公开(公告)号：US20150261904A1

公开(公告)日：2015-09-17

申请号：US14464797

申请日：2014-08-21

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Sachiko KOBAYASHI ,  Yoshihiro Naka ,  Masafumi Asano ,  Shoji Mimotogi ,  Katsuyoshi Kodera

IPC: G06F17/50 ,  H01L21/033

CPC classification number: G03F7/0002

Abstract: According to one embodiment, a pattern data generation method includes: decomposing data of a pattern to be formed into first guide pattern data and first DSA pattern data; generating a plurality of combinations of second guide pattern data and second DSA pattern data based on combinations of the first guide pattern data and the first DSA pattern data; carrying out simulation for each of the plurality of combinations of the second guide pattern data and the second DSA pattern data, and evaluating the simulation results using a predetermined evaluation function; and extracting one set or a plurality of sets of combinations that are suitable for forming the pattern to be formed, from among the plurality of combinations of the second guide pattern data and the second DSA pattern data, based on the evaluation results.

Abstract translation: 根据一个实施例，图案数据生成方法包括：将要形成的图案的数据分解为第一引导图案数据和第一DSA图案数据; 基于第一引导图案数据和第一DSA图案数据的组合，生成第二引导图案数据和第二DSA图案数据的多个组合; 对所述第二引导图案数据和所述第二DSA图案数据的所述多个组合中的每一个执行模拟，以及使用预定的评估函数来评估所述模拟结果; 以及基于评估结果从第二引导图案数据和第二DSA图案数据的多个组合中提取适合于形成要形成的图案的一组或多组组合。

公开(公告)号：US20160071740A1

公开(公告)日：2016-03-10

申请号：US14638658

申请日：2015-03-04

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Katsuyoshi KODERA ,  Yoshihiro Naka

IPC: H01L21/311 ,  G03F7/36 ,  H01L21/027 ,  G03F7/20

CPC classification number: H01L21/31144 ,  G03F7/0002 ,  H01L21/3086 ,  H01L21/31058 ,  H01L21/32139

Abstract: A pattern forming method according to the present embodiment forms a self-assembly material layer including a liquid-crystal material in at least one block thereof on a surface of a base material. An external field in a first region of the self-assembly material layer is applied locally, the first region of the self-assembly material layer is rubbed locally, or a film thickness of the first region of the self-assembly material layer is changed locally. The self-assembly material layer is phase-separated.

Abstract translation: 根据本实施例的图案形成方法在基材的表面上在其至少一个块中形成包括液晶材料的自组装材料层。 局部施加自组装材料层的第一区域中的外部场，局部摩擦自组装材料层的第一区域，或者局部地改变自组装材料层的第一区域的膜厚度 。 自组装材料层是相分离的。