公开(公告)号：US09570336B2

公开(公告)日：2017-02-14

申请号：US15016272

申请日：2016-02-05

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi Furuichi ,  Yoshiki Kimura

IPC: H01L21/677 ,  H01L21/687

CPC classification number: H01L21/68707 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67766 ,  Y10S414/137

Abstract: A substrate transfer system includes a substrate transfer robot. The substrate transfer robot is provided between a first apparatus and a second apparatus which has a wall provided opposite to the substrate transfer robot and having an opening on the wall. The substrate transfer robot is configured to transfer a substrate from the first apparatus to the second apparatus via the opening and includes a base having a first axis, an arm body, and a hand. The arm body has a proximal end and a distal end and is connected to the base at the proximal end to rotate around the first axis. The substrate transfer robot includes a minimum distance from the first axis to an outermost portion of the arm body and the hand in a radius direction from the first axis being larger than a distance between the first axis and the opening on the wall.

Abstract translation: 基板传送系统包括基板传送机器人。 衬底传送机器人设置在第一设备和第二设备之间，第二设备具有与衬底传送机器人相对设置的壁，并且在壁上具有开口。 基板传送机器人构造成经由开口将基板从第一装置传送到第二装置，并且包括具有第一轴，臂主体和手的基部。 臂体具有近端和远端，并且在近端处连接到基部以围绕第一轴线旋转。 基板传送机器人包括从臂体的第一轴线到最外侧部分的最小距离，并且距离第一轴线的半径方向上的手大于第一轴线与壁上的开口之间的距离。

公开(公告)号：US09252036B2

公开(公告)日：2016-02-02

申请号：US14810409

申请日：2015-07-27

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi Furuichi ,  Yoshiki Kimura

IPC: H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67766 ,  Y10S414/137

Abstract: A substrate transfer system includes a substrate transfer robot disposed in a robot installment area defined between a first apparatus and a second apparatus. The first apparatus includes a first cassette, a second cassette and a first wall. The second apparatus includes a second wall. The substrate transfer robot transfers a substrate from each of the first cassette and the second cassette to the second apparatus. The substrate transfer robot includes a hand and an arm. The arm includes a first arm rotatable about a center of rotation. The first cassette is closer to the center of rotation than the second cassette. The arm moves with being partially disposed beyond the second wall in plan view and the arm moves without being disposed beyond the second wall in plan view when taking out the substrate from the first cassette.

Abstract translation: 衬底传送系统包括设置在第一装置和第二装置之间限定的机器人安装区域中的衬底传送机器人。 第一装置包括第一盒，第二盒和第一壁。 第二装置包括第二壁。 基板传送机构将基板从第一盒和第二盒中的每一个传送到第二装置。 基板传送机器人包括手和臂。 臂包括可围绕旋转中心旋转的第一臂。 第一盒比第二盒更接近旋转中心。 臂在平面图中部分地设置在第二壁之外移动，并且当从第一盒取出基板时，臂在平面图中移动而不设置在第二壁之外。

公开(公告)号：US09620405B2

公开(公告)日：2017-04-11

申请号：US14810408

申请日：2015-07-27

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi Furuichi ,  Yoshiki Kimura

IPC: H01L21/677 ,  H01L21/687

CPC classification number: H01L21/68707 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67766 ,  Y10S414/137

Abstract: A substrate transfer robot is disposed in a robot installment area defined between a first apparatus and a second apparatus including an opening. The first apparatus includes a first wall, the second apparatus including a second wall. The first apparatus accommodates the substrate at each of a lowest height position and a highest height position. The substrate transfer robot includes a base stationary, a hand configured, and an arm. The arm is rotatably mounted to the base to move the hand. The hand and the arm move in a height direction between a movable range defined between a lowest position and a highest position. The arm rotates with partially entering the opening when the substrate transfer robot takes out the substrate from the first apparatus. The substrate is accommodated at each of the lowest height position and the highest height position.

