作为实现上述目的的手段，用通过LPCVD方法沉积的氧化硅膜密封多晶硅隔膜，然后完全覆盖。 隔膜被放置在半导体衬底的表面上，具有0.15-1.3μm的几乎恒定的间隙，并且由于剩余应力而具有变形减小装置的不同级别的构造。

公开(公告)号：US06167761A

公开(公告)日：2001-01-02

申请号：US09103612

申请日：1998-06-24

申请人： Keiji Hanzawa ,  Akio Yasukawa ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Masahiro Matsumoto ,  Atsushi Miyazaki ,  Norio Ichikawa ,  Junichi Horie ,  Seiji Kuryu

发明人： Keiji Hanzawa ,  Akio Yasukawa ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Masahiro Matsumoto ,  Atsushi Miyazaki ,  Norio Ichikawa ,  Junichi Horie ,  Seiji Kuryu

IPC分类号： G01L912

CPC分类号： G01L9/0073

摘要： In a capacitance type pressure sensor, a diaphragm is formed of a fragile material using an impurity-diffused monocrystal silicon and constitutes a stable pressure-responsive structure which does not undergo a plastic deformation. Between the diaphragm and a movable electrode is formed an oxide film to diminish stray capacitance between the movable electrode and a substrate and also between the movable electrode and a impurity-diffused layer. The oxide film and the movable electrode are each divided into plural regions so that the divided regions of the movable electrode are formed on the divided regions of the oxide film, thereby diminishing stress strain induced by a difference in therm expansion coefficient among the diaphragm, oxide film and movable electrode. The upper surface of a fixed electrode is covered with a structure for the fixed electrode which structure is formed by an insulating polycrystal silicon film not doped with impurity whereby the rigidity of the electrode is enhanced and it is possible to diminish a leak current.

摘要翻译： 在电容式压力传感器中，使用杂质扩散的单晶硅由脆性材料形成隔膜，构成不发生塑性变形的稳定的压力响应结构。 在隔膜和可动电极之间形成氧化膜，以减小可动电极和基板之间以及可移动电极和杂质扩散层之间的杂散电容。 氧化物膜和可动电极分别分成多个区域，使得可动电极的分割区域形成在氧化膜的分割区域上，从而减小由隔膜，氧化物中的热膨胀系数差引起的应力应变 薄膜和可动电极。 固定电极的上表面被固定电极的结构覆盖，该结构由不掺杂杂质的绝缘多晶硅膜形成，由此电极的刚性增强并且可以减小漏电流。

公开(公告)号：US20110072897A1

公开(公告)日：2011-03-31

申请号：US12829105

申请日：2010-07-01

申请人： Rintaro MINAMITANI ,  Keiji Hanzawa ,  Akio Yasukawa ,  Yasuo Onose

发明人： Rintaro MINAMITANI ,  Keiji Hanzawa ,  Akio Yasukawa ,  Yasuo Onose

IPC分类号： G01F1/692

CPC分类号： G01F1/692 ,  G01F1/6845 ,  G01F15/006 ,  G01F15/12

摘要： A temperature of the heating resistor is set at a temperature equal to or higher than a temperature, at which liquid droplets contacting a surface of the heating resistor evaporate and disappear by film boiling. Alternatively, when a heating resistance type air flow rate measuring device starts to operate or stops operating, the temperature of the heating resistor may be set at a temperature equal to or higher than the temperature, at which liquid droplets contacting a surface of the heating resistor evaporate and disappear by film boiling. Moreover, a water-repellent and oil-repellent protective coating may be provided on the surface of the heating resistor.

摘要翻译： 加热电阻器的温度被设定为等于或高于与加热电阻器的表面接触的液滴蒸发并通过薄膜沸腾而消失的温度。 或者，当加热电阻型空气流量测量装置开始运行或停止运行时，加热电阻器的温度可以设定在等于或高于液滴接触加热电阻器的表面的温度 通过薄膜沸腾蒸发并消失。 此外，可以在加热电阻器的表面上设置防水和防油涂层。

公开(公告)号：US20070089504A1

公开(公告)日：2007-04-26

申请号：US11483549

申请日：2006-07-11

申请人： Keiji Hanzawa ,  Satoshi Shimada ,  Akio Yasukawa ,  Naoki Saito ,  Keiichi Nakada ,  Izumi Watanabe

发明人： Keiji Hanzawa ,  Satoshi Shimada ,  Akio Yasukawa ,  Naoki Saito ,  Keiichi Nakada ,  Izumi Watanabe

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/692 ,  H01L2924/0002 ,  H01L2924/00

摘要： A gas flow measuring apparatus includes a detecting element including a heating resistor and a thermo-sensitive resistor disposed on a diaphragm and external terminals connected to the heating resistor and the thermo-sensitive resistor, and a flow rate detecting unit which controls heating temperature of the heating resistor and which detects a flow rate of gas according to a change in a resistance value of the heating resistor or the thermo-sensitive resistor. The detecting element includes a resistor area in which the heating resistor and the thermo-sensitive resistor are formed and a fixed section area in which the external terminals are formed. A stress mitigating unit is formed between the resistor area and the fixed section area.

