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1.发明授权公开(公告)号：US08621659B2
公开(公告)日：2013-12-31
申请号：US13462845
申请日：2012-05-03
申请人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Tetsuya Matsui , Tsuneo Nakagomi , Teruaki Tokutomi
发明人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Tetsuya Matsui , Tsuneo Nakagomi , Teruaki Tokutomi
摘要： In a method of manufacturing this cantilever for the magnetic force microscope, a magnetic film is formed on a probe at a tip of the cantilever for the magnetic force microscope. When a non-magnetic rigid protective film is formed around the probe, the film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).
摘要翻译： 在用于磁力显微镜的这种悬臂的制造方法中，在用于磁力显微镜的悬臂的尖端处的探针上形成磁性膜。 当在探针周围形成非磁性刚性保护膜时，该膜从磁力显微镜的悬臂的探针的前部以15°至45°的角度和从探头背面形成 用于磁力显微镜的悬臂在两个方向上各自以（15°至30°）的范围内的角度。
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2.发明申请公开(公告)号：US20120291161A1
公开(公告)日：2012-11-15
申请号：US13462845
申请日：2012-05-03
申请人： Kaifeng ZHANG , Takenori Hirose , Masahiro Watanabe , Tetsuya Matsui , Tsuneo Nakagomi , Teruaki Tokutomi
发明人： Kaifeng ZHANG , Takenori Hirose , Masahiro Watanabe , Tetsuya Matsui , Tsuneo Nakagomi , Teruaki Tokutomi
摘要： In a method of manufacturing this cantilever for the magnetic force microscope, a magnetic film is formed on a probe at a tip of the cantilever for the magnetic force microscope. When a non-magnetic rigid protective film is formed around the probe, the film is formed from the front of the probe of the cantilever for the magnetic force microscope at an angle (15° to 45°) and from the back of the probe of the cantilever for the magnetic force microscope in two directions each at an angle in a range of (15° to 30°).
摘要翻译： 在用于磁力显微镜的这种悬臂的制造方法中，在用于磁力显微镜的悬臂的尖端处的探针上形成磁性膜。 当在探针周围形成非磁性刚性保护膜时，该膜从磁力显微镜的悬臂的探针的前部以15°至45°的角度和从探头背面形成 用于磁力显微镜的悬臂在两个方向上各自以（15°至30°）的范围内的角度。
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3.发明申请公开(公告)号：US20120307605A1
公开(公告)日：2012-12-06
申请号：US13482065
申请日：2012-05-29
申请人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
发明人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
IPC分类号： G11B13/04
CPC分类号： G11B5/455 , G11B2005/0021
摘要： In a method and an apparatus for inspecting a thermally assisted magnetic recording head element, a specimen is mounted on a table movable in a plane of a scanning probe microscope device, evanescent light is generated from a portion of light emission of evanescent light of the specimen, scattered light of the evanescent light is detected by moving the table in the plane while a cantilever of the scanning probe microscope having a probe is vertically vibrated in the vicinity of a surface of the specimen, and an intensity distribution of the evanescent light emitted from the portion of light emission of evanescent light or a surface profile of the portion of light emission of evanescent light of the specimen is inspected using position information of generation of the evanescent light based on the detected scattered light.
摘要翻译： 在用于检查热辅助磁记录头元件的方法和装置中，将样本安装在可在扫描探针显微镜装置的平面中移动的台上，从所述样本的渐逝光的发光部分产生ev逝光 通过在平面中移动台来检测ev逝光的散射光，同时具有探针的扫描探针显微镜的悬臂在试样的表面附近垂直振动，并且从from射光发射的ev逝光的强度分布 使用基于检测到的散射光的ev逝光的产生的位置信息来检查ev逝光的发光部分或试样的ev逝光的发光部分的表面轮廓。
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4.发明授权公开(公告)号：US08483035B2
公开(公告)日：2013-07-09
申请号：US13482065
申请日：2012-05-29
申请人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
发明人： Kaifeng Zhang , Takenori Hirose , Masahiro Watanabe , Shinji Homma , Tsuneo Nakagomi , Teruaki Tokutomi , Toshihiko Nakata , Takehiro Tachizaki
CPC分类号： G11B5/455 , G11B2005/0021
摘要： In a method and an apparatus for inspecting a thermally assisted magnetic recording head element, a specimen is mounted on a table movable in a plane of a scanning probe microscope device, evanescent light is generated from a portion of light emission of evanescent light of the specimen, scattered light of the evanescent light is detected by moving the table in the plane while a cantilever of the scanning probe microscope having a probe is vertically vibrated in the vicinity of a surface of the specimen, and an intensity distribution of the evanescent light emitted from the portion of light emission of evanescent light or a surface profile of the portion of light emission of evanescent light of the specimen is inspected using position information of generation of the evanescent light based on the detected scattered light.