公开(公告)号：US09446910B2

公开(公告)日：2016-09-20

申请号：US14285565

申请日：2014-05-22

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Yoshiki Kimura ,  Daisuke Shin

IPC: G06F7/00 ,  B65G47/90 ,  B25J9/04 ,  H01L21/67 ,  H01L21/677 ,  B25J9/16

CPC classification number: B65G47/90 ,  B25J9/042 ,  B25J9/1679 ,  G05B2219/40087 ,  G05B2219/45031 ,  H01L21/67265 ,  H01L21/67766 ,  Y10S901/02

Abstract: A substrate transfer robot includes a hand to approach a substrate storage on which a substrate is placed, and to hold the substrate. An arm moves the hand. A controller controls a position and orientation of the hand. When in plan view, a substrate holding center at a time when the hand is holding the substrate is adjacent to the substrate storage and is at an access start position at a predetermined distance from the substrate storage, the substrate holding center reaches a substrate placement position in the substrate storage with a hand center line inclined toward an access straight line and with the hand holding center overlapping the access straight line. The hand center line is oriented from a base to a distal end of the hand. The access straight line is perpendicular to a front surface of the substrate storage and associated with the hand approaching the substrate storage.

Abstract translation: 基板传送机器人包括接近其上放置基板的基板存储器并且保持基板的手。 手臂移动手。 控制器控制手的位置和方向。 当在平面图中，当手保持基板时的基板保持中心与基板存储器相邻，并且处于距离基板存储器预定距离的访问开始位置，基板保持中心到达基板放置位置 在具有朝向访问直线倾斜的手中心线并且手持中心与入口直线重叠的基板存储器中。 手中心线从手的基部到远端。 存取直线垂直于基板存储器的前表面并与靠近基板存储器的手相关联。

公开(公告)号：US09272413B2

公开(公告)日：2016-03-01

申请号：US13688219

申请日：2012-11-29

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi Furuichi ,  Yoshiki Kimura ,  Tomohiro Matsuo ,  Yoshihiro Kusama

IPC: B25J9/16 ,  B25J9/04 ,  H01L21/677

CPC classification number: B25J9/042 ,  B25J9/1664 ,  H01L21/677 ,  H01L21/67766 ,  Y10S901/02 ,  Y10S901/15

Abstract: A conveying system according to an embodiment includes a robot and a controller. The controller includes a switching unit. The robot includes an arm unit formed of a hand and a plurality of arms connected rotatably with respect to one another, and a base unit. An arm on a rear end side is connected to the base unit rotatably about a rotation axis, and the hand is rotatably connected to an arm on a front end side. The switching unit switches cylindrical coordinate control for controlling the arm unit such that a trajectory of the hand overlaps with any one of lines radiating from the rotation axis and rectangular coordinate control for controlling the arm unit such that the trajectory of the hand overlaps with none of the lines at a predetermined timing.

Abstract translation: 根据实施例的输送系统包括机器人和控制器。 控制器包括切换单元。 机器人包括由手和相对于彼此可旋转地连接的多个臂形成的臂单元和基座单元。 后端侧的臂与旋转轴可旋转地连接在基座上，手可旋转地与前端侧的臂连接。 切换单元切换用于控制臂单元的圆柱坐标控制，使得手的轨迹与从旋转轴辐射的线中的任何一个重叠，并且用于控制臂单元的直角坐标控制，使得手的轨迹与 线在预定的时间。

公开(公告)号：US08924118B2

公开(公告)日：2014-12-30

申请号：US13742348

申请日：2013-01-16

Applicant: Kabushiki Kaisha Yaskawa Denki

Inventor： Daisuke Shin ,  Yoshiki Kimura

IPC: G06F19/00 ,  H01L21/677 ,  B25J9/02

CPC classification number: H01L21/677 ,  B25J9/02 ,  B25J9/042 ,  G05B2219/39082 ,  G05B2219/45032 ,  H01L21/67766 ,  H01L21/67772 ,  Y10S901/40 ,  Y10T29/53365 ,  Y10T29/5337 ,  Y10T29/53435

Abstract: A transfer system according to an embodiment includes a transfer room, a robot, a trajectory generator, a determination unit, and an output unit. The transfer room has an exclusive area defined by a predetermined distance. The robot has an arm unit that is equipped with a robot hand transferring a thin plate-like workpiece and that operates in horizontal directions. The robot is installed in the transfer room so that a minimum turning area of the arm unit overlaps with a part of the exclusive area. The transfer system generates a trajectory of the robot hand, then determines, based on the generated trajectory, whether a part of the arm unit is included in the exclusive area, and outputs a predetermined signal.

