DEVICE FOR INSPECTING LARGE AREA HIGH SPEED OBJECT

    公开(公告)号:US20200292452A1

    公开(公告)日:2020-09-17

    申请号:US16759374

    申请日:2018-02-09

    IPC分类号: G01N21/59 G02B26/12

    摘要: A high-speed device, for inspecting a large area of an object, which includes: a terahertz wave generation portion configured to generate a terahertz wave; a ring beam forming portion configured to form a ring beam by using the terahertz wave incident from the terahertz wave generation portion; a rotary mirror configured to reflect the ring beam formed by the ring beam forming portion while rotating to allow the ring beam to be incident on an inspection target object; and a detector configured to detect a ring beam generated from the inspection target object.