摘要翻译： 在用于检查热辅助磁记录头元件的方法和装置中，将样本安装在可在扫描探针显微镜装置的平面中移动的台上，从所述样本的渐逝光的发光部分产生ev逝光 通过在平面中移动台来检测ev逝光的散射光，同时具有探针的扫描探针显微镜的悬臂在试样的表面附近垂直振动，并且从from射光发射的ev逝光的强度分布 使用基于检测到的散射光的ev逝光的产生的位置信息来检查ev逝光的发光部分或试样的ev逝光的发光部分的表面轮廓。
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5.发明授权公开(公告)号：US08359661B2
公开(公告)日：2013-01-22
申请号：US12649468
申请日：2009-12-30
申请人： Takehiro Tachizaki , Masahiro Watanabe , Hideaki Sasazawa , Minoru Yoshida , Tsuneo Nakagomi , Teruaki Tokutomi
发明人： Takehiro Tachizaki , Masahiro Watanabe , Hideaki Sasazawa , Minoru Yoshida , Tsuneo Nakagomi , Teruaki Tokutomi
IPC分类号： G01Q60/52
摘要： Applying an alternating current to a magnetic head as a sample generates an alternate-current magnetic field from the sample. A cantilever includes a probe that is made of a magnetic material or is coated with a magnetic material. The cantilever is displaced when it approaches the sample. Detecting the displacement of the cantilever detects distribution of the magnetic field from the sample. It is possible to fast measure distribution of the magnetic field generated from the sample when a frequency of the alternating current applied to the sample differs from a resonance frequency of the cantilever.
摘要翻译： 以交替电流作为样品施加磁头会产生来自样品的交流磁场。 悬臂包括由磁性材料制成或涂覆有磁性材料的探针。 悬臂在接近样品时被移位。 检测悬臂的位移检测样品的磁场分布。 当施加到样品的交流电流的频率与悬臂的共振频率不同时，可以快速测量从样品产生的磁场的分布。
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6.发明申请公开(公告)号：US20100205699A1
公开(公告)日：2010-08-12
申请号：US12649468
申请日：2009-12-30
申请人： Takehiro TACHIZAKI , Masahiro Watanabe , Hideaki Sasazawa , Minoru Yoshida , Tsuneo Nakagomi , Teruaki Tokutomi
发明人： Takehiro TACHIZAKI , Masahiro Watanabe , Hideaki Sasazawa , Minoru Yoshida , Tsuneo Nakagomi , Teruaki Tokutomi
摘要： Applying an alternating current to a magnetic head as a sample generates an alternate-current magnetic field from the sample. A cantilever includes a probe that is made of a magnetic material or is coated with a magnetic material. The cantilever is displaced when it approaches the sample. Detecting the displacement of the cantilever detects distribution of the magnetic field from the sample. It is possible to fast measure distribution of the magnetic field generated from the sample when a frequency of the alternating current applied to the sample differs from a resonance frequency of the cantilever.
