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1.
公开(公告)号:US20170183539A1
公开(公告)日:2017-06-29
申请号:US15386502
申请日:2016-12-21
Applicant: K.C.Tech Co., Ltd.
Inventor: Jang Kuk KWON , Sung Pyo LEE , Chang Gil KWON , Jun Ha HWANG
IPC: C09G1/02 , C09K3/14 , H01L21/306
Abstract: An abrasive particle-dispersion layer composite and a polishing slurry composition including the abrasive particle-dispersion layer composite are provided. The abrasive particle-dispersion layer composite includes abrasive particles, a first dispersant that is at least one cationic compound among an amino acid, an organic acid, polyalkylene glycol and a high-molecular polysaccharide coupled to a glucosamine compound, and a second dispersant that is a cationic polymer including at least two ionized cations in a molecular formula.
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公开(公告)号:US20170183538A1
公开(公告)日:2017-06-29
申请号:US15379861
申请日:2016-12-15
Applicant: K.C.Tech Co., Ltd.
Inventor: Jang Kuk KWON , Sung Pyo LEE , Chang Gil KWON , Jun Ha HWANG
IPC: C09G1/02 , H01L21/3105 , C09G1/04
CPC classification number: C09G1/02 , H01L21/31053
Abstract: An additive composition and a positive polishing slurry composition including the additive composition are provided. The additive composition includes a cationic compound, an organic acid, a nonionic compound, and a pH adjuster.
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