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1.发明申请METHOD FOR FORMING DLC FILM ON SPLINE SHAFT AND HOT CATHODE PIG PLASMA CVD DEVICE 有权在线轴和热阴极等离子体CVD装置上形成DLC膜的方法公开(公告)号：US20130220798A1
公开(公告)日：2013-08-29
申请号：US13594133
申请日：2012-08-24
申请人： Junji ANDO , Tomoo Suzuki , Tomoki Ogawa , Akinori Iwai , Nobuyoshi Yoshimura , Hiroyuki Hashitomi
发明人： Junji ANDO , Tomoo Suzuki , Tomoki Ogawa , Akinori Iwai , Nobuyoshi Yoshimura , Hiroyuki Hashitomi
IPC分类号： C23C14/06
CPC分类号： C23C14/0611 , C23C16/26 , C23C16/458 , C23C16/50 , F16C3/03 , F16C2206/04 , F16C2326/06 , F16D3/06 , F16D2250/0046 , F16D2300/10 , H01J37/32669
摘要： Plural spline shafts are arranged around columnar plasma, and plural spline shafts are coaxially aligned in a direction that the columnar plasma extends within a vacuum chamber. The plural coaxially aligned spline shafts are positioned so that axial gap is formed between the respective male spline sections. The axial gap of the plural male spline sections is positioned at a center of the columnar plasma in the direction that the columnar plasma extends.
摘要翻译： 多个花键轴布置在柱状等离子体周围，并且多个花键轴沿着柱状等离子体在真空室内延伸的方向同轴对准。 多个同轴对准的花键轴被定位成使得在各个花键部之间形成轴向间隙。 多个雄花键部的轴向间隙位于柱状等离子体的柱状等离子体延伸的方向的中心。
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2.发明授权Method for forming DLC film on spline shaft and hot cathode PIG plasma CVD device 有权在花键轴和热阴极PIG等离子体CVD装置上形成DLC膜的方法公开(公告)号：US09217196B2
公开(公告)日：2015-12-22
申请号：US13594133
申请日：2012-08-24
申请人： Junji Ando , Tomoo Suzuki , Tomoki Ogawa , Akinori Iwai , Nobuyoshi Yoshimura , Hiroyuki Hashitomi
发明人： Junji Ando , Tomoo Suzuki , Tomoki Ogawa , Akinori Iwai , Nobuyoshi Yoshimura , Hiroyuki Hashitomi
CPC分类号： C23C14/0611 , C23C16/26 , C23C16/458 , C23C16/50 , F16C3/03 , F16C2206/04 , F16C2326/06 , F16D3/06 , F16D2250/0046 , F16D2300/10 , H01J37/32669
摘要： Plural spline shafts are arranged around columnar plasma, and plural spline shafts are coaxially aligned in a direction that the columnar plasma extends within a vacuum chamber. The plural coaxially aligned spline shafts are positioned so that axial gap is formed between the respective male spline sections. The axial gap of the plural male spline sections is positioned at a center of the columnar plasma in the direction that the columnar plasma extends.
摘要翻译： 多个花键轴布置在柱状等离子体周围，并且多个花键轴沿着柱状等离子体在真空室内延伸的方向同轴对准。 多个同轴对准的花键轴被定位成使得在各个花键部之间形成轴向间隙。 多个雄花键部的轴向间隙位于柱状等离子体的柱状等离子体延伸的方向的中心。
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