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公开(公告)号：US11469571B2
公开(公告)日：2022-10-11
申请号：US17090822
申请日：2020-11-05
Applicant: KLA Corporation
Inventor： Haifeng Huang , Rui-Fang Shi , Daniel C. Wack
Abstract: An acousto-optic modulator (AOM) laser frequency shifter system includes a laser configured to generate an incident beam, a first optical splitter optically coupled to the laser and configured to split the incident beam into at least one portion of the incident beam, at least one phase-shift channel optically coupled to the first optical splitter and configured to generate at least one frequency-shifted beam with an acousto-optic modulator (AOM) from the at least one portion of the incident beam received from the first optical splitter, and a second optical splitter configured to receive the at least one frequency-shifted beam from the at least one phase-shift channel and configured to direct the at least one frequency-shifted beam to an interferometer configured to acquire an interferogram of a sample with the at least one frequency-shifted beam.
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公开(公告)号：US11968772B2
公开(公告)日：2024-04-23
申请号：US16862279
申请日：2020-04-29
Applicant: KLA Corporation
Inventor： Zefram Marks , Larissa Juschkin , Daniel C. Wack
CPC classification number: H05H13/04 , G01N21/8806 , G02B26/085 , G02F1/11 , H05H7/04 , G01N2021/8887 , H05H2007/002 , H05H2007/005
Abstract: An optical characterization system is disclosed. The optical characterization system may comprise a synchrotron source, an optical characterization sub-system, and a sensor configured to receive a projected image from a set of imaging optics. The optical characterization sub-system may include at least the set of illumination optics, a set of imaging optics, and a diffractive optical element, a temporal modulator or an optical waveguide configured to match an etendue of a light beam output by the synchrotron source to the set of illumination optics. A method of matching the etendue of a light beam is also disclosed.
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公开(公告)号：US20210159667A1
公开(公告)日：2021-05-27
申请号：US17090822
申请日：2020-11-05
Applicant: KLA Corporation
Inventor： Haifeng Huang , Rui-Fang Shi , Daniel C. Wack
Abstract: An acousto-optic modulator (AOM) laser frequency shifter system includes a laser configured to generate an incident beam, a first optical splitter optically coupled to the laser and configured to split the incident beam into at least one portion of the incident beam, at least one phase-shift channel optically coupled to the first optical splitter and configured to generate at least one frequency-shifted beam with an acousto-optic modulator (AOM) from the at least one portion of the incident beam received from the first optical splitter, and a second optical splitter configured to receive the at least one frequency-shifted beam from the at least one phase-shift channel and configured to direct the at least one frequency-shifted beam to an interferometer configured to acquire an interferogram of a sample with the at least one frequency-shifted beam.
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公开(公告)号：US20200383200A1
公开(公告)日：2020-12-03
申请号：US16862279
申请日：2020-04-29
Applicant: KLA Corporation
Inventor： Zefram Marks , Larissa Juschkin , Daniel C. Wack
Abstract: An optical characterization system is disclosed. The optical characterization system may comprise a synchrotron source, an optical characterization sub-system, and a sensor configured to receive a projected image from a set of imaging optics. The optical characterization sub-system may include at least the set of illumination optics, a set of imaging optics, and a diffractive optical element, a temporal modulator or an optical waveguide configured to match an etendue of a light beam output by the synchrotron source to the set of illumination optics. A method of matching the etendue of a light beam is also disclosed.
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