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公开(公告)号：US20220260928A1
公开(公告)日：2022-08-18
申请号：US17210185
申请日：2021-03-23
Applicant: KLA Corporation
Inventor： Erel Milshtein , Alexander Bykanov , Konstantin Tsigutkin , Lauren Wilson , Lubomyr Kucher , Brian Ahr , Maksim Alexandrovich Deminskii , Leonid Borisovich Zvedenuk , Aleksandr Vladimirovich Lebedev , Andrey Evgenievich Stepanov
IPC: G03F7/20
Abstract: A method for producing a protective buffer flow in an EUV light source and an EUV mask inspection apparatus are provided. The method includes directing light along a light path from the EUV light source toward a collector. A first buffer gas from a buffer gas injector is injected through a plurality of through holes in the collector. The first buffer gas is directed away from a surface of the collector. A second buffer gas is injected from a ring manifold arranged peripherally to the collector and arranged a first distance toward the light path in relation to the collector. The second buffer gas is directed away from the surface of the collector. The first distance corresponds to a distance from the collector where the first buffer gas merges into a single flow.
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公开(公告)号：US20220210901A1
公开(公告)日：2022-06-30
申请号：US17138764
申请日：2020-12-30
Applicant: KLA Corporation
Inventor： Jian Xu , Lauren Wilson
Abstract: A broadband light source includes a rotatable drum coated with plasma-forming target material, a rotational actuator configured to rotate the rotatable drum, and a rotary encoder connected to the rotatable drum. The broadband light source may include a linear actuator configured to axially translate the rotatable drum and linear encoder connected to the rotatable drum. The broadband light source includes a pulsed laser source configured to direct pulsed illumination to a set of spots on the material-coated portion of the rotatable drum for exciting the plasma-forming target material and emitting broadband light as the drum is actuated. The broadband light source includes a control system. The control system is configured to receive one or more rotational position indicators from the rotary indicator and control triggering of the laser source based on the one or more rotational position indicators from rotary encoder.
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Patent Agency Ranking
公开(公告)号：US11635700B2
公开(公告)日：2023-04-25
申请号：US17210185
申请日：2021-03-23
Applicant: KLA Corporation
Inventor： Erel Milshtein , Alexander Bykanov , Konstantin Tsigutkin , Lauren Wilson , Lubomyr Kucher , Brian Ahr , Maksim Alexandrovich Deminskii , Leonid Borisovich Zvedenuk , Aleksandr Vladimirovich Lebedev , Andrey Evgenievich Stepanov
IPC: G03F7/20
Abstract: A method for producing a protective buffer flow in an EUV light source and an EUV mask inspection apparatus are provided. The method includes directing light along a light path from the EUV light source toward a collector. A first buffer gas from a buffer gas injector is injected through a plurality of through holes in the collector. The first buffer gas is directed away from a surface of the collector. A second buffer gas is injected from a ring manifold arranged peripherally to the collector and arranged a first distance toward the light path in relation to the collector. The second buffer gas is directed away from the surface of the collector. The first distance corresponds to a distance from the collector where the first buffer gas merges into a single flow.
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公开(公告)号：US20250164408A1
公开(公告)日：2025-05-22
申请号：US18941459
申请日：2024-11-08
Applicant: KLA CORPORATION
Inventor： Florian Melsheimer , Lauren Wilson , Alon Rosenthal , Matthew Hoffman
Abstract: An assembly is in a path of a beam of light, which has a first and second spectral components at different wavelengths. A first spectral component and a second spectral component of the beam of light are projected through an aperture. A sensor is disposed around the aperture to only receive a second spectral component of the beam of light. A position of the beam of light relative to the aperture can be determined using information from the sensor.
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公开(公告)号：US11617256B2
公开(公告)日：2023-03-28
申请号：US17138764
申请日：2020-12-30
Applicant: KLA Corporation
Inventor： Jian Xu , Lauren Wilson
Abstract: A broadband light source includes a rotatable drum coated with plasma-forming target material, a rotational actuator configured to rotate the rotatable drum, and a rotary encoder connected to the rotatable drum. The broadband light source may include a linear actuator configured to axially translate the rotatable drum and linear encoder connected to the rotatable drum. The broadband light source includes a pulsed laser source configured to direct pulsed illumination to a set of spots on the material-coated portion of the rotatable drum for exciting the plasma-forming target material and emitting broadband light as the drum is actuated. The broadband light source includes a control system. The control system is configured to receive one or more rotational position indicators from the rotary indicator and control triggering of the laser source based on the one or more rotational position indicators from rotary encoder.
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公开(公告)号：US11879683B2
公开(公告)日：2024-01-23
申请号：US17220719
申请日：2021-04-01
Applicant: KLA Corporation
Inventor： Sherman Seelinger , Lauren Wilson
Abstract: A light source includes a rotatable drum, an exhaust tube coupled to the rotatable drum to exhaust nitrogen gas from an interior of the rotatable drum, a feed tube situated within the exhaust tube to provide liquid nitrogen to the interior of the rotatable drum, and a casing to surround at least a portion of the exhaust tube. The light source also includes a rotary air bearing between the exhaust tube and the casing, to allow the exhaust tube to rotate with the rotatable drum.
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公开(公告)号：US20210310717A1
公开(公告)日：2021-10-07
申请号：US17220719
申请日：2021-04-01
Applicant: KLA Corporation
Inventor： Sherman Seelinger , Lauren Wilson
Abstract: A light source includes a rotatable drum, an exhaust tube coupled to the rotatable drum to exhaust nitrogen gas from an interior of the rotatable drum, a feed tube situated within the exhaust tube to provide liquid nitrogen to the interior of the rotatable drum, and a casing to surround at least a portion of the exhaust tube. The light source also includes a rotary air bearing between the exhaust tube and the casing, to allow the exhaust tube to rotate with the rotatable drum.
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