摘要翻译： 以交替电流作为样品施加磁头会产生来自样品的交流磁场。 悬臂包括由磁性材料制成或涂覆有磁性材料的探针。 悬臂在接近样品时被移位。 检测悬臂的位移检测样品的磁场分布。 当施加到样品的交流电流的频率与悬臂的共振频率不同时，可以快速测量从样品产生的磁场的分布。
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7.发明授权公开(公告)号：US08299784B2
公开(公告)日：2012-10-30
申请号：US12819422
申请日：2010-06-21
申请人： Teruaki Tokutomi , Akira Tobita , Tsuneo Nakagomi
发明人： Teruaki Tokutomi , Akira Tobita , Tsuneo Nakagomi
CPC分类号： G11B5/3166 , G11B5/3173 , G11B5/455 , Y10T29/49032
摘要： A device for transporting a magnetic head, a device for inspecting a magnetic head, and a method for manufacturing a magnetic head are provided. The device for transporting a magnetic head is capable of freely changing a posture of a thin film magnetic head when transporting a row bar-shaped thin film magnetic head. The transporting device for transporting a slender rectangular plate-like, that is, row bar-shaped magnetic head, cut from a wafer is capable of performing vertical installation and horizontal installation. The transporting device for transporting a slender rectangular plate-like, i.e., row bar-shaped magnetic head, is capable of performing the vertical installation and horizontal installation, and changing the posture of the magnetic head from vertical installation into horizontal installation and from horizontal installation into vertical installation when transporting the magnetic head between processes. The transporting device is capable of performing a slantwise installation in a slantwise state between the vertical installation and the horizontal installation. Therefore, with respect to a vertically or horizontally installed tray when transporting the magnetic head between processes, the row bar-shaped thin film magnetic head can be transported easily.
摘要翻译： 提供一种用于传送磁头的装置，用于检查磁头的装置以及制造磁头的方法。 用于输送磁头的装置能够在输送行棒形薄膜磁头时自由地改变薄膜磁头的姿势。 用于输送从晶片切割的细长矩形板状输送装置，即行棒形磁头，能够执行垂直安装和水平安装。 用于运输细长矩形板状输送装置，即行棒形磁头，能够执行垂直安装和水平安装，并且将磁头的姿势从垂直安装改变为水平安装和水平安装 在进程之间运送磁头时进入垂直安装。 运输装置能够在垂直安装和水平安装之间以倾斜状态执行倾斜安装。 因此，当在工艺之间运送磁头时，相对于垂直或水平安装的托盘，可以容易地输送行棒状薄膜磁头。
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公开(公告)号：US08278917B2
公开(公告)日：2012-10-02
申请号：US12394041
申请日：2009-02-27
申请人： Tsuneo Nakagomi , Teruaki Tokutomi
发明人： Tsuneo Nakagomi , Teruaki Tokutomi
IPC分类号： G01R33/12
CPC分类号： G11B5/455 , G11B5/3173 , Y10T29/49032
摘要： A magnetic head inspection device inspects the write track width of a thin film magnetic head in a phase as early as possible during the manufacturing process. A recording signal (excitation signal) is input from bonding pads to the thin film magnetic head in a rowbar, and the magnetic field generated by the write pole (element) included in the thin film magnetic head is observed directly by using a magnetic force microscope (MFM), a scanning Hall probe microscope (SHPM), or a scanning magneto resistance effect microscope (SMRM) that performs a scanning motion at a position equivalent to the flying height of the magnetic head. In this manner, a shape of the generated magnetic field instead of the physical shape of the write pole (element) is measured; thus, a non-destructive inspection can be performed on the effective magnetic track width.
摘要翻译： 磁头检查装置在制造过程中尽可能早地检查薄膜磁头的写入轨道宽度。 记录信号（激励信号）从接合焊盘输入到行列中的薄膜磁头，并且通过使用磁力显微镜直接观察由包括在薄膜磁头中的写入极（元件）产生的磁场 （MFM），扫描霍尔探针显微镜（SHPM）或扫描磁阻效应显微镜（SMRM），其在与磁头的飞行高度相当的位置执行扫描运动。 以这种方式，测量产生的磁场的形状而不是写入极（元件）的物理形状; 因此，可以对有效磁道宽度进行非破坏性检查。
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公开(公告)号：US08185968B2
公开(公告)日：2012-05-22
申请号：US13024589
申请日：2011-02-10
CPC分类号： G11B5/455 , G11B5/3173 , Y10T428/11 , Y10T428/1179
摘要： A magnetic head inspection method is provided with the step that an area smaller than a half of a scanning and measurement area of a magnetic probe in a cantilever unit of the MFM is set as a scanning and measurement area on a surface of a recording portion of the magnetic head that is scanned by the AFM, so as to greatly reduce the inspection time (tact time) of the AFM.
摘要翻译： 磁头检查方法具有以下步骤：将MFM的悬臂单元中的磁性探针的扫描和测量区域的一半以下的面积设定为扫描和测量区域在记录部分的记录部分的表面上 由AFM扫描的磁头，大大缩短了AFM的检查时间（节拍时间）。
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