摘要翻译： 一种气体流量测量装置，包括检测元件，该检测元件包括加热电阻器和设置在隔膜上的热敏电阻器和连接到加热电阻器和热敏电阻器的外部端子，以及流量检测单元，其控制 加热电阻器，其根据加热电阻器或热敏电阻器的电阻值的变化来检测气体的流量。 检测元件包括其中形成有加热电阻器和热敏电阻器的电阻器区域和形成有外部端子的固定部分区域。 在电阻器区域和固定部分区域之间形成减压单元。

公开(公告)号：US07992435B2

公开(公告)日：2011-08-09

申请号：US12512512

申请日：2009-07-30

申请人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

发明人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845

摘要： In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place where a narrow wire of a resistance temperature detector and the like crosses the peripheral part of the diaphragm section, the protective film is thinner than the other part, and the dust impact resistance is reduced. At a place where a heating resistor wire connected to a heating resistor body or resistance temperature detector wires connected to resistance temperature detector bodies cross a periphery of the diaphragm section, a film component protruding from an electrical insulating film is arranged side by side with the heating resistor wire or the resistance temperature detector wires.

摘要翻译： 在电绝缘膜的隔膜部分的周边部分被有机材料制成的保护膜覆盖的结构中，隔膜部分上的电阻器线与隔膜部分的周边部分交叉。 在电阻温度检测器等的细线与隔膜部的周边部分交叉的地方，保护膜比其他部分薄，防尘性降低。 在与加热电阻体连接的加热电阻线或与电阻温度检测体相连的电阻温度检测器线与隔膜部分的周边交叉的位置处，从电绝缘膜突出的膜部件并排配置， 电阻丝或电阻温度检测器线。

公开(公告)号：US07942053B2

公开(公告)日：2011-05-17

申请号：US12261700

申请日：2008-10-30

申请人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

发明人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F5/00 ,  G01F15/12

摘要： An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a, the tabular member being disposed inside the auxiliary passage so that the one face 5a on which the heating resistor pattern of the tabular member is provided is disposed along a flow of fluid inside the auxiliary passage 8, a heating resistor pattern-side fluid passage 8a portion formed so that the fluid flows between the face 5a and a passage-forming surface 8d of the auxiliary passage, and a back-surface 8b side fluid passage portion formed so that fluid flows between a face 5b on a side opposite to the face of the tabular member and the passage-forming surface of the auxiliary passage. Guidance portion 13 guiding dust that collides against the end portion to back-surface side fluid passage portion 8b side is provided on upstream-side end of tabular member.

摘要翻译： 一种气流测量仪器，包括：辅助通道8，布置在流体流过的主通道内部;平板状构件5，在一个面5a上设置有用于测量气流的加热电阻器的图案，平板状构件为 设置在辅助通道内部，使得设置有平板状构件的加热电阻体图形的一个面5a沿着辅助通道8内的流体流布置，形成的加热电阻器图案侧流体通道8a部分， 流体在表面5a和辅助通道的通道形成表面8d之间流动，并且后表面8b侧流体通道部分形成为使得流体在与板状构件的表面相对的一侧的表面5b和 辅助通道的通道形成表面。 引导部分13引导与端部至后表面侧流体通道部分8b侧碰撞的灰尘，该引导部分13设置在平板状部件的上游侧端部。

公开(公告)号：US20100218614A1

公开(公告)日：2010-09-02

申请号：US12707438

申请日：2010-02-17

申请人： Rintaro MINAMITANI ,  Keiji Hanzawa ,  Akio Yasukawa

发明人： Rintaro MINAMITANI ,  Keiji Hanzawa ,  Akio Yasukawa

IPC分类号： G01L9/02

CPC分类号： G01N27/18 ,  G01F1/6842 ,  G01F1/6845 ,  G01F1/692 ,  G01P5/10

摘要： An object of the present invention is to provide a structure unlikely to break in the dicing process while allowing easy execution of screening, for a measurement element in which a resistor constituting a heater is formed on a thin wall part thermally insulated from a semiconductor substrate by providing a cavity part formed in the semiconductor substrate.Provided is a measurement element including: a semiconductor substrate; an electrical insulating film formed on the semiconductor substrate; a resistor formed on the electrical insulating film, the resistor constituting a heater; and a cavity formed by removing a portion of the semiconductor substrate that corresponds to a region where a body part of the resistor is formed. The region where the body part of the resistor is formed is formed into a thin wall part by the cavity, and any of an opening and a slit is formed in a portion of the thin wall part in such a manner as to penetrate the thin wall part in a thickness direction thereof. The measurement element has a film formed covering a region of the opening or the slit.

