APPARATUS AND METHOD FOR GRAPHENE WET TRANSFER
    1.
    发明申请
    APPARATUS AND METHOD FOR GRAPHENE WET TRANSFER 有权
    用于石墨转移的装置和方法

    公开(公告)号:US20170028692A1

    公开(公告)日:2017-02-02

    申请号:US15044586

    申请日:2016-02-16

    IPC分类号: B32B37/00 C01B31/04

    摘要: Disclosed is an apparatus for graphene wet transfer, which includes: a reservoir body having at least two reservoirs; a barrier structure located on the reservoir and having at least one separated space formed by barriers; and a substrate frame located below the barrier structure and having at least one substrate accommodation groove for accommodating a target substrate to which graphene is transferred. Here, each reservoir may be filled with a solution for a wet transfer process, and the graphene may be separately located in each separated space in a floating state in the solution.

    摘要翻译: 公开了一种用于石墨烯湿转移的装置,其包括:具有至少两个储存器的储存器主体; 阻挡结构,位于储存器上并且具有至少一个由屏障形成的分离空间; 以及位于所述阻挡结构下方的衬底框架,并具有用于容纳转印有石墨烯的目标衬底的至少一个衬底容纳槽。 这里,每个储存器可以填充用于湿转印工艺的溶液,并且石墨烯可以在溶液中以浮置状态分开地位于每个分离的空间中。