Abstract translation: 根据实施例的传送系统包括传送室，机器人，轨迹发生器，确定单元和输出单元。 转移室具有由预定距离限定的排他区域。 机器人具有臂单元，其具有传递薄板状工件并且在水平方向上操作的机器人手。 机器人安装在转移室中，使得臂单元的最小转动面积与专有区域的一部分重叠。 传送系统生成机器人手的轨迹，然后基于生成的轨迹来确定臂单元的一部分是否包括在专用区域中，并输出预定信号。

公开(公告)号：US10580676B2

公开(公告)日：2020-03-03

申请号：US15451411

申请日：2017-03-07

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Takashi Minami ,  Yoshiki Kimura

IPC: H01L21/677 ,  B25J9/00 ,  B25J18/02 ,  B25J9/04 ,  B25J11/00 ,  H01L21/687

Abstract: A robot system includes a robot including a first hand, a second hand, an arm mechanism, and an elevator. The first hand is to hold a substrate. The second hand is to hold the substrate. The arm mechanism supports the first hand and the second hand to provide a height difference between the first hand and the second hand in a height direction of the robot. The elevator is to move the arm mechanism in the height direction within a moving range larger than the height difference. Both the first hand and the second hand put the substrate in the holder. Circuitry is configured to control the robot to move the arm mechanism in the height direction by the elevator to pass the substrate from the first hand to the second hand via the holder.

公开(公告)号：US09390954B2

公开(公告)日：2016-07-12

申请号：US14284364

申请日：2014-05-21

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Yoshiki Kimura

IPC: H01L21/68 ,  H01L21/677 ,  B25J13/08 ,  H01L21/687 ,  B25J9/04 ,  H01L21/67 ,  B25J9/16

CPC classification number: H01L21/67766 ,  B25J9/042 ,  B25J9/1679 ,  B25J13/08 ,  G05B2219/40087 ,  G05B2219/45031 ,  H01L21/67265 ,  H01L21/68707 ,  Y10S901/02 ,  Y10S901/46

Abstract: A substrate transfer robot includes a hand and a controller. The hand includes at least one detector configured to detect an arrangement state of a substrate in a substrate storage. The controller is configured to control the at least one detector to detect the arrangement state of the substrate in the substrate storage with the hand inclined in plan view toward a rotation center of the substrate transfer robot relative to a substrate storage center line. The substrate storage center line is in a direction perpendicular to a front surface of the substrate storage.

Abstract translation: 基板传送机器人包括手和控制器。 手包括至少一个检测器，其被配置为检测衬底存储器中的衬底的布置状态。 所述控制器构造成控制所述至少一个检测器，以使所述手在平面图中朝向所述基板传送机器人相对于基板存储中心线的旋转中心倾斜地检测所述基板存储器中的所述基板的布置状态。 衬底存储中心线在垂直于衬底存储器的前表面的方向上。

公开(公告)号：US09358686B2

公开(公告)日：2016-06-07

申请号：US13670667

申请日：2012-11-07

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Yoshiki Kimura

IPC: B25J9/16 ,  B25J19/02

CPC classification number: B25J9/1612 ,  B25J19/02 ,  G05B2219/37002 ,  G05B2219/39476 ,  Y10S901/46

Abstract: A robot system includes: a robot including a hand configured to hold a thin plate-shaped workpiece and an arm configured to move the hand; and a robot controller configured to control the robot. The robot controller controls the robot to perform a transfer of the workpiece at a predetermined workpiece transfer position in such a way that the hand is moved in a horizontal direction while being moved in a vertical direction after the hand has reached the workpiece transfer position.

Abstract translation: 机器人系统包括：机器人，其包括构造成保持薄板状工件的手和构造成移动手的臂; 以及被配置为控制所述机器人的机器人控制器。 机器人控制器控制机器人在预定的工件传送位置上执行工件的传送，使得手在水平方向上移动，同时在手已经到达工件传送位置之后沿垂直方向移动。

公开(公告)号：US11638998B2

公开(公告)日：2023-05-02

申请号：US16707182

申请日：2019-12-09

Applicant: Kabushiki Kaisha Yaskawa Denki

Inventor： Takashi Minami ,  Yoshiki Kimura

IPC: B25J9/16 ,  B25J19/02 ,  B25J13/08 ,  B25J11/00

Abstract: A transfer system includes a hand that supports a workpiece to be transported; an arm that moves the hand; a scanning controller that moves the hand by the arm along a scanning direction that intersects sides which are provided to be fixed to the hand and not parallel with each other, such that the sides pass a known reference position in a transfer path of the workpiece; and a position detector that detects a positional deviation of the hand in a direction intersecting the scanning direction, based on a timing at which one of the side reaches the reference position and a timing at which the other side reaches the reference position RP, while the scanning controller is moving the hand.