摘要翻译： 本发明的目的是提供一种在切割过程中不易破裂的结构，同时允许轻松执行筛选，对于其中构成加热器的电阻器形成在与半导体衬底热绝缘的薄壁部分上的测量元件 提供形成在半导体衬底中的空腔部分。 提供了一种测量元件，包括：半导体衬底; 形成在所述半导体基板上的电绝缘膜; 形成在所述电绝缘膜上的电阻器，所述电阻器构成加热器; 以及通过去除对应于形成有电阻体的主体部分的区域的半导体衬底的一部分而形成的腔。 形成电阻器的主体部分的区域通过空腔形成为薄壁部分，并且在薄壁部分的一部分中形成任何开口和狭缝以穿透薄壁 部分在其厚度方向上。 测量元件具有覆盖开口或狭缝的区域的膜。

公开(公告)号：US08104355B2

公开(公告)日：2012-01-31

申请号：US12707438

申请日：2010-02-17

申请人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

发明人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

IPC分类号： G01L9/02

CPC分类号： G01N27/18 ,  G01F1/6842 ,  G01F1/6845 ,  G01F1/692 ,  G01P5/10

摘要： A measurement element includes a semiconductor substrate with electrical insulating film formed thereon. A resistor formed on the electrical insulating film constitutes a heater; and a cavity is formed by removing a portion of the semiconductor substrate that corresponds to a region where a body part of the resistor is formed. The region where the body part of the resistor is formed is formed into a thin wall part by the cavity, and an opening and a slit is formed in a portion of the thin wall part in such a manner as to penetrate the thin wall part in the thickness direction. The measurement element has a film formed covering the region of the opening or slit.

摘要翻译： 测量元件包括其上形成有电绝缘膜的半导体衬底。 形成在电绝缘膜上的电阻构成加热器; 并且通过去除对应于形成有电阻体的主体部分的区域的半导体衬底的一部分来形成空腔。 电阻体的主体部分形成的区域通过空腔形成为薄壁部分，并且在薄壁部分的一部分中形成开口和狭缝，​​以便穿透薄壁部分 厚度方向。 测量元件具有覆盖开口或狭缝的区域的膜。

公开(公告)号：US20100077851A1

公开(公告)日：2010-04-01

申请号：US12512512

申请日：2009-07-30

申请人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

发明人： Rintaro Minamitani ,  Keiji Hanzawa ,  Akio Yasukawa

IPC分类号： G01F1/692

CPC分类号： G01F1/6845

摘要： In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place where a narrow wire of a resistance temperature detector and the like crosses the peripheral part of the diaphragm section, the protective film is thinner than the other part, and the dust impact resistance is reduced. At a place where a heating resistor wire connected to a heating resistor body or resistance temperature detector wires connected to resistance temperature detector bodies cross a periphery of the diaphragm section, a film component protruding from an electrical insulating film is arranged side by side with the heating resistor wire or the resistance temperature detector wires.

摘要翻译： 在电绝缘膜的隔膜部分的周边部分被有机材料制成的保护膜覆盖的结构中，隔膜部分上的电阻器线与隔膜部分的周边部分交叉。 在电阻温度检测器等的细线与隔膜部的周边部分交叉的地方，保护膜比其他部分薄，防尘性降低。 在与加热电阻体连接的加热电阻线或与电阻温度检测体相连的电阻温度检测器线与隔膜部分的周边交叉的位置处，从电绝缘膜突出的膜部件并排配置， 电阻丝或电阻温度检测器线。

公开(公告)号：US20090126477A1

公开(公告)日：2009-05-21

申请号：US12261700

申请日：2008-10-30

申请人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

发明人： Naoki Saito ,  Takeshi Morino ,  Yuki Okamoto ,  Keiji Hanzawa ,  Hiromu Kikawa ,  Akio Yasukawa

IPC分类号： G01F1/69

CPC分类号： G01F1/6845 ,  G01F5/00 ,  G01F15/12

摘要： An air flow measuring instrument, comprising: an auxiliary passage 8 arranged inside a main passage through which fluid flows, a tabular member 5 on which a pattern of a heating resistor for measuring an air flow is provided on one face 5a, the tabular member being disposed inside the auxiliary passage so that the one face 5a on which the heating resistor pattern of the tabular member is provided is disposed along a flow of fluid inside the auxiliary passage 8, a heating resistor pattern-side fluid passage 8a portion formed so that the fluid flows between the face 5a and a passage-forming surface 8d of the auxiliary passage, and a back-surface 8b side fluid passage portion formed so that fluid flows between a face 5b on a side opposite to the face of the tabular member and the passage-forming surface of the auxiliary passage. Guidance portion 13 guiding dust that collides against the end portion to back-surface side fluid passage portion 8b side is provided on upstream-side end of tabular member.

摘要翻译： 一种气流测量仪器，包括：辅助通道8，布置在流体流过的主通道内部;平板状构件5，在一个面5a上设置有用于测量气流的加热电阻器的图案，平板状构件为 设置在辅助通道内部，使得设置有平板状构件的加热电阻体图形的一个面5a沿着辅助通道8内的流体流布置，形成的加热电阻器图案侧流体通道8a部分， 流体在表面5a和辅助通道的通道形成表面8d之间流动，并且后表面8b侧流体通道部分形成为使得流体在与板状构件的表面相对的一侧的表面5b和 辅助通道的通道形成表面。 引导部分13引导与端部至后表面侧流体通道部分8b侧碰撞的灰尘，该引导部分13设置在平板状部件的上游侧端部。