DILUTED CHEMICAL LIQUID PRODUCTION APPARATUS CAPABLE OF CONTROLLING pH AND OXIDATION-REDUCTION POTENTIAL

    公开(公告)号:US20200017384A1

    公开(公告)日:2020-01-16

    申请号:US16492947

    申请日:2017-09-12

    Abstract: A diluted chemical liquid production apparatus has a structure that has a platinum group metal carrying resin column 2, a membrane-type deaeration apparatus 3 and a gas dissolving membrane apparatus 4, which are sequentially provided in a supply line 1 of ultrapure water W; and has a pH adjuster injection device 5A and an oxidation-reduction potential adjuster injection device 5B, which are provided between the platinum group metal carrying resin column 2 and the membrane-type deaeration apparatus 3. An inert gas source 6 is connected to a gaseous phase side of the membrane-type deaeration apparatus 3, and an inert gas source 7 is also connected to the gaseous phase side of the gas dissolving membrane apparatus 4; and a discharge line 8 communicates with the gas dissolving membrane apparatus 4. A pH meter 10A and an ORP meter 10B are provided in the discharge line 8. Such a diluted chemical liquid production apparatus can control a pH and an oxidation-reduction potential.

    ORGANIC SOLVENT TREATMENT METHOD
    3.
    发明申请

    公开(公告)号:US20220184596A1

    公开(公告)日:2022-06-16

    申请号:US17442573

    申请日:2020-03-10

    Abstract: An organic solvent treatment method for removing particulates from an organic solvent used in a manufacturing step of electronic components is characterized by comprising a step of bringing the organic solvent into contact with a treatment material that has a positive or negative electric charge in water and has a moisture content of 3% by mass or more. An organic solvent treatment material, which is to be used in the manufacturing step of electronic components and which is for removing particulates from an organic solvent by coming into contact with the organic solvent used in the manufacturing step of electronic components, has a positive or negative electric charge in water.

    APPARATUS FOR PRODUCING AQUEOUS pH- AND REDOX POTENTIAL-ADJUSTING SOLUTION

    公开(公告)号:US20200048116A1

    公开(公告)日:2020-02-13

    申请号:US16492616

    申请日:2017-09-12

    Abstract: An apparatus has a platinum group metal carrying resin column provided in a supply line of ultrapure water, and has a pH adjuster injection device and a redox potential adjuster injection device provided in a later stage thereof. The apparatus has a membrane-type deaeration apparatus and a gas dissolving membrane apparatus sequentially provided in a later stage of the devices, and a discharge line communicates with the gas dissolving membrane apparatus. A pH meter and an ORP meter are each provided at some midpoint in the discharge line, and the pH meter and the ORP meter are connected to a control device. Then, the control device controls the amount of adjusters to be injected from the pH adjuster injection device and the redox potential adjuster injection device, on the basis of the measurement results of the pH meter and the ORP meter.

    APPARATUS FOR REMOVING FINE PARTICLE AND METHOD FOR REMOVING FINE PARTICLE

    公开(公告)号:US20220212145A1

    公开(公告)日:2022-07-07

    申请号:US17441041

    申请日:2020-03-12

    Abstract: There is provided an apparatus for removing fine particles having membranes for removing fine particles in a liquid, wherein a microfiltration membrane or ultrafiltration membrane having a positive charge and a microfiltration membrane or ultrafiltration membrane having a negative charge are arranged in series. There is also provided a method for removing fine particles using the apparatus. Liquids may be passed through the membrane having a negative charge and the membrane having a positive charge in order; thereby, extrafine particles having a particle size of 50 nm or smaller, especially of 10 nm or smaller, in the liquids can be removed highly. The liquid passing may be carried out in the order reverse thereto.

    DILUTE CHEMICAL SOLUTION PRODUCING APPARATUS AND DILUTE CHEMICAL SOLUTION PRODUCING METHOD

    公开(公告)号:US20190233307A1

    公开(公告)日:2019-08-01

    申请号:US16313245

    申请日:2017-03-14

    Abstract: A dilute chemical solution producing apparatus includes, in a supply line of ultrapure water, a platinum group metal carrying resin column, a membrane-type deaeration apparatus, and a gas dissolving membrane apparatus, and a washing chemical solution injection apparatus is provided between the platinum group metal carrying resin column and the membrane-type deaeration apparatus. An inert gas source is connected to a gas phase side of the membrane-type deaeration apparatus, and an inert gas source is also connected to a gas phase side of the gas dissolving membrane apparatus. A discharge line communicates with the gas dissolving membrane apparatus. With such a dilute chemical solution producing apparatus, a dilute chemical solution with both dissolved oxygen and dissolved hydrogen peroxide being removed can be safely produced and supplied in a washing step for semiconductor washing.

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