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Patent Agency Ranking
公开(公告)号：US20130176402A1
公开(公告)日：2013-07-11
申请号：US13728014
申请日：2012-12-27
Applicant: KLA-Tencor Corporation
Inventor： Scott Young , Andy Hill
IPC: H04N13/02
CPC classification number: H04N13/239 , G02B21/22 , G02B21/364 , G02B27/0075 , G02B27/22
Abstract: The disclosure is directed to providing high resolution stereoscopy with extended depth of focus. Wave front coding in optical paths going to a first detector and at least a second detector may be implemented to affect an intermediate set of images. The intermediate set of images may be filtered (i.e. decoded) to produce a filtered set of images with selected resolution and depth of focus properties. A first filtered image and a second filtered image may be substantially simultaneously presented to respective first and second eyes of an observer to further generate an illusion of enhanced depth (i.e. 3D perception).
Abstract translation: 本公开旨在提供具有延长的焦点深度的高分辨率立体镜。 可以实现到第一检测器和至少第二检测器的光路中的波前编码以影响中间图像组。 可以对中间图像组进行滤波（即解码）以产生具有所选分辨率和焦深特性的滤波图像组。 第一滤波图像和第二滤波图像可以基本上同时呈现给观察者的相应第一和第二眼睛，以进一步产生增强深度（即3D感知）的错觉。
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公开(公告)号：US20180209784A1
公开(公告)日：2018-07-26
申请号：US15329778
申请日：2016-11-04
Applicant: KLA-Tencor Corporation
Inventor： Guoheng Zhao , Maarten van der Burgt , Sheng Liu , Andy Hill , Johan De Greeve , Karel van Gils
CPC classification number: G01B11/2518 , G01B11/0608 , G01B11/24 , G01B11/2513 , G01B11/2522 , G01B2210/56
Abstract: For three-dimensional topography measurement of a surface of an object patterned illumination is projected on the surface through an objective. A relative movement between the object and the objective is carried out, and plural images of the surface are recorded through the objective by a detector. The direction of the relative movement includes an oblique angle with an optical axis of the objective. Height information for a given position on the surface is derived from a variation of the intensity recorded from the respective position. Also, patterned illumination and uniform illumination may be projected alternatingly on the surface, while images of the surface are recorded during a relative movement of the object and the objective along an optical axis of the objective. Uniform illumination is used for obtaining height information for specular structures on the surface, patterned illumination is used for obtaining height information on other parts of the surface.
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公开(公告)号：US09961326B2
公开(公告)日：2018-05-01
申请号：US13728014
申请日：2012-12-27
Applicant: KLA-Tencor Corporation
Inventor： Scott Young , Andy Hill
CPC classification number: H04N13/239 , G02B21/22 , G02B21/364 , G02B27/0075 , G02B27/22
Abstract: The disclosure is directed to providing high resolution stereoscopy with extended depth of focus. Wave front coding in optical paths going to a first detector and at least a second detector may be implemented to affect an intermediate set of images. The intermediate set of images may be filtered (i.e. decoded) to produce a filtered set of images with selected resolution and depth of focus properties. A first filtered image and a second filtered image may be substantially simultaneously presented to respective first and second eyes of an observer to further generate an illusion of enhanced depth (i.e. 3D perception).
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公开(公告)号：US11287248B2
公开(公告)日：2022-03-29
申请号：US16806076
申请日：2020-03-02
Applicant: KLA-Tencor Corporation
Inventor： Guoheng Zhao , Maarten van der Burgt , Sheng Liu , Andy Hill , Johan De Greeve , Karel van Gils
Abstract: For three-dimensional topography measurement of a surface of an object patterned illumination is projected on the surface through an objective. A relative movement between the object and the objective is carried out, and plural images of the surface are recorded through the objective by a detector. The direction of the relative movement includes an oblique angle with an optical axis of the objective. Height information for a given position on the surface is derived from a variation of the intensity recorded from the respective position. Also, patterned illumination and uniform illumination may be projected alternatingly on the surface, while images of the surface are recorded during a relative movement of the object and the objective along an optical axis of the objective. Uniform illumination is used for obtaining height information for specular structures on the surface, patterned illumination is used for obtaining height information on other parts of the surface.
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公开(公告)号：US20200217651A1
公开(公告)日：2020-07-09
申请号：US16806076
申请日：2020-03-02
Applicant: KLA-Tencor Corporation
Inventor： Guoheng Zhao , Maarten van der Burgt , Sheng Liu , Andy Hill , Johan De Greeve , Karel van Gils
Abstract: For three-dimensional topography measurement of a surface of an object patterned illumination is projected on the surface through an objective. A relative movement between the object and the objective is carried out, and plural images of the surface are recorded through the objective by a detector. The direction of the relative movement includes an oblique angle with an optical axis of the objective. Height information for a given position on the surface is derived from a variation of the intensity recorded from the respective position. Also, patterned illumination and uniform illumination may be projected alternatingly on the surface, while images of the surface are recorded during a relative movement of the object and the objective along an optical axis of the objective. Uniform illumination is used for obtaining height information for specular structures on the surface, patterned illumination is used for obtaining height information on other parts of the surface.
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