公开(公告)号：US20150179491A1

公开(公告)日：2015-06-25

申请号：US14555579

申请日：2014-11-27

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Shinichi KATSUDA ,  Yoshiki KIMURA

IPC: H01L21/68 ,  B25J9/16 ,  B25J11/00

CPC classification number: B25J9/1679 ,  B25J9/1694 ,  G05B2219/37608 ,  G05B2219/39527 ,  H01L21/67259 ,  H01L21/67742 ,  Y10S901/02

Abstract: A robotic system includes: an arm configured to carry a substrate to a mounting base; a hand disposed at a tip portion of the arm, the hand being configured to hold the substrate when the substrate is carried; a detector disposed on the hand, the detector being configured to detect the substrate; and an acquirer configured to recognize heights of the detector when the substrate is detected at a first position and a second position by the detector as heights of the substrate at respective positions and acquire a mounted-state of the substrate mounted on the mounting base based on the height of the substrate at the first position and the height of the substrate at the second position.

Abstract translation: 机器人系统包括：臂，被配置为将基板运送到安装基座; 设置在所述臂的尖端部分的手，所述手被构造成在所述基板被承载时保持所述基板; 设置在手上的检测器，所述检测器被配置为检测所述基板; 以及拾取器，被配置为当基板在第一位置和第二位置处被检测器识别高度时，作为基板在各个位置的高度，并且基于安装在安装基座上的基板的安装状态，基于 第一位置处的基板的高度和第二位置处的基板的高度。

公开(公告)号：US20130194574A1

公开(公告)日：2013-08-01

申请号：US13670588

申请日：2012-11-07

Applicant: Kabushiki Kaisha Yaskawa Denki

Inventor： Shinichi KATSUDA

IPC: G01B11/00

CPC classification number: H01L21/681

Abstract: A substrate positioning device includes: a supporting unit for supporting a substrate in place; a light emitting unit and a light receiving unit respectively arranged at major surface sides of the substrate to face each other; a light emission control unit configured to control a light emission quantity of the light emitting unit pursuant to a control value; and a detecting unit for detecting a light reception quantity received by the light receiving unit. The substrate positioning device further includes an adjusting unit for controlling the control value pursuant to the light reception quantity while the substrate is not supported by the supporting unit.

Abstract translation: 基板定位装置包括：支撑单元，用于将基板支撑在适当位置; 分别布置在所述基板的主表面侧以彼此面对的发光单元和光接收单元; 发光控制单元，被配置为根据控制值来控制所述发光单元的发光量; 以及检测单元，用于检测由光接收单元接收的光接收量。 基板定位装置还包括调节单元，用于在基板不被支撑单元支撑的同时根据光接收量来控制控制值。

公开(公告)号：US20150130794A1

公开(公告)日：2015-05-14

申请号：US14525257

申请日：2014-10-28

Applicant: Kabushiki Kaisha Yaskawa Denki

Inventor： Shinichi KATSUDA

IPC: G06T13/40 ,  G06T19/20

CPC classification number: G06T15/20

Abstract: A robot simulator includes an image generator and a display controller. The image generator is configured to generate a three-dimensional robot image representing a movement to be taught to a robot. The display controller is configured to combine a two-dimensional image representing an environment of the robot with the three-dimensional robot image generated by the image generator so as to obtain a combined image, and configured to control a display to display the combined image.

Abstract translation: 机器人模拟器包括图像发生器和显示控制器。 图像生成器被配置为生成表示要向机器人教导的运动的三维机器人图像。 显示控制器被配置为将表示机器人的环境的二维图像与由图像生成器生成的三维机器人图像组合，以获得组合图像，并且被配置为控制显示以显示组合图像。

公开(公告)号：US20130218337A1

公开(公告)日：2013-08-22

申请号：US13765754

申请日：2013-02-13

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Takashi MINAMI ,  Shinichi KATSUDA

IPC: B25J9/00

CPC classification number: B25J9/0084 ,  B25J9/1682 ,  G05B2219/45031 ,  G05B2219/50036 ,  H01L21/67766 ,  H01L21/681 ,  Y10S414/137

Abstract: A transfer system includes a substrate positioning device, robots having a first robot and a second robot; and robot control devices, the robot control devices including a first robot control device to which the first robot and the substrate positioning device are connected and a second robot control device to which the second robot is connected. The first robot control device includes an acquiring unit configured to acquire, from the substrate positioning device, at least an absolute deviation amount between the rotation center of the mounting table and a center position of the substrate positioned, and a transmitting unit configured to transmit correction information relying on the absolute deviation amount acquired by the acquiring unit, to the second robot control device to which the second robot is connected.

Abstract translation: 传送系统包括基板定位装置，具有第一机器人和第二机器人的机器人; 以及机器人控制装置，所述机器人控制装置包括与所述第一机器人和所述基板定位装置连接的第一机器人控制装置和所述第二机器人连接的第二机器人控制装置。 第一机器人控制装置包括获取单元，被配置为从基板定位装置获取安装台的旋转中心与定位的基板的中心位置之间的绝对偏差量和发送单元， 依赖于由获取单元获取的绝对偏差量的信息提供给连接有第二机器人的第二机器人控制装置。

公开(公告)号：US20180090357A1

公开(公告)日：2018-03-29

申请号：US15828445

申请日：2017-12-01

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Shinichi KATSUDA ,  Takashi MINAMI

IPC: H01L21/677 ,  B25J19/02 ,  H01L21/67 ,  B25J11/00

CPC classification number: H01L21/67736 ,  B25J11/0095 ,  B25J15/0014 ,  B25J19/02 ,  H01L21/67265 ,  H01L21/677 ,  H01L21/67766 ,  H01L21/68707

Abstract: A robot system includes: a robotic hand configured to load and unload a workpiece into and from a cassette in which a plurality of workpieces are aligned in a first direction; a sensor configured to detect the workpiece; a transporter configured to change a relative position of the sensor with respect to the cassette in the first direction and in a second direction; and circuitry configured to: control the transporter to arrange the sensor at a first position; command the sensor to scan in the first direction, to acquire first mapping data; control the transporter to arrange the sensor at a second position by changing the relative position of the sensor in the second direction; command the sensor to scan in the first direction, to acquire second mapping data; and determine that one or more of the workpieces are inclined based on the first and second mapping data.

公开(公告)号：US20150253765A1

公开(公告)日：2015-09-10

申请号：US14631847

申请日：2015-02-26

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Shinichi KATSUDA

IPC: G05B19/418 ,  B25J9/16

CPC classification number: G05B19/418 ,  B25J9/163 ,  B25J9/1656 ,  G05B19/42 ,  G05B2219/45031 ,  H01L21/67766 ,  H01L21/6831 ,  Y02P90/02 ,  Y10S901/03 ,  Y10S901/28

Abstract: A teaching jig includes a body portion and at least three light emitting units installed on the body portion. In the teaching jig, all the light emitting units are positioned, when the body portion is located at a target position of the teaching jig with respect to a measurement member and is seen over the measurement member, in the vicinity of a peripheral edge of the measurement member and at only one of the inside and the outside of the peripheral edge of the measurement member.

Abstract translation: 示教夹具包括主体部分和安装在主体部分上的至少三个发光单元。 在示教夹具中，当主体部分位于示教夹具的目标位置相对于测量构件并且在测量构件上方被看到时，所有的发光单元都被定位在 并且仅在测量构件的周缘的内侧和外侧